A method of producing an ultrasonic transducer includes providing a delay line substrate, providing a piezoelectric substrate as a transducer element, depositing a metal conductive layer on one of the delay line substrate and the piezoelectric substrate, forming an atomic diffusion bond between the metal conductive layer and one of the delay line substrate and the piezoelectric substrate, patterning removal of a portion of the piezoelectric substrate to expose the metal conductive layer, depositing a first patterned electrode on the exposed metal conductive layer to allow external electrical connection to the exposed metal conductive layer, and depositing a second patterned electrode on the piezoelectric substrate to form an active area of the ultrasonic transducer and to allow external electrical connection to be made.

An acoustic device and method of manufacturing same. The device may be used to inspect tubulars and parts with high resolution. The acoustic device may include a 2D ultrasonic transducer layer and an ASIC connected to each other by an array of conductive wires. A non-conductive, acoustic damping material is flowed and set around the wires. to form a thick acoustic backing layer. Manufacturing the ultrasonic transducer may involve wire bonding. Electrical Discharge Machining or supporting rigid posts on a substrate. A surface of the backing layer may be machined. plated and diced to create conductive pads to connect the transducer layer to the wires then to the ASIC.

The ultrasonic transducer includes a case, a piezoelectric vibrator disposed in the case, a wiring member overlapped with the piezoelectric vibrator in the case and inputting signals for vibrating the piezoelectric vibrator received from the outside to the piezoelectric vibrator, and a damper portion provided in the wiring member and adjacent to the piezoelectric vibrator when viewed from the thickness direction of the piezoelectric vibrator.

A PMUT device includes a membrane element extending perpendicularly to a first direction and configured to generate and receive ultrasonic waves by oscillating about an equilibrium position. At least two piezoelectric elements are included, with each one located over the membrane element along the first direction and configured to cause the membrane element to oscillate when electric signals are applied to the piezoelectric element, and generate electric signals in response to oscillations of the membrane element. The membrane element has a lobed shape along a plane perpendicular to the first direction, with the lobed shape including at least two lobes. The membrane element includes for each piezoelectric member a corresponding membrane portion including a corresponding lobe, with each piezoelectric member being located over its corresponding membrane portion.

Described are transducer assemblies and imaging devices comprising: a microelectromechanical systems (MEMS) die including a plurality of piezoelectric elements; a complementary metal-oxide-semiconductor (CMOS) die electrically coupled to the MEMS die by a first plurality of bumps and including at least one circuit for controlling the plurality of piezoelectric elements; and a package secured to the CMOS die by an adhesive layer and electrically connected to the CMOS die.

An ultrasonic transducer that includes a delay line, a piezoelectric element, and a metal conductive layer between the delay line and the piezoelectric element. The delay line and the piezoelectric element are acoustically joined with an atomic diffusion bond to facilitate coupling ultrasonic waves from the piezoelectric element into the delay line or from the delay line into the piezoelectric element.

An ultrasound probe includes: vibrators arranged in a left-right direction; a support portion that supports a second surface opposite to a first surface located on a side on which the vibrator transmits and receives an ultrasound wave; an acoustic lens disposed on a side opposite to a support portion side with respect to the vibrator; an acoustic matching portion disposed between the vibrator and the acoustic lens; and a connection portion that connects the support portion and at least a partial region of one or both of a first end surface and a second end surface to each other, the first end surface and the second end surface being defined by both end surfaces of the acoustic matching portion in a front-rear direction intersecting the left-right direction and an up-down direction. The support portion and the connection portion each have a thermal conductivity higher than that of the acoustic lens.

An ultrasonic transducer, including a piezoelectric element with an upper surface and a lower surface opposite to each other through the piezoelectric element and a lateral surface connecting the upper surface and the lower surface, a first acoustic matching layer with a first surface and a second surface opposite to each other through the first acoustic matching layer, and the first surface of the first acoustic matching layer is connected with the upper surface of the piezoelectric element, and a second acoustic matching layer with a third surface and a fourth surface opposite to each other through the second acoustic matching layer, and the third surface of the second acoustic matching layer is connected with the second surface of the first acoustic matching layer, and the glass transition temperature of the second acoustic matching layer is smaller than the glass transition temperature of the first acoustic matching layer.

An ultrasonic element includes a substrate in which an opening is formed, a vibrating plate provided at the substrate, the vibrating plate including a first surface in contact with the substrate, the vibrating plate blocking the opening, a piezoelectric element provided at a second surface on an opposite side from the first surface of the vibrating plate, a protective substrate facing the second surface and protecting the piezoelectric element, and a suppressing unit provided between the protective substrate and the vibrating plate, the suppressing unit being configured to suppress a vibration of the vibrating plate, in which in the piezoelectric element, a first electrode, a piezoelectric layer, and a second electrode are stacked in this order from the second surface, and an active part is a part of the vibrating plate where the first electrode, the piezoelectric layer, and the second electrode overlap, the suppressing unit is provided around the active part, and a slit is formed in the suppressing unit, in plan view from a stacking direction.

A method for monitoring a patient using an ultrasonic probe includes attaching a conformable two-dimensional piezoelectric transducer array having a plurality of phased array piezoelectric transducer elements on an epidermal surface of a patient so that the conformable two-dimensional piezoelectric transducer array conforms to a shape of the epidermal surface. The conformable two-dimensional piezoelectric transducer array is attachable to the epidermal surface by van der Waals forces alone. The plurality of phased array piezoelectric transducer elements is operated as a phased array to transmit a focused ultrasonic beam to a specified location in the patient to be monitored. Ultrasound waves are received from the patient using the array. An indication of the received ultrasound waves is displayed.