A semiconductor device has a first RDL substrate with first conductive pillars formed over a first surface of the first RDL substrate. A first electrical component is disposed over the first surface of the first RDL substrate. A hybrid substrate is bonded to the first RDL substrate. An encapsulant is deposited around the hybrid substrate and first RDL substrate with the first conductive pillars and first electrical component embedded within the encapsulant. A second RDL substrate with second conductive pillars formed over the second RDL substrate and second electrical component disposed over the second RDL substrate can be bonded to the hybrid substrate. A second RDL can be formed over a second surface of the first RDL substrate. A third electrical component is disposed over a second surface of the first RDL substrate. A shielding frame is disposed over the third electrical component.

Embodiments are generally directed to package stacking using chip to wafer bonding. An embodiment of a device includes a first stacked layer including one or more semiconductor dies, components or both, the first stacked layer further including a first dielectric layer, the first stacked layer being thinned to a first thickness; and a second stacked layer of one or more semiconductor dies, components, or both, the second stacked layer further including a second dielectric layer, the second stacked layer being fabricated on the first stacked layer.

Provided is a semiconductor package including a substrate, a first chip on the substrate and including a photonic integrated circuit (PIC), a second chip on the first chip and including an electronic integrated circuit (EIC), a support block spaced apart from the second chip and bonded to an upper surface of the first chip, a molding layer on the first chip and at least partially surrounding the second chip and the support block, with an upper surface of the support block free of the molding layer, a micro-lens layer on the molding layer, the first chip, and the support block, and a first transparent adhesive layer between a lower surface of the micro-lens layer and an upper surface of the molding layer, and between the lower surface of the micro-lens layer and the upper surface of the support block.

A semiconductor device package comprises a semiconductor device, a first encapsulant surrounding the semiconductor device, a second encapsulant covering the semiconductor device and the first encapsulant, and a redistribution layer extending through the second encapsulant and electrically connected to the semiconductor device.

An object is to provide a technique capable of reducing stress in the entire semiconductor device. The semiconductor device includes a plurality of sub-modules including a first sealing member, an insulating substrate provided with a first circuit pattern electrically connected to at least one of the conductive plates of the plurality of sub-modules, connection members electrically connected to at least one of the conductive pieces of the plurality of sub-modules, and a second sealing member having lower hardness than the first sealing member, which seals the plurality of sub-modules, the insulating substrate, and the connection members.

A semiconductor package may include a first redistribution structure, a sub-semiconductor package on the first redistribution structure, where the sub-semiconductor package may include a second redistribution structure, a bridge die on the second redistribution structure, a first molding material configured to cover the bridge die on the second redistribution structure, a third redistribution structure on the first molding material and on the bridge die, a first semiconductor die on the third redistribution structure, a second semiconductor die on the third redistribution structure, and beside the first semiconductor die, where the second semiconductor die is electrically connected to the first semiconductor die through the bridge die, and a second molding material configured to cover the first semiconductor die and the second semiconductor die, on the third redistribution structure, and a third molding material configured to cover the sub-semiconductor package, on the first redistribution structure.

Provided is a semiconductor package including a plurality of first semiconductor chips respectively including a first semiconductor substrate and a plurality of first through electrodes penetrating the first semiconductor substrate, a second semiconductor chip on the plurality of first semiconductor chips, the second semiconductor chip including a second semiconductor substrate and a plurality of second through electrodes penetrating the second semiconductor substrate, a third semiconductor chip on the second semiconductor chip, the third semiconductor chip including a third semiconductor substrate and a plurality of third through electrodes penetrating the third semiconductor substrate, and a first encapsulation material on the plurality of first semiconductor chips, a planar shape of the second semiconductor chip is greater than a planar shape of each first semiconductor chip of the plurality of first semiconductor chips, and a planar shape of the third semiconductor chip is greater than the planar shape of the second semiconductor chip.

In an embodiment, a device includes: a first integrated circuit die comprising a semiconductor substrate and a first through-substrate via; a gap-fill dielectric around the first integrated circuit die, a surface of the gap-fill dielectric being substantially coplanar with an inactive surface of the semiconductor substrate and with a surface of the first through-substrate via; a dielectric layer on the surface of the gap-fill dielectric and the inactive surface of the semiconductor substrate; a first bond pad extending through the dielectric layer to contact the surface of the first through-substrate via, a width of the first bond pad being less than a width of the first through-substrate via; and a second integrated circuit die comprising a die connector bonded to the first bond pad.

In an embodiment, a package including: a redistribution structure including a first dielectric layer and a first conductive element disposed in the first dielectric layer; a first semiconductor device bonded to the redistribution structure, wherein the first semiconductor device includes a first corner; and an underfill disposed over the redistribution structure and including a first protrusion extending into the first dielectric layer of the redistribution structure, wherein the first protrusion of the underfill overlaps the first corner of the first semiconductor device in a plan view.

Methods, systems, and devices for a stacked semiconductor system are described. The stacked semiconductor system may include a semiconductor die on a redistribution layer (RDL) and a polymer material at least partially surrounding the semiconductor die. A silicon nitride material may be above the semiconductor die and on the polymer material. A logic die may be hybrid bonded with a bonding material on the silicon nitride material. And a conductive post may extend at least partially through the silicon nitride material and the polymer material and may couple the logic die with the RDL.