Semiconductor packages, and methods for manufacturing semiconductor packages are provided. In one aspect, a method of manufacturing a semiconductor package includes stacking a plurality of semiconductor chips including a first semiconductor chip and a second semiconductor chip, the first semiconductor ship being offset from the second semiconductor ship to expose upper connection pads; forming a multilayered photoresist film to cover the plurality of semiconductor chips; forming a plurality of openings by exposing and developing the multilayered photoresist film; forming a plurality of conductive posts by filling the plurality of openings with a conductive material; removing the multilayered photoresist film; forming a molding encapsulant to surround the plurality of semiconductor chips and the plurality of conductive posts; and forming a wiring structure electrically connected to the plurality of conductive posts. The multilayered photoresist film comprises at least two layers having different chemical resistances and resolutions.

A semiconductor die includes a semiconductor substrate, an interconnect structure, and a conductive bump. The interconnect structure is disposed on and electrically connected to the semiconductor substrate. The interconnect structure includes stacked interconnect layers. Each of the stacked interconnect layers includes a dielectric layer and an interconnect wiring embedded in the dielectric layer. The interconnect wiring of a first interconnect layer among the stacked interconnect layers further includes a first via and second vias. The first via electrically connected to the interconnect wiring. The second vias connected to the interconnect wiring, and the first via and the second vias are located on a same level height. The conductive bump is disposed on the interconnect structure. The conductive bump includes a base portion and a protruding portion connected to the base portion, and the base portion is between the protruding portion and the first via.

A method of manufacturing a semiconductor package includes: forming via holes through an insulating layer to expose a redistribution conductor; forming a preliminary seed layer extending along the insulating layer and an inner surface of the via holes; forming a first photoresist layer on the preliminary seed layer which exposes first partial surfaces of the preliminary seed layer within the via holes; forming under-bump metal (UBM) vias in the via holes; forming a second photoresist layer by removing a partial region of the first photoresist layer; forming UBM pads covering the UBM vias and the second partial surfaces of the preliminary seed layer, each of the UBM pads has a convex surface protruding on a side facing away from a corresponding one of the UBM vias; removing the second photoresist layer and a partial region of the preliminary seed layer; and attaching a solder ball on the UBM pads.

The present disclosure relates to an electronic device comprising a wafer comprising a first upper surface having at least one first contact arranged thereon; and at least one die comprising a second upper surface having at least one second contact arranged thereon, and at least one first lateral surface orthogonal to the second upper surface, said first contact being coupled to said second contact by a connector comprising one first conductive pillar formed on said first contact of said wafer; one second conductive pillar formed on said second contact of said die; and at least one conductive ball positioned in contact with at least a first upper portion of said first pillar(s) and in contact with at least one second upper portion of said second pillar(s).

Provided is a semiconductor package including a first wiring structure including a first wiring and a first wiring insulating layer on the first wiring, a first semiconductor chip on the first wiring structure, and a molding member on the first semiconductor chip, wherein the first wiring includes a first wiring via and a first wiring line, wherein the first wiring structure includes a first layer and a second layer, wherein the first wiring via is in each of the first layer and the second layer, the first wiring via in the first layer and the first wiring via in the second layer contact each other in a vertical direction, and wherein a size of the first wiring via in the first layer is less than a size of the first wiring via in the second layer.

The present disclosure provides semiconductor packages and methods of fabricating the same. In some embodiments, a semiconductor package includes a substrate including first and second regions, a first pad on the first region, a second pad on the second region, a first dielectric layer on the first region and including a first opening exposing the first pad, a second dielectric layer on the second region and including a second opening exposing the second pad, a first bump structure on the first pad and in the first opening, and a second bump structure on the second pad and in the second opening. A thickness of the first dielectric layer is greater than a thickness of the second dielectric layer. A distance between the substrate and an uppermost end of the first bump structure is longer than a distance between the substrate and an uppermost end of the second bump structure.

A metal bump containing structure is provided which has a substantially flat top surface and enhanced coplanarity with other like metal bump containing structures. The metal bump containing structures include a metal bump having a curved top surface, and a first metal liner located along an outermost sidewall and present at least partially on the curved top surface of the metal bump.

A method of manufacturing a semiconductor device interconnect structure is provided. The method includes forming a copper pillar on a semiconductor die by way of a plating process. A proximal portion of the copper pillar has a first width dimension, and a distal portion of the copper pillar has a second width dimension. The second width dimension of the distal portion of the copper pillar is configured to be smaller than the first width dimension of the proximal portion of the copper pillar. Sidewalls of the distal portion of the copper pillar are selectively roughened. The roughened sidewalls of the distal portion of the copper pillar are configured to promote solder wetting.

A chip-stacked device includes a first chip including a first substrate including a first face, a first conductive film provided in an island form over the first face and electrically connected to a signal line, and a second conductive film provided apart from the first conductive film over the first face and connected to the ground line; a second chip; a first bonding portion covering the first conductive film; and a second bonding portion apart from the first conductive film and the first bonding portion, the second bonding portion located over the second conductive film. The first chip and the second chip are bonded to each other via the first bonding portion and the second bonding portion.

A semiconductor package includes a substrate having first and second surfaces opposite to each other in a vertical direction, a through electrode extending through the substrate and having an upper surface that is convex or concave, a protective pattern structure on the second surface of the substrate, and a conductive pad extending through the protective pattern structure. An upper portion of the conductive pad contacts an upper surface of the protective pattern structure. A lower portion of the conductive pad contacts an upper surface of the through electrode.