Various embodiments of the present disclosure are directed towards a semiconductor device. The semiconductor device includes an interconnect structure disposed over a semiconductor substrate. A dielectric structure is disposed over the interconnect structure. A plurality of cavities are disposed in the dielectric structure. A microelectromechanical system (MEMS) substrate is disposed over the dielectric structure, where the MEMS substrate comprises a plurality of movable membranes, and where the movable membranes overlie the cavities, respectively. A plurality of fluid communication channels are disposed in the dielectric structure, where each of the fluid communication channels extend laterally between two neighboring cavities of the cavities, such that each of the cavities are in fluid communication with one another.

A vibration motor includes a first vibrating body including a first projection and a second vibrating body including a second projection, the first vibrating body and the second vibrating body receiving electric power and vibrating to generate a driving force and transmitting the driving force to a driven section, a first coil spring configured to urge the first vibrating body and the second vibrating body in a driving direction and restrict positions of the first vibrating body and the second vibrating body in the driving direction, and a case housing the first vibrating body, the second vibrating body, and the first coil spring. The first vibrating body, the second vibrating body, and the first coil spring are arranged in the driving direction. The number of first coil springs is smaller than the number of first and second vibrating bodies in the urging direction.

A transducer probe includes a transducer array with rows of transducer elements that each extend in an elevation direction and is transverse to an azimuth direction, a matching layer disposed adjacent to the transducer array, and a focusing layer disposed adjacent to the matching layer. The focusing layer includes a first material with a first refractive index and a second material with a second refractive index, and the first refractive index is less than the second refractive index. The first and second materials are distributed in an alternating pattern with the first material at edges of the rows. First widths of the first material decrease from the edges towards a center of the rows, and second widths of the second material increase from the edges towards the center.

Various embodiments of the present disclosure are directed towards a semiconductor device. The semiconductor device includes an interconnect structure disposed over a semiconductor substrate. A dielectric structure is disposed over the interconnect structure. A plurality of cavities are disposed in the dielectric structure. A microelectromechanical system (MEMS) substrate is disposed over the dielectric structure, where the MEMS substrate comprises a plurality of movable membranes, and where the movable membranes overlie the cavities, respectively. A plurality of fluid communication channels are disposed in the dielectric structure, where each of the fluid communication channels extend laterally between two neighboring cavities of the cavities, such that each of the cavities are in fluid communication with one another.

An ultrasonic device includes a first substrate including a first surface on which a first electrode coupled to a piezoelectric element is placed, a second substrate including a second surface on which a second electrode is placed, an intermediate substrate placed between the first substrate and the second substrate and including a third surface joined to the first surface and a fourth surface facing the second surface, and a bonding portion, wherein the intermediate substrate has a through hole penetrating from the third surface to the fourth surface and a third electrode provided in the through hole and coupled to the first electrode, the second electrode is coupled to the third electrode and electrically coupled to the first electrode via the third electrode, a plurality of the bonding portions are provided in island shapes apart from one another between the second substrate and the intermediate substrate, and at least one of the bonding portions is provided to surround the third electrode.

A transducer is described that includes a substrate configured to be deposited on a solid object, and a transparent medium coupled to the substrate and configured to oscillate at a pre-selected frequency upon receipt of an electrical excitation or a mechanical excitation and to provide a first acoustic wave. The transducer also includes an actuator configured to receive an electrical power, and to provide the electrical excitation or the mechanical excitation to the transparent medium, wherein at least a portion of the solid object is viewable through the transparent medium, and the first acoustic wave is at least partially transmitted through an interface of the transparent medium. A system and a non-transitory, computer-readable medium storing instructions to cause the system to perform a method to use the transducer for generating acoustic waves in a transparent medium are also disclosed.

An ultrasonic transducer of this invention includes a rigid substrate with opening parts extending between bottom and top surfaces, a flexible resin film fixed to the top surface of the substrate to cover the opening parts, and piezoelectric elements fixed to a top surface of the resin film so as to overlap in a plan view with the opening parts, respectively. An arrangement pitch of the piezoelectric elements is preferably set to be equal to or less than 4.3 mm, and the piezoelectric element may have a rectangular shape in the plan view having longitudinal and lateral dimensions in the plan view with a maximum value of 4.0 mm or less, a circular shape in the plan view having a diameter of 4.0 mm or less, or an elliptical shape in the plan view having a major axis of 4.0 mm or less.

An ultrasound transducer in which a plurality of pMUT cells are arranged. The pMUT cells have a plurality of resonance frequencies. Each of the pMUT cells includes a piezoelectric film that is polarized in a first direction that is a thickness direction or a second direction that is opposite to the first direction.

A vibration apparatus may include a vibration generator including a piezoelectric material and a sensor portion configured at the vibration generator, and thus, may correct or compensate for an electrical characteristic change of the vibration generator and may correct or compensate for a vibration characteristic of the vibration generator. An apparatus including the vibration apparatus is also disclosed.

A method for isolating vibrations for centrifuge testing devices is provided. The method comprises coupling a test payload platform to a number of piezoelectric actuators and coupling the piezoelectric actuators to a reaction mass coupled to a centrifuge arm. A layer of vibration-absorbing material is sandwiched between the reaction mass and the centrifuge arm. The centrifuge arm is rotated around an axis, and the test payload platform is vibrated with the piezoelectric actuators as the centrifuge rotates, wherein the layer of vibration-absorbing material prevents vibrations from traveling down the centrifuge arm.