A trench isolation structure and method of making the same is provided. The trench isolation structure comprises a trench in a substrate, the trench having a bottom surface and sidewalls. A polycrystalline material is at least partially in the trench and an amorphous layer is over the polycrystalline material.

Embodiments of the disclosure provide a method, including forming a shallow trench isolation (STI) in a substrate. The method further includes doping the substrate with a noble dopant, thereby forming a disordered crystallographic layer under the STI. The method also includes converting the disordered crystallographic layer to a doped buried polysilicon layer under the STI and a high resistivity (HR) polysilicon layer under the doped buried polysilicon layer. The method includes forming a pair of contacts operatively coupled in a spaced manner to the doped buried polysilicon layer.

Deep trench isolation structures for high voltage semiconductor-on-insulator devices are disclosed herein. An exemplary deep trench isolation structure surrounds an active region of a semiconductor-on-insulator substrate. The deep trench isolation structure includes a first insulator sidewall spacer, a second insulator sidewall spacer, and a multilayer silicon-comprising isolation structure disposed between the first insulator sidewall spacer and the second insulator sidewall spacer. The multilayer silicon-comprising isolation structure includes a top polysilicon portion disposed over a bottom silicon portion. The bottom polysilicon portion is formed by a selective deposition process, while the top polysilicon portion is formed by a non-selective deposition process. In some embodiments, the bottom silicon portion is doped with boron.

Embodiments of the disclosure provide a semiconductor controlled rectifier (SCR) structure and methods to form the same. The SCR structure may include a first polycrystalline semiconductor material on a first insulator and includes a first well therein. A monocrystalline semiconductor material is adjacent the first polycrystalline semiconductor material and includes an anode region and a cathode region therein. A second polycrystalline semiconductor material is on a second insulator and includes a second well therein.

A semiconductor structure is disclosed. The semiconductor structure includes: a semiconductor substrate having a front surface and a back surface facing opposite to the front surface; a filling material extending from the front surface into the semiconductor substrate without penetrating through the semiconductor substrate, the filling material including an upper portion and a lower portion, the upper portion being in contact with the semiconductor substrate; and an epitaxial layer lined between the lower portion of the filling material and the semiconductor substrate. An associated manufacturing method is also disclosed.

A method for hydrophilic direct bonding of a first substrate onto a second substrate is provided, including: providing the first substrate having a first main surface and the second substrate having a second main surface; bringing the first and the second substrates into contact with one another, respectively, via the first and the second main surfaces, to form a bonding interface between two bonding surfaces; applying a heat treatment to close the bonding interface; and prior to the step of bringing the first and the second substrates into contact, forming, on the first main surface and/or on the second main surface, a bonding layer made of an amorphous semiconductor material having doping elements and a thickness of less than or equal to 50 nm, a face of the bonding layer constituting one of the two bonding surfaces, an oxide layer being less than 20 nm from the bonding interface.

The present disclosure relates to methods, devices, and systems for managing isolating structures in semiconductor devices. An example semiconductor device includes a first stack of conductive layers and isolating layers extending along a first direction and alternating with each other along a second direction perpendicular to the first direction. The semiconductor device further includes a gate line slit structure extending through the first stack along the second direction, and a first isolating structure extending along the first direction. The first isolating structure includes a first portion in the first stack and a second portion in the gate line slit structure. A size of the first portion is greater than a size of the second portion along the second direction.

The present disclosure relates to methods, devices, systems, and techniques for managing isolating structures in semiconductor devices. An example semiconductor device includes a first stack of conductive layers and isolating layers alternating with each other along a first direction. An isolating structure that extends through the stack along the first direction. The isolating structure includes an inner body, filled with at least one semiconductor material extending continuously along the first direction, and an outer layer, filled with an isolating material, that is at least partially between the inner body and the stack along a second direction.

A method for manufacturing a semiconductor structure includes: forming a trench in a semiconductor substrate; forming an isolating material layer on the semiconductor substrate and in the trench; forming a protective material layer on the isolating material layer and in the trench; removing horizontal portions of the protective material layer to form a protective layer laterally covering the isolating material layer and to expose horizontal portions of the isolating material layer from the protective layer; removing the horizontal portions of the isolating material layer to form an isolation layer that laterally covers the semiconductor substrate and that is disposed between the protective layer and the semiconductor substrate; and forming a conductive material layer to fill the trench.