Patent classifications
H
ELECTRICITY
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H10
SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
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H10P
GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
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14/00
Formation of materials, e.g. in the shape of layers or pillars
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H10P14/2911

Growth of semiconductor materials by hydride vapor phase epitaxy using an external aluminum chloride generator
12540417 · 2026-02-03 · ·

Disclosed herein is the controlled epitaxy of Al.sub.xGa.sub.1-xAs, Al.sub.xIn.sub.1-xP, and Al.sub.xGa.sub.yIn.sub.1-x-yP by hydride vapor phase epitaxy (HVPE) through use of an external AlCl.sub.3 generator.