A substrate treating apparatus includes a process chamber for treating a substrate, a magnetic field generator spaced apart from an outer surface of the process chamber and applying a first magnetic field to the process chamber, and a magnetic field mask disposed in a space between the process chamber and the magnetic field generator and applying a second magnetic field interfering with the first magnetic field. The magnetic field mask includes a ferromagnetic material.

A transport vehicle that transports a container while being suspended includes a lateral swing suppression device configured to abut against an outer side surface of the container that is suspended and held, and suppress a lateral swing of the container. The lateral swing suppression device includes an abutment roller configured to rotatably abut against the outer side surface of the container. A concave groove extending continuously over an entire periphery of an outer peripheral surface of the abutment roller is formed in a region corresponding to a convex portion of the container.

A container transport apparatus including an event recording unit suitable for the driving environment for a container transport vehicle in a semiconductor fabrication plant and a logistics transport system are provided. The container transport apparatus includes: a gripping module gripping a container with a plurality of substrates accommodated therein; an elevation module lifting up or down the gripping module; a driving module controlling driving wheels to drive on rails; a first control module controlling the gripping module, the elevation module, and the driving module; and an event recording unit continuously recording surroundings of the container transport apparatus and recording any events when the container transport apparatus is driving on the rails, wherein the event recording unit displays data on a screen of a manager terminal when displaying recorded images on the screen of the manager terminal.

A storage apparatus includes a support part fixedly coupled to a ceiling surface, a rotating plate under the support part, a driving unit connecting the support part and the rotating plate, and a plurality of tables spaced apart from each other. The plurality of tables has an axis. The plurality of tables is connected to the rotating plate. The rotating plate is rotatable about a rotation axis parallel to the axis.

System and method for cross-fab wafer transportation are provided. A method includes providing a first FAB building and a second FAB building connected via a bridging area, the second FAB building comprising fabrication tools configured to perform fabrication processes different than fabrication processes performed by fabrication tools in the first FAB building, after performing fabrication processes in the first FAB building, configuring a first vehicle of the first FAB building to travel along a first OHT track and take the wafer to the bridging area, configuring a second vehicle of the second FAB building to travel along a second OHT track and arrive at the bridging area, where a portion of the first OHT track is in parallel with a portion of the second OHT track at the bridging area, when some predetermined conditions are met, configuring the first vehicle to transfer the wafer to the second vehicle.

The overhead traveling vehicle system includes a track having a plurality of first rails extending in an X direction and a plurality of second rails extending in a Y direction arranged in a grid, and a traveling vehicle traveling on a pair of the first rails adjacent to each other in the Y direction and traveling on a pair of the second rails adjacent to each other in the X direction, in which each of the first rail and the second rail has a first surface on which a cell recognition mark is disposed and a second surface on which a position recognition mark is disposed, the second surface, when viewed from a center of a cell in plan view, being disposed outside the first surface and being inclined toward the traveling vehicle side with respect to the first surface.

An overhead transport vehicle includes a traveling cart configured to move in a first direction by traveling on a pair of first rails adjacent to each other in a second direction, and move in the second direction by traveling on a pair of second rails adjacent to each other in the first direction, a body configured to swivel with respect to the traveling cart, a transfer device configured to swivel together with the body with respect to the traveling cart and to move an article, and a controller configured or programmed to swivel the body so that when the traveling cart starts traveling, an orientation of the article held by the transfer device is constant with respect to a travel direction of the traveling cart.

In the overhead vehicle system, the first rail and the second rail are disposed in a grid. The first rail (or second rail) is disposed such that a gap through which the connecting part below the traveling wheel is able to pass is formed between the rail and an intersection rail disposed at an intersection in the grid. The first rail (or the second rail) includes an auxiliary member configured to be removably attached to the attachment portion provided at the end in the longitudinal direction, the auxiliary member protruding from the rail upper surface of the rail and coming into contact with the auxiliary wheel.

An overhead transport vehicle includes a lifter to be raised and lowered by a plurality of suspensions on left and right sides. The lifter includes a base portion, a left support and a right support attached to lower ends of the suspensions and each supporting the base portion via an elastic body, and a left arm and a right that are respectively bridged between the left support and the base portion and between the right support and the base portion, and each including a first end attached to each of the left support and the right support via a first rotation shaft and a second end attached to the base portion via a second rotation shaft.

Provided are a semiconductor wafer conveyor transport and a monotrack transportation system and method. The system includes a support frame, carrier gripping mechanism, monotrack vehicle, monotrack rotating turntable, track, and monotrack horizontal transfer device. The system integrates with a gripper-based transfer structure (L-type) to facilitate movement of carriers between the monotrack and the conveyor system using a load port transfer mechanism. The gripper moves bi-directionally to pick up the carriers from the monotrack vehicle and transfer them to the conveyor load port or vice versa. The gripper grabs both sides of the carrier's box, lifts the carrier via the inner lifting mechanism, and transfers the carrier from the loading position to the unloading position, or vice versa, within the transfer structure. The outer lifting mechanism lowers the carrier onto the monotrack vehicle, which transports it to a stocker or internal transfer system, rendering the carrier movement seamless and efficient.