A package substrate and a semiconductor package including the same are provided. The semiconductor package includes a package substrate including a base having a front side and a back side, rear pads below the back side of the base, lower connection patterns below the rear pads and in contact with the rear pads, first and second front pads on the front side of the base, a first support pattern on the front side of the base having a thickness greater than a thickness of each of the first and second front pads, and a protective insulating layer on the front side of the base and having openings exposing the first and second front pads respectively, and on an upper surface and a side surface of the first support pattern; a lower semiconductor chip on the protective insulating layer of the package substrate, spaced apart from the first support pattern in a horizontal direction; and a first upper semiconductor chip on the package substrate vertically overlapping the lower semiconductor chip and the first support pattern.

A package structure and a formation method are provided. The method includes forming multiple patterned material elements over a carrier substrate, and the patterned material elements are more thermal conductive than copper. The method also includes forming a protective layer laterally surrounding each of the patterned material elements. The method further includes bonding a chip-containing structure to a first patterned material element of the patterned material elements through dielectric-to-dielectric bonding and metal-to-metal bonding.

A semiconductor package includes a redistribution structure including a wiring structure and an insulating structure covering the wiring structure, the redistribution structure having a first surface and a second surface, which are opposite to each other, the insulating structure including a polymer, a semiconductor chip on the first surface, the semiconductor chip being connected to at least one first wiring pattern in the wiring structure, a passivation insulating film covering the second surface, the passivation insulating film including an inner surface contacting the insulating structure and a hole sidewall defining a hole, the passivation insulating film including an inorganic insulating material, a conductive pad passing through the passivation insulating film via the hole and contacting the second wiring pattern, the conductive pad having a pad sidewall contacting the hole sidewall, and an external connection terminal on the conductive pad.

Microelectronic assemblies, related devices and methods, are disclosed herein. In some embodiments, a microelectronic assembly may include a first die, having a first surface and an opposing second surface with conductive contacts, in a first layer; a first material surrounding the first die and extending along a thickness of the first die from the second surface, and wherein the first material includes first particles having an average diameter between 200 and 500 nanometers; a second material surrounding the first die and extending along the thickness of the first die from the first surface, and wherein the second material includes second particles having an average diameter between 0.5 and 12 microns; an interface portion, between the first and second materials, including the first and second particles; and a second die, in a second layer on the first layer, electrically coupled to the conductive contacts on the first die.

A semiconductor package includes a lower redistribution wiring layer; and a first semiconductor device on the lower redistribution wiring layer, the first semiconductor device being connected to the lower redistribution wiring layer via conductive bumps, wherein the lower redistribution wiring layer includes: a first redistribution wire in a first lower insulating layer; an insulating structure layer having an opening that exposes a portion of the first redistribution wire, the insulating structure layer including a first photosensitive insulating layer, a light blocking layer on the first photosensitive insulating layer, and a second photosensitive insulating layer on the light blocking layer; a second redistribution wire in the opening of the insulating structure layer, the second redistribution wire including a redistribution via contacting the first redistribution wire, and a redistribution line stacked on the redistribution via; and bonding pads bonded to the conductive bumps and electrically connected to the second redistribution wire.

A semiconductor package includes: a semiconductor chip; a package substrate below the semiconductor chip in a vertical direction; and a plurality of connection pads on a lower surface of the package substrate, wherein the plurality of connection pads include: a first group of connection pads having a first width, and a second group of connection pads having a second width smaller than the first width, and wherein the first group of connection pads are provided closer to an edge boundary of a contact surface between the semiconductor chip and the package substrate than the second group of connection pads.

Implementations described herein relate to various semiconductor device assemblies. In some implementations, an apparatus includes a dielectric layer having a first material that is an insulative material, a conductive layer having a second material that is a conductive material, and a stimulus-responsive strain layer having a third material that deforms in response to an applied stimulus.

Provided is a redistribution structure having reduced parasitic capacitance. The redistribution structure may include a via layer and a wiring layer disposed on the via layer in a first direction perpendicular to the via layer, the wiring layer including a metal plate and a first insulation pattern configured to penetrate the metal plate in the first direction. An outer side surface of the first insulation pattern may be exposed from a side surface of the metal plate.

The present disclosure relates to the field of semiconductor packaging technologies, and in particular, to a panel-level chip packaging structure and method based on a steel plate platform. The packaging structure includes: a steel plate; a gold-nickel layer plated on the steel plate, where the gold-nickel layer is provided with upwardly protruding pins corresponding to a chip; the chip flipped to the corresponding pins; and a molded body coating the corresponding chip and the gold-nickel layer. According to the packaging structure and method of the present disclosure, an overall thickness of a chip-packaged product can be reduced. A wire bonding process and an electroplating process are further omitted, so that the overall thickness of chip packaging can be further reduced. An ultra-thin packaging structure can be implemented, the chip packaging efficiency can further be improved, and a complete-process chip packaging cycle can be shortened.

Provided is a semiconductor device comprising a semiconductor substrate containing oxygen. An oxygen concentration distribution in a depth direction of the semiconductor substrate has a high oxygen concentration part where an oxygen concentration is higher on a further upper surface-side than a center in the depth direction of the semiconductor substrate than in a lower surface of the semiconductor substrate. The high oxygen concentration part may have a concentration peak in the oxygen concentration distribution. A crystal defect density distribution in the depth direction of the semiconductor substrate has an upper surface-side density peak on the upper surface-side of the semiconductor substrate, and the upper surface-side density peak may be arranged within a depth range in which the oxygen concentration is equal to or greater than 50% of a peak value of the concentration peak.