Patent classifications
B29C2043/025
Systems and methods for curing a shaped film
Systems and methods for shaping a film. Formable material in an imprint field on the substrate may be contacted with a shaping surface of a template. Outer boundaries of the imprint field correspond to outer boundaries of the shaping surface. Shaping the film includes forming a cured layer within the imprint field while the shaping surface is in contact with the formable material. Shaping the film may include separating the shaping surface from the cured layer. Shaping the film may include moving the template away from the imprint field to a first offset location wherein the outer boundaries of the shaping surface are offset relative to the outer boundaries of the imprint field. Shaping the film may include curing a second portion of the formable material while the template is at the first offset location so as to form the shaped film.
Imprint apparatus and article manufacturing method
Provided is an imprint apparatus that imprints a pattern formed on a mold onto a substrate. The imprint apparatus includes a substrate holder that holds the substrate and can move in a direction along the surface of the substrate; a gas supply unit for supplying a gas into a space between a pattern part of the mold and the substrate; and a wall part that is disposed so as to enclose the space that is supplied with gas, wherein at a position opposed to the substrate and the mold, the wall part faces the substrate holder or the substrate with a gap therebetween.
Flexible mask modulation for controlling atmosphere between mask and substrate and methods of using the same
An apparatus may include a substrate holder configured to hold a substrate. The substrate holder may include a first chucking region having a first area and an adjacent region extending from the chucking region. The apparatus may also include a superstrate holder configured to hold a superstrate. The superstrate holder may include a second chucking region having a second area. The second area may be larger than the first area and the superstrate holder faces the substrate holder forming a first gap between the adjacent region surface and the superstrate and a second gap between the substrate and the superstrate. The apparatus may also include a gas supply system between the first gap and the second gap. The superstrate holder may alter a shape of the held superstrate to decrease the first gap and increase the second gap.
Template, template manufacturing method, and semiconductor device manufacturing method
According to one embodiment, a template for imprint patterning processes comprises a template substrate having a first surface and a pedestal on the first surface of the template substrate, the pedestal having a second surface spaced from the first surface in a first direction perpendicular to the first surface. A pattern is disposed on the second surface. The pedestal has a sidewall between the first surface and the second surface that is at an angle of less than 90° to the second surface.
METHOD FOR PRODUCTION OF THIN PLATE-LIKE LAMINATE HAVING FILM-LIKE RESIN LAYER
[Object] To provide a method for the production of a thin plate-like laminate having a film-like resin layer in which a concave/convex shape can stably be formed with high accuracy on the film-like resin layer laminated on a thin plate-like substrate.
[Achieving Means] There are provided a step of creating a mold retention structure 100 in which molds 110, which have been heated to a thermal deformation temperature of a film-like resin composition 84, are arranged on both surface sides of a workpiece 85, and a step of introducing the mold retention structure in which the heated molds are arranged between two compression rollers 52, 54 and compressing outer surfaces of the molds by rotating the compression rollers to integrally thermocompression-bond the film-like resin composition and a substrate 81 to form a thin plate-like laminate 80 having a film-like resin layer 82.
SOFT TUBE AND METHOD FOR MANUFACTURING THE SAME, AND SHEET CONVEYING ROLLER AND METHOD FOR MANUFACTURING THE SAME
Disclosed is a soft tube of a sheet conveying portion of a sheet conveying roller, including: a region with irregularities in an outer peripheral surface of the soft tube. The region has a root mean square slope Sdq within a range of 0.03 to 0.50.
Smooth film laminated elastomer articles
A method for manufacturing at least one elastomeric article is provided. The method includes placing into a mold an assembly of an uncured elastomeric sheet, a first film fully covering the elastomeric sheet and a second film covering the first film, such that the second film is in contact with and positioned between the first film and an interior surface of the mold. The method further includes curing the assembly in the mold, such that the first film is laminated onto the elastomeric sheet thereby forming the at least one elastomeric article.
METHOD FOR ATTACHING NONSLIP MEMBERS TO BOTH SIDES OF SOCK
The present invention relates to a method and a structure for attaching nonslip members to both sides of a sock, in which nonslip members having a variety of patterns may be firmly attached to an inner side and an outer side of a sock, which need a nonslip member, using a mold, the nonslip member includes air holes to be smoothly ventilated, and a size of the nonslip member is adequately adjusted according to a thickness and an area of the mold.
Imprint apparatus and article manufacturing method
An imprint apparatus that forms a pattern made of an imprint material on each of a plurality of shot regions of a substrate, includes a user interface configured to allow a user to perform editing for assigning each of the plurality of shot regions to any one of a plurality of groups such that each of the plurality of groups is formed by at least one shot region onto which the imprint material is continuously supplied from a dispenser.
Method for production of thin plate-like laminate having film-like resin layer
[Object] To provide a method for the production of a thin plate-like laminate having a film-like resin layer in which a concave/convex shape can stably be formed with high accuracy on the film-like resin layer laminated on a thin plate-like substrate. [Achieving Means] There are provided a step of creating a mold retention structure 100 in which molds 110, which have been heated to a thermal deformation temperature of a film-like resin composition 84, are arranged on both surface sides of a workpiece 85, and a step of introducing the mold retention structure in which the heated molds are arranged between two compression rollers 52, 54 and compressing outer surfaces of the molds by rotating the compression rollers to integrally thermocompression-bond the film-like resin composition and a substrate 81 to form a thin plate-like laminate 80 having a film-like resin layer 82.