An ultrasonic device includes: a substrate provided with a first opening and a second opening; a support film that is provided on the substrate and blocks the first opening and the second opening; a transmitting piezoelectric film that is provided on the support film at a position which overlaps the first opening when viewed in a thickness direction of the substrate and is interposed between a pair of electrodes in the thickness direction of the substrate; and a receiving piezoelectric film that is provided on the support film at a position which overlaps the second opening when viewed in the thickness direction of the substrate and is interposed between a pair of electrodes in the thickness direction of the substrate. In the thickness direction of the substrate, a thickness dimension of the transmitting piezoelectric film is smaller than a thickness dimension of the receiving piezoelectric film.

A piezoelectric film includes a substrate having flexibility, and at least two piezoelectric elements provided to the substrate so as to be arranged at intervals of a first dimension along a first direction, the piezoelectric elements are each configured by stacking a first electrode film, a piezoelectric film made of an inorganic material, and a second electrode film along a thickness direction of the substrate, and an area between the piezoelectric elements adjacent to each other along the first direction forms a vibrational region which can be displaced in the thickness direction.

An ultrasonic sensor includes an element substrate having a first and a second surface at an opposite side of the first surface, including an opening section piercing through the element substrate in a Z direction from the first to second surface, a vibrating plate on the first surface of the element substrate to close the opening section, a plurality of vibration regions extending along an X direction orthogonal to the Z direction on the vibration plate in positions overlapping the opening section, and a plurality of piezoelectric elements to correspond to the plurality of vibration regions of the vibration plate. The opening section includes, on the first surface, a first and second side parallel to the X direction and a third and fourth side coupling end portions in the X direction of the first and second sides at an acute or obtuse angle to the first and the second side.

Examples of the disclosure relate to a transducer array. The transducer array includes a monolithic crystal, a first array of electrodes provided on a first surface of the monolithic crystal, and a second array of electrodes provided on a second surface of the monolithic crystal. The second surface is an opposing surface to the first surface. The transducer array also comprises a plurality of oscillators wherein the plurality of oscillators include sections of the monolithic crystal that are positioned between opposing portions of an electrode from the first array and portions of an electrode from the second array.

Described herein is mechanically decoupling of an electromechanical transducer from a common substrate, enabling multiple transducers to be surface mounted to a common substrate such as a printed circuit board (PCB) without experiencing mechanical cross-coupling. The decoupling of the transducer from the substrate enables the transducers to be attached without reducing the efficiency of acoustic transduction. The design of the mount enables it to be assembled in an automated manner with pick and place tools.

A system and method for detecting an anomaly in a structure using an adaptive filter to compensate for variations in piezoelectric transducer performance due to environmental factors such as temperature. A first voltage signal having a first amplitude is sent to a reference piezoelectric actuator. Thereafter, a first reference voltage signal is received from a reference piezoelectric receiver which is acoustically coupled to detect the guided wave generated by the reference piezoelectric actuator. A second amplitude is determined using an optimization algorithm of an adaptive filter to compensate for nonlinear behavior of the reference piezoelectric actuator and receiver based on the first reference voltage signal. Then the adaptive filter sends a second voltage signal having the second amplitude to the reference and test piezoelectric actuators. Reference and test voltage signals are received from the reference and test piezoelectric receivers in response to the second voltage signal. A difference voltage signal representing differences between the reference and test voltage signals received is then recorded.

An electronic device includes a substrate layer having a front surface and a back surface opposite the front surface, a plurality of ultrasonic transducers formed on the front surface of the substrate layer, wherein the plurality of ultrasonic transducers generate backward waves during operation, the backward waves propagating through the substrate layer, and a plurality of substrate structures formed within the back surface of the substrate layer, the plurality of substrate structures configured to modify the backward waves during the operation.

A piezoelectric micro-machined ultrasonic transducer (PMUT) is provided, comprising a dedicated ultrasonic transmitter and at least one separate dedicated ultrasonic receiver on a single common semiconductor die. A plurality of PMUTs may be arranged in a tessellated array. Also disclosed is a system comprising at least one PMUT on a single common semiconductor die, a dedicated ultrasonic transmitter arranged to transmit a first ultrasonic signal and at least one separate dedicated ultrasonic receiver arranged to receive a second ultrasonic signal is also provided. The system further comprises a signal processing subsystem which comprises an analogue domain; a digital domain; a digital to analogue converter; and an analogue to digital converter. The signal processing subsystem is arranged to generate an estimated direct path signal in said digital domain, convert said estimated direct path signal to an analogue estimated direct path signal using said digital to analogue converter, subtract said analogue estimated direct path signal from said second signal to produce a modified received signal and convert said modified received signal to a digital modified received signal using said analogue to digital converter.

The present disclosure provides an acoustic transducer unit and a manufacturing method thereof, and an acoustic transducer, the acoustic transducer unit includes: a base substrate; a first electrode on the base substrate; a support pattern on a side of the first electrode away from the base substrate, which is enclosed into an accommodation groove, at least one release groove and at least one connection groove, an orthographic projection of the release groove on the base substrate is spaced apart from that of the accommodation groove on the base substrate, the connection groove is between the accommodation groove and the release groove to communicate them; a diaphragm pattern on the side of the first electrode away from the base substrate and capable of vibrating in the accommodation groove; a filling pattern in the release groove; a second electrode on a side of the diaphragm pattern away from the base substrate.

For intraluminal ultrasound probes, the transducer is divided into multiple segments. The segments are connected in a way that allows them to slide relative to each other. This sliding arrangement allows for the transducer to be used in two different apertures at different times while in the patient. One aperture is shaped for insertion of the probe through a limited space, and the other aperture forms an array with a larger elevation extent, allowing greater quality imaging along the elevation dimension.