A semiconductor device includes: a first semiconductor structure including a stacked structure of a first dielectric layer and a first bonding dielectric layer; a second semiconductor structure including a stacked structure of a second dielectric layer and a second bonding dielectric layer; and a bonding pad penetrating the stacked structure of the first dielectric layer and the first bonding dielectric layer, and the stacked structure of the second dielectric layer and the second bonding dielectric layer, wherein the first bonding dielectric layer and the second bonding dielectric layer contact each other, and a first width of a first portion of the bonding pad penetrating the first dielectric layer is greater than each of a second width of a second portion of the bonding pad penetrating the first bonding dielectric layer, and a third width of a third portion of the bonding pad penetrating the second bonding dielectric layer.

Barrier or cladding structures that prevent top vias from chemically reacting to tape residue or other impurities address reliability issues in local silicon interposer interconnection in semiconductor packaging by mitigating metal atom migration and wire growth, thereby enhancing long-term reliability. The via cladding structure incorporates a multi-layered barrier comprising, alone or in any combination, SiOCH, SiO.sub.x, SiON, SiN.sub.x, CuO.sub.x, Ta, Ti, TaN, TiN, Mo, MoN, TaC, TiC, TaCN, or TiCN, enhancing electrical performance and long-term reliability. The method of forming the cladding or barrier structure involves a combination of cladding layer deposition, patterning, wet etch, isotropic dry etch or anisotropic dry etch process, flowable dielectric deposition or spin-coat dielectric, and chemical mechanical planarization (CMP) to ensure robust and reliable connections. The integration of these layers mitigates issues related to metal atom migration and wire growth, providing a solution for the growing demand for high-density, high-performance semiconductor packages.

A semiconductor device includes an insulating layer on a substrate; a via extending from within the substrate and extending through one face of the substrate and a bottom face of a trench defined in the insulating layer such that a portion of a sidewall and a top face of the via are exposed through the substrate; and a pad contacting the exposed portion of the sidewall and the top face of the via. The pad fills the trench. The insulating layer includes a passivation layer on the substrate, and a protective layer is on the passivation layer. An etch stop layer is absent between the passivation layer and the protective layer. A vertical level of a bottom face of the trench is higher than a vertical level of one face of the substrate and is lower than a vertical level of a top face of the passivation layer.

A method includes depositing a first dielectric layer on a first substrate of a first device die, etching the first dielectric layer to form a trench, depositing a metallic material in the trench and on a top surface of the first dielectric layer, and performing a chemical mechanical polish (CMP) process to remove a portion of the metallic material from the top surface of the first dielectric layer to form a first metal pad. After the performing of the CMP process, the method selectively etches the first metal pad to form recesses at an edge portion of the first metal pad, deposits a second dielectric layer on a second substrate of a second device die, forms a second metal pad in the second dielectric layer, and bonds the second device die to the first device die.

An element includes a substrate and a surface layer on the substrate. The surface layer includes at least one first region comprising an optically transparent and electrically insulative first material and at least one second region at least partially embedded in the at least one first region. The at least one second region comprises an optically transparent and electrically conductive second material.

A method for manufacturing a semiconductor stack structure with ultra thin dies includes manufacturing a plurality of semiconductor wafers. A carrier board is bonded to the redistribution layer of one of the semiconductor wafers, then the second substrate part and the stop layer structure are removed to expose the first substrate part, and the wafer conductive structures are penetrated thereon and connected to the redistribution layer. By thinning the first substrate part, the wafer conductive structures are protruded, and a bonding dielectric layer is formed to cover the wafer conductive structures and is thinned to expose the wafer conductive structure. A bonding layer with conductive pillars is formed on the redistribution layer of another semiconductor wafer, and a die sawing is performed to form a plurality of batches of dies. The bonding layers of a batch of dies are bonded to the bonding dielectric layer by using hybrid bonding technology.

Provided is a multi-dies stacking structure, which includes: a plurality of core dies stacked, wherein each core die comprises a first sub-core die and a second sub-core die vertically stacked; adjacent core dies are interconnected through micro-metal bumps, and the first sub-core die is interconnected with the second sub-core die through hybrid bonding members.

A method includes forming a first sealing layer at a first edge region of a first wafer; and bonding the first wafer to a second wafer to form a wafer stack. At a time after the bonding, the first sealing layer is between the first edge region of the first wafer and a second edge region of the second wafer, with the first edge region and the second edge region comprising bevels. An edge trimming process is then performed on the wafer stack. After the edge trimming process, the second edge region of the second wafer is at least partially removed, and a portion of the first sealing layer is left as a part of the wafer stack. An interconnect structure is formed as a part of the second wafer. The interconnect structure includes redistribution lines electrically connected to integrated circuit devices in the second wafer.

A semiconductor device structure is provided. The semiconductor device structure includes a substrate having a device region and a seal ring region surrounding the device region. The semiconductor device structure includes a seal ring structure over the seal ring region. The seal ring structure surrounds the device region. The semiconductor device structure includes a bonding film over the seal ring structure and the substrate. The semiconductor device structure includes a bonding pad embedded in the bonding film. The bonding pad overlaps the seal ring structure along an axis perpendicular to a first top surface of the substrate, and a second top surface of the bonding pad is substantially level with a third top surface of the bonding film.

Embodiments of the present disclosure provide a semiconductor structure and a manufacturing method therefor. The structure includes: a first dielectric layer disposed on a substrate, where the first dielectric layer has a first surface away from the substrate; a first bond pad, passing through the first surface and extending to a first depth below the first surface; a second bond pad, passing through the first surface and extending to a second depth below the first surface, where the second depth is less than the first depth; and a second dielectric layer, disposed on the first surface, where a first gap and a second gap are provided in the second dielectric layer, the first gap exposes the top surface of the first bond pad, and the second gap exposes the top surface of the second bond pad.