In the overhead vehicle system, the first rail and the second rail are disposed in a grid. The first rail (or second rail) is disposed such that a gap through which the connecting part below the traveling wheel is able to pass is formed between the rail and an intersection rail disposed at an intersection in the grid. The first rail (or the second rail) includes an auxiliary member configured to be removably attached to the attachment portion provided at the end in the longitudinal direction, the auxiliary member protruding from the rail upper surface of the rail and coming into contact with the auxiliary wheel.

A wafer transfer carrier includes a container and a lid portion. The container accommodates a wafer and a liquid, and is movable in a state where the wafer is in contact with the liquid. The lid portion is capable of sealing an inside of the container.

A wafer transfer carrier includes a container and a lid portion. The container accommodates a wafer and a liquid, and is movable in a state where the wafer is in contact with the liquid. The lid portion is capable of sealing an inside of the container.

An overhead transport vehicle includes a lifter to be raised and lowered by a plurality of suspensions on left and right sides. The lifter includes a base portion, a left support and a right support attached to lower ends of the suspensions and each supporting the base portion via an elastic body, and a left arm and a right that are respectively bridged between the left support and the base portion and between the right support and the base portion, and each including a first end attached to each of the left support and the right support via a first rotation shaft and a second end attached to the base portion via a second rotation shaft.

A working system for a semiconductor packaging process includes a machine equipment, a supply unit and a return device. The supply unit is correspondingly connected to the machine equipment and includes an input device and an output device. The return device is connected to the input device and the output device. As such, a magazine is transferred from the input device to the output device via the return device, thereby accelerating the operation speed of a production line.

A wafer manufacturing apparatus includes an ingot grinding unit for grinding an upper surface of an ingot to planarize the upper surface of the ingot, a laser applying unit for forming peel-off layers in the ingot at a depth therein, which corresponds to the thickness of a wafer to be produced from the ingot, from the upper surface of the ingot, a wafer peeling unit for holding the upper surface of the ingot and peeling off a wafer from the ingot at the peel-off layers, a tray having an ingot support portion and a wafer support portion, and a belt conveyor unit for delivering the ingot supported on the tray between the ingot grinding unit, the laser applying unit, and the wafer peeling unit.

A stocker system having an active shelf module capable of accommodating a plurality of carriers and a control method thereof are provided. The stocker system may include a stocker body having at least one accommodation space therein; an active shelf module installed on the stocker body and having at least a portion extended or retracted in a forward and reverse direction; and a controller configured to extend the active shelf module to receive a carrier from the outside of the stocker body and control the active shelf module to accommodate the carrier in the accommodation space inside the stocker body.

A stocker system having an active shelf module capable of accommodating a plurality of carriers and a control method thereof are provided. The stocker system may include a stocker body having at least one accommodation space therein; an active shelf module installed on the stocker body and having at least a portion extended or retracted in a forward and reverse direction; and a controller configured to extend the active shelf module to receive a carrier from the outside of the stocker body and control the active shelf module to accommodate the carrier in the accommodation space inside the stocker body.

A closed gas circulation system may include a sealed plenum, circulation fans, and a fan filter unit (FFU) inlet to contain, filter, condition, and re-circulate a gas through a chamber of an interface tool. The gas provided to the chamber is maintained in a conditioned environment in the closed gas circulation system as opposed to introducing external air into the chamber through the FFU inlet. This enables precise control over the relative humidity and oxygen concentration of the gas used in the chamber, which reduces the oxidation of semiconductor wafers that are transferred through the chamber. The closed gas circulation system may also include an air-flow rectifier, a return vent, and one or more vacuum pumps to form a downflow of collimated gas in the chamber and to automatically control the feed-forward pressure and flow of gas through the chamber and the sealed plenum.

A wet-processing dark laboratory for scientific research includes a laboratory body, a wet-processing equipment, a transfer robot, a sample supplying and storing apparatus, a chemical supplying and storing apparatus, and a control apparatus. The laboratory body is configured to provide a clean space. The transfer robot includes a moving device, a mechanical arm device, at least one end effector, and an accompanying device. The accompanying device can move with the moving device and provide a temporary storage space. The mechanical arm device is mounted on the moving device. The at least one end effector is mounted on the mechanical arm device for grasping a semiconductor sample and/or a chemical tank. The above design enables 24/7 experiments conduction without the need for human presence, which forms a dark laboratory.