A method for fabricating a semiconductor device includes the steps of first forming a shallow trench isolation (STI) in a substrate, forming a first gate structure on the substrate and adjacent to the STI, forming a first doped region between the first gate structure and the STI, forming a second doped region between the first doped region and the first gate structure, forming a first contact plug on the first doped region, and then forming a second contact plug on the second doped region.

A method for fabricating a semiconductor device includes the steps of first forming a shallow trench isolation (STI) in a substrate, forming a first gate structure on the substrate and adjacent to the STI, forming a first doped region between the first gate structure and the STI, forming a second doped region between the first doped region and the first gate structure, forming a first contact plug on the first doped region, and then forming a second contact plug on the second doped region.

A semiconductor module arrangement includes a first substrate having a dielectric insulation layer and a first metallization layer arranged on a surface of the dielectric insulation layer. The first metallization layer includes first, second, third, and fourth sections. The semiconductor module arrangement further includes two or more controllable semiconductor elements each including first, second, and third contact pads. The second contact pad of each controllable semiconductor element is electrically coupled to the first section. The first contact pad of each controllable semiconductor element is electrically coupled to the second section by one or more electrical connection elements. The third contact pad of each controllable semiconductor element is electrically coupled to the third section by one or more electrical connection elements. The first contact pad of each controllable semiconductor element is electrically coupled to the fourth section by one or more electrical connection elements.

A semiconductor module includes: an insulator substrate; a first metallization layer arranged at the insulator substrate; and two or more controllable semiconductor elements arranged on a surface of the first metallization layer. Each controllable semiconductor element includes: a gate electrode; a first load electrode; a second load electrode; a control current path between the control electrode and the first load electrode; a controllable load current path between the first load electrode and the second load electrode; and a first circuit element arranged between the control current path and the load current path.

A semiconductor device includes lower circuit patterns on a lower substrate; lower bonding patterns on the lower circuit patterns, the lower bonding patterns including a conductive material and being electrically connected to the lower circuit patterns; upper bonding patterns on and contacting the lower bonding patterns, and including a conductive material; a passive device on the upper bonding patterns, and including a conductive material and contacting one of the upper bonding patterns; a gate electrode structure on the passive device, and including gate electrodes spaced apart from each other in a first direction, each of which extends in a second direction, and extension lengths in the second direction of the gate electrodes increasing from a lowermost level toward an uppermost level in a stepwise manner; a channel extending through at least a portion of the gate electrode structure; and an upper substrate on the channel.

A semiconductor device includes a first gate electrode and a second gate electrode which are each on a substrate and extend in a first direction, first and second source/drain patterns spaced apart from the first and second gate electrodes in a second direction which crosses the first direction, and an active contact in common connection with top surfaces of the first source/drain pattern and the second source/drain pattern. The active contact comprises a first portion on the first source/drain pattern and a second portion on the second source/drain pattern. The device includes an insulating separation pattern which extends in the second direction to separate the first gate electrode from the second gate electrode, and the active contact comprises a third portion which extends to a region below a bottom surface of the insulating separation pattern to connect the first and second portions of the active contact to each other.

Embodiments of present invention provide a semiconductor device. The semiconductor structure includes a plurality of nanosheet (NS) channel layers having a plurality of source/drain (S/D) regions on sidewalls thereof; and a continuous contact via being in direct contact with the plurality of S/D regions, wherein the continuous contact via has a substantially same horizontal distance to each of the plurality of NS channel layers. A method of manufacturing the same is also provided.

A semiconductor structure including a dielectric isolation region between and electrical isolating a first top contact of a first stacked transistor from a second top contact of a second stacked transistor, where at least one vertical surface of the first top contact is substantially flush with at least one vertical surface of the isolation region, and where at least one vertical surface of the second top contact is substantially flush with the at least one vertical surface of the isolation region.

The present invention provides a package structure with an inductor and a manufacturing method thereof, the inductor and the interconnection component are used as n second package module, and stacked with other components such as the first package module to form a stack-like package structure. The first package module is provided with other electronic elements. Then the first and second package modules can be synchronously subjected to package manufacturing, which improves the production efficiency. Additionally, the soldering balls with different heights are formed on the first faces of the interconnecting structural component and the inductive device by adjusting the consumption of soldering paste, which make the second faces of the inductor and the interconnection component are coplanar, then inductor with different heights can form a flat interconnecting plane, which makes the sequential process such as pasting and mounting can be conveniently performed. The process is simplified, and the reliability of the package structure is improved.

A semiconductor die includes a semiconductor substrate, an interconnect structure, and a conductive bump. The interconnect structure is disposed on and electrically connected to the semiconductor substrate. The interconnect structure includes stacked interconnect layers. Each of the stacked interconnect layers includes a dielectric layer and an interconnect wiring embedded in the dielectric layer. The interconnect wiring of a first interconnect layer among the stacked interconnect layers further includes a first via and second vias. The first via electrically connected to the interconnect wiring. The second vias connected to the interconnect wiring, and the first via and the second vias are located on a same level height. The conductive bump is disposed on the interconnect structure. The conductive bump includes a base portion and a protruding portion connected to the base portion, and the base portion is between the protruding portion and the first via.