A method of manufacturing a semiconductor package may include: preparing a semiconductor wafer including rear pads and a rear insulating layer surrounding the rear pads, the rear insulating layer including first recesses spaced apart from the rear pads in a first lateral direction; preparing second semiconductor chips including front pads and a front insulating layer surrounding the front pads, the front insulating layer including second recesses spaced apart from the front pads in the first lateral direction; forming an air gap between the first recesses and the second recesses in a vertical direction by disposing the second semiconductor chips on the semiconductor wafer, the rear pads contacting the front pads; and bonding the rear insulating layer and the front insulating layer to each other and bonding the rear pads and the front pads to each other by performing a thermal compression process.

A chip includes a die; and a first dielectric layer disposed on a side of the die, and a plurality of bonding devices that penetrate the first dielectric layer. The plurality of bonding devices include a first bonding device and a second bonding device that are adjacent to each other, a channel between the first bonding device and the second bonding device is formed at the first dielectric layer, and a dielectric constant of the channel is less than a dielectric constant of a material of the first dielectric layer.

A semiconductor device, including: a semiconductor chip having an element forming surface; an insulating layer formed on the element forming surface of the semiconductor chip; a barrier conductive layer formed on the insulating layer; a pad wiring layer including a plurality of conductive layers, one of the plurality of conductive layers including an eaves portion protruding to an outward direction; a bonding member that is bonded to the pad wiring layer and supplies electric power to an element of the element forming surface; and a coating insulating film that is selectively formed on the insulating layer below the eaves portion, exposes an upper surface of the insulating layer to a peripheral region of the pad wiring layer, and coats both an upper surface and a side surface of an end portion of the barrier conductive layer.

The present disclosure provides a semiconductor structure and a manufacturing method thereof. A semiconductor structure includes a first chip. The first chip includes a first interconnect layer, a first conductive layer disposed on the first interconnect layer, a first dielectric layer covering the first conductive layer, and a first bonding pad embedded in the first dielectric layer and extending into the first conductive layer. The method of manufacturing the semiconductor structure includes the following operations. A first conductive layer is formed on a first interconnect layer. A first dielectric layer is formed on the first conductive layer and the first interconnect layer. The first dielectric layer is etched to form a first trench on the first conductive layer. A portion of the first conductive layer is etched to form a second trench. A first bonding pad is formed in the second trench.

Representative techniques and devices including process steps may be employed to mitigate the potential for delamination of bonded microelectronic substrates due to metal expansion at a bonding interface. For example, a metal pad having a larger diameter or surface area (e.g., oversized for the application) may be used when a contact pad is positioned over a TSV in one or both substrates.

Methods for forming semiconductor structures are provided. The method for forming a semiconductor structure includes forming a metal pad over a first substrate and forming a polymer layer over the metal pad. The method for forming a semiconductor structure further includes forming a seed layer over the metal pad and extending over the polymer layer and forming a conductive pillar over the seed layer. The method for forming a semiconductor structure further includes wet etching the seed layer using an etchant comprising H2O2. In addition, the step of wet etching the seed layer is configured to form an extending portion having a slope sidewall.

A semiconductor structure may be provided by forming a first molding compound around a first semiconductor die such that a top surface of the first molding compound is coplanar with a top dielectric surface of the first semiconductor die; forming a combination of at least one bonding-level dielectric layer, first bonding pads, and dummy pads over the first semiconductor die and the first molding compound, wherein each of the bonding pads is formed directly on a respective conductive structure within the first semiconductor die; and attaching a second semiconductor die including second bonding pads therein to the first semiconductor die by performing a bonding process that bonds the second bonding pads to the first bonding pads by metal-to-metal bonding such that a first subset of the dummy pads has an areal overlap in a plan view with the second semiconductor die.

A microelectronic interconnect structure having a pre-formed hybrid bonding layer is disclosed. The hybrid bonding layer is formed over a temporary carrier comprising a substantially flat upper surface. A routing structure comprising a device or metallization layers is then provided over the hybrid bonding layer. After the hybrid bonding layer coupled with the routing structure is properly reinforced, the temporary carrier is removed to reveal a bonding surface of the hybrid bonding layer. The interconnect structure can comprise an organic dielectric material interspersing the hybrid bonding layer and forming part of the routing structure, and as such exhibit bending flexibility.

A method of forming an integrated circuit (IC) is provided. The method includes forming a seed layer of a first metal material over a circuit on a device side of a semiconductor die. The method also includes forming a multi-layer conductive contact on the seed layer. The multi-layer conductive contact has a width in a first dimension and includes a plurality of layers of different metal materials and a portion of the seed layer extends outwardly from a periphery of the multi-layer conductive contact. The method further includes forming a sacrificial layer of the first metal material over the multi-layer conductive contact. The method yet further includes etching to remove the seed layer and the sacrificial layer.

A three-dimensional integrated circuit includes a first microelectronic device structure including first conductive pads, a first dielectric material, and first multi-material conductive pads. The first multi-material conductive pads include a first conductive material and a second conductive material. The three-dimensional integrated circuit further includes a second microelectronic device structure including second conductive pads and a second dielectric material. The first conductive pads and the first multi-material conductive pads of the first microelectronic device structure are bonded to the second conductive pads of the second microelectronic device structure, and the first dielectric material of the first microelectronic device structure is bonded to the second dielectric material of the second microelectronic device structure. Related electronic system and methods of fabricating a three-dimensional integrated circuit are also disclosed.