A process for depositing a metal-niobium oxide film on a substrate using a deposition method may include a plurality of complete deposition cycles. Each complete deposition cycle may comprise performing a metal-oxidizer sub-cycle followed by a niobium sub-cycle. The metal-oxidizer sub-cycle may comprise contacting the substrate with a metal precursor and a first oxygen precursor. The niobium sub-cycle may comprise contacting the substrate with at least a niobium precursor.