A substrate transfer unit includes a temporary placement stage and a transfer hand. Each of the temporary placement stage and the transfer hand holds a substrate at different locations depending on the processing state of the substrate.

A semiconductor process transport apparatus including a drive section with at least one motor, an articulated arm coupled to the drive section for driving articulation motion, a machine controller coupled to the drive section to control the at least one motor moving the articulated arm from one location to a different location, and an adapter pendant having a machine controller interface coupling the adapter pendant for input/output with the machine controller, the adapter pendant having another interface, configured for connecting a fungible smart mobile device having predetermined resident user operable device functionality characteristics, wherein the other interface has a connectivity configuration so mating of the fungible smart mobile device with the other interface automatically enables configuration of at least one of the resident user operable device functionality characteristics to define an input/output to the machine controller effecting input commands and output signals for motion control of the articulated arm.

A substrate process station includes a housing including a transport region and process region. The process station further includes a magnetic levitation assembly disposed in the transport region configured to levitate and propel a substrate carrier. The magnetic levitation assembly includes a first track segment including first rails disposed in the transport region and below the process region, wherein the first rails each include a first plurality of magnets. The process station further includes a pedestal assembly comprising a pedestal disposed within the housing. The pedestal is moveable between a pedestal transfer position and a process position, wherein the pedestal is disposed between the first rails in the pedestal transfer position to receive a substrate from the substrate carrier, and wherein the pedestal is moveable between the first rails to position the received substrate in the process region in the process position.

A substrate process station includes a housing including a transport region and process region. The process station further includes a magnetic levitation assembly disposed in the transport region configured to levitate and propel a substrate carrier. The magnetic levitation assembly includes a first track segment including first rails disposed in the transport region and below the process region, wherein the first rails each include a first plurality of magnets. The process station further includes a pedestal assembly comprising a pedestal disposed within the housing. The pedestal is moveable between a pedestal transfer position and a process position, wherein the pedestal is disposed between the first rails in the pedestal transfer position to receive a substrate from the substrate carrier, and wherein the pedestal is moveable between the first rails to position the received substrate in the process region in the process position.

A wet-processing dark laboratory for scientific research includes a laboratory body, a wet-processing equipment, a transfer robot, a sample supplying and storing apparatus, a chemical supplying and storing apparatus, and a control apparatus. The laboratory body is configured to provide a clean space. The transfer robot includes a moving device, a mechanical arm device, at least one end effector, and an accompanying device. The accompanying device can move with the moving device and provide a temporary storage space. The mechanical arm device is mounted on the moving device. The at least one end effector is mounted on the mechanical arm device for grasping a semiconductor sample and/or a chemical tank. The above design enables 24/7 experiments conduction without the need for human presence, which forms a dark laboratory.

A substrate transfer apparatus including: a chamber; a carrier with a first concave portion facing the chamber and extending in a first direction, positioned vertically in a second direction intersecting the first direction while securing a substrate, and capable of being introduced into or removed from the chamber in the first direction; roller components in the chamber, positioned in the first concave portion; linear movable components in the chamber; first magnet components in the carrier, facing the linear movable components in the second direction; second magnet components in the chamber, opposite the first magnet components in the second direction; and third magnet components in the carrier, facing the second magnet components, wherein the carrier is transferred while maintaining a gap between the linear movable components and first magnet components, facilitated by a magnetic force between the second and third magnet components.

A light emitting element transfer system includes: a vacuum chamber for creating a vacuum atmosphere or removing the vacuum atmosphere therein, an alignment portion for aligning a first substrate and a second substrate inside the vacuum chamber, a bonding portion for applying heat and pressure to the aligned first substrate and second substrate and which is disposed adjacent to the alignment portion in a an arrangement direction and inside the vacuum chamber, and a first transfer portion movable in the vacuum chamber the arrangement direction, for transferring the first substrate or the second substrate to the alignment portion, and for transferring the aligned first substrate and second substrate from the alignment portion to the bonding portion.

A substate gripper includes a first plate, a second plate, and a plurality of arms coupled with the first plate and the second plate. Each of the plurality of arms includes at least one flexure member configured to flex responsive to movement of the second plate with respect to the first plate. Flexure of the flexure members of the plurality of arms causes respective ends of the plurality of arms to perform a gripping action to grip a substrate.

Disclosed are a transfer module capable of effectively discharging very fine particles present on a wall surface or a bottom surface and semiconductor manufacturing equipment including the transfer module. The transfer module configured to transfer a substrate in the semiconductor manufacturing equipment includes a frame body, a track disposed on the frame body, a transfer robot configured to travel along the track, and a particle collection device provided in the frame body. The particle collection device includes a stacked substrate in which three-phase electrodes are disposed to be spaced apart from each other in a horizontal direction and a vertical direction and a three-phase power supply configured to supply three-phase power to the three-phase electrodes.

Provided are a semiconductor wafer conveyor transport and a monotrack transportation system and method. The system includes a support frame, carrier gripping mechanism, monotrack vehicle, monotrack rotating turntable, track, and monotrack horizontal transfer device. The system integrates with a gripper-based transfer structure (L-type) to facilitate movement of carriers between the monotrack and the conveyor system using a load port transfer mechanism. The gripper moves bi-directionally to pick up the carriers from the monotrack vehicle and transfer them to the conveyor load port or vice versa. The gripper grabs both sides of the carrier's box, lifts the carrier via the inner lifting mechanism, and transfers the carrier from the loading position to the unloading position, or vice versa, within the transfer structure. The outer lifting mechanism lowers the carrier onto the monotrack vehicle, which transports it to a stocker or internal transfer system, rendering the carrier movement seamless and efficient.