A method for depositing an oxide film on a substrate by a cyclical deposition is disclosed. The method may include: depositing a metal oxide film over the substrate utilizing at least one deposition cycle of a first sub-cycle of the cyclical deposition process; and depositing a silicon oxide film directly on the metal oxide film utilizing at least one deposition cycle of a second sub-cycle of the cyclical deposition process. Semiconductor device structures including an oxide film deposited by the methods of the disclosure are also disclosed.

The present technology relates to an imaging element and a semiconductor chip that enable the imaging element to be shorter. A first chip including a photodiode, and a second chip including a circuit configured to process a signal from the photodiode are laminated, and an impurity layer is provided on a second surface opposite to a first surface of the second chip on which the first chip is laminated. The impurity layer is formed to have an impurity concentration higher than an impurity concentration of a semiconductor substrate constituting the second chip. In the present technology, for example, an imaging element that is configured by laminating a plurality of chips and is shorter and smaller can be applied.