A method for forming a semiconductor structure for wafer level bonding includes the steps of forming a bonding dielectric layer on a substrate, forming an opening in the bonding dielectric layer, wherein an bottom angle between a sidewall and a bottom surface of the opening is smaller than 90 degrees, forming a conductive material layer on the bonding dielectric layer and filling the opening, and performing a chemical mechanical polishing process to remove the conductive material layer outside the opening, thereby forming a bonding pad in the opening.

A semiconductor package includes a first semiconductor chip including a first semiconductor layer, a first through-electrode that penetrates through the first semiconductor layer, a first bonding pad connected to the first through-electrode, and a first insulating bonding layer, and a second semiconductor chip on the first semiconductor chip and including a second semiconductor layer, a second bonding pad bonded to the first bonding pad, and a second insulating bonding layer bonded to the first insulating bonding layer, wherein the first insulating bonding layer includes a first insulating material, the second insulating bonding layer includes a first insulating layer that forms a bonding interface with the first insulating bonding layer and a second insulating layer on the first insulating layer, the first insulating layer includes a second insulating material, different from the first insulating material, and the second insulating layer includes a third insulating material, different from the second insulating material.

A method of manufacturing a semiconductor package may include: preparing a semiconductor wafer including rear pads and a rear insulating layer surrounding the rear pads, the rear insulating layer including first recesses spaced apart from the rear pads in a first lateral direction; preparing second semiconductor chips including front pads and a front insulating layer surrounding the front pads, the front insulating layer including second recesses spaced apart from the front pads in the first lateral direction; forming an air gap between the first recesses and the second recesses in a vertical direction by disposing the second semiconductor chips on the semiconductor wafer, the rear pads contacting the front pads; and bonding the rear insulating layer and the front insulating layer to each other and bonding the rear pads and the front pads to each other by performing a thermal compression process.

Semiconductor devices and methods of manufacturing are provided, wherein a first passivation layer is deposited over a top redistribution structure; a second passivation layer is deposited over the first passivation layer; and a first opening is formed through the second passivation layer. After the forming the first opening, the first opening is reshaped into a second opening; a third opening is formed through the first passivation layer; and filling the second opening and the third opening with a conductive material.

A method of manufacturing a display device includes forming a thin film transistor layer in an active area of a substrate, forming a metal layer on an edge area of the substrate, transferring first coating patterns to the edge area, the first coating patterns covering a portion of the metal layer corresponding to shapes of side surface lines, etching the metal layer to form the side surface lines, an upper surface of each of the side surface lines being covered by the first coating patterns, transferring a second coating pattern to the edge area, the second coating pattern covering a side surface of each of the side surface lines and the first coating patterns, and transferring light emitting elements to the thin film transistor layer. The second coating pattern includes openings corresponding to the first coating patterns in a plan view.

A display panel comprising a display substrate having a display area and a pad area disposed around the display area. A connection wire is disposed on the pad area of the display substrate. A signal wire is disposed on the connection wire. A supporter is disposed between the display substrate and the connection wire. The connection wire directly contacts the supporter.

A semiconductor package may include a first semiconductor chip and a second semiconductor chip on a top surface thereof. The first semiconductor chip may include a first bonding pad on a top surface of a first semiconductor substrate and a first penetration via on a bottom surface of the first bonding pad and penetrating the first semiconductor substrate. The second semiconductor chip may include a second interconnection pattern on a bottom surface of a second semiconductor substrate and a second bonding pad on a bottom surface of the second interconnection pattern and coupled to the second interconnection pattern. The second bonding pad may be directly bonded to the first bonding pad. A width of the first penetration via may be smaller than that of the first bonding pad, and a width of the second interconnection pattern may be larger than that of the second bonding pad.

Disclosed embodiments provide light-emitting diodes (LEDs) and interconnect structures that employ particularly shaped electrodes and a conductive metal-based adhesive that are selected to provide a flexible, robust interconnect that is capable of resisting lateral shear forces, while maintaining a low bond process temperature that is process compatible with other LED component materials. In a non-limiting aspect, disclosed embodiments employ a barrier coating on the interconnect or bonding materials comprising a conductive metal-based adhesive to inhibit moisture and air contact with the conductive metal-based adhesive, thereby preventing or mitigating migration of metal ions in the conductive metal-based adhesive in operation.

A semiconductor device assembly including a first semiconductor die having a first dielectric region and a first bond pad that are disposed on a first side of the first semiconductor die; a second semiconductor die having a second dielectric region and a second bond pad that are disposed on a second side of the second semiconductor die; and a hybrid bonding interface between the first side of the first semiconductor die and the second side of the second semiconductor die, the hybrid bonding interface including a gap free metal-metal bonding region between the first and the second bond pads and a gap free dielectric-dielectric bonding region between the first and the second dielectric regions, wherein the dielectric-dielectric bonding region includes a nitrogen gradient with a concentration that increases with proximity to the metal-metal bonding region.

According to one aspect of the present disclosure, a semiconductor structure is provided. The semiconductor structure may include a first semiconductor chip and a second semiconductor chip that are bonded along a first direction. The first semiconductor chip may include a first semiconductor layer. The first semiconductor chip may include a plurality of first connection structures extending through the first semiconductor layer along the first direction. A dielectric material may be between and in contact with any two of the first connection structures. The first semiconductor chip and the second semiconductor chip may be coupled by a plurality of first bonding contacts and the plurality of first connection structures. The plurality of first bonding contacts may extend through a first dielectric layer. The first connection structure may be coupled with the first bonding contact.