A non-contact processing device and a non-contact processing method are used to perform a processing procedure on a solid structure. The non-contact processing device of the invention uses an electromagnetic radiation source to provide energy to the solid structure to cause qualitative changes or defects in the solid structure, that is, to form a modified layer. A separation energy source is used to apply a separation energy on the solid structure with the modified layer in a non-contact manner. With stress, structural strength, lattice pattern or hardness of the modified layer being different from that of other non-processing areas, the solid structure can be rapidly separated or thinned at the modified layer.

In one embodiment, a film forming apparatus includes a chamber configured to load a substrate, a stage configured to support the substrate, and a gas supplier configured to supply a gas into the chamber to form a film on the substrate. The device further includes a first detector configured to detect a first value that varies depending on at least pressure of a first portion above the stage in the chamber, and a controller configured to control a process of forming the film on the substrate based on the first value.

The present application discloses an etching system. The etching system includes a process chamber, an image and temperature control device, and an artificial intelligence control module. The process chamber is configured to execute an etching process based on a first etching recipe on a first wafer. The image and temperature control device is configured to generate a thermal image of the first wafer during the etching process. The artificial intelligence control module is configured to determine whether the thermal image is compliant with a predetermined requirement. When the thermal image is not compliant with the predetermine requirement, the artificial intelligence control module is configured to update the first etching recipe according to the plurality of parameters so as to generate a second etching recipe.

The present application discloses an etching system. The etching system includes a process chamber, an image and temperature control device, and an artificial intelligence control module. The process chamber is configured to execute an etching process based on a first etching recipe on a first wafer. The image and temperature control device is configured to generate a thermal image of the first wafer during the etching process. The artificial intelligence control module is configured to determine whether the thermal image is compliant with a predetermined requirement. When the thermal image is not compliant with the predetermine requirement, the artificial intelligence control module is configured to update the first etching recipe according to the plurality of parameters so as to generate a second etching recipe.

Disclosed are a method and apparatus for setting a semiconductor parameter. The method for setting a semiconductor parameter according to an embodiment of the present disclosure is a method performed on a computing apparatus including one or more processors and a memory storing one or more programs executed by the one or more processors, the method including acquiring electrical measurement parameters corresponding to preset semiconductor manufacturing parameters, classifying the electrical measurement parameters into a plurality of groups according to a degree of correlation, extracting a correlation axis reflecting a correlation between electrical measurement parameters belonging to a corresponding group for each classified group, and predicting a figure of merit of a semiconductor device by using data values of electrical measurement parameters belonging to the corresponding group as input based on the correlation axis of each group.

A display device can include a substrate including a plurality of pixels, a plurality of light emitting diodes disposed in each of the plurality of pixels, a color conversion member disposed over at least two light emitting diodes among the plurality of light emitting diodes in one pixel, and a light shielding pattern disposed over at least one light emitting diode among the plurality of light emitting diodes in the one pixel for forming a black sub pixel that does not emit light outside of the display device. Also, the color conversion member includes a color conversion layer and a color filter disposed on the color conversion layer.