A drive circuit for a liquid ejecting device, such as an inkjet print head or the like, includes a load detection circuit to generate load number information corresponding to the number of actuators to be concurrently driven for an intended liquid ejection. A signal processing circuit is configured to compare a common drive waveform to a target common drive waveform, and then generate a common drive signal to drive the actuators based on the load number information and the comparison of the common drive waveform and the target common drive waveform. A switching circuit is configured to selectively apply portions the generated common drive signal to an actuator according to intended output of the liquid ejection device.

Various embodiments provide an ejection device for a fluid. The ejection device includes a first semiconductor wafer, housing, on a first side thereof, a piezoelectric actuator and an outlet channel for the fluid alongside the piezoelectric actuator; a second semiconductor wafer having, on a first side thereof, a recess and, on a second side thereof opposite to the first side, at least one inlet channel for said fluid fluidically coupled to the recess; and a dry-film coupled to a second side, opposite to the first side, of the first wafer. The first and the second wafers are coupled together so that the piezoelectric actuator and the outlet channel are set directly facing, and completely contained in, the recess that forms a reservoir for the fluid. The dry-film has an ejection nozzle.

An actuator drive circuit of a liquid discharge apparatus includes a discharge waveform generating circuit, a sleep waveform generating circuit, and a wake waveform generating circuit. The discharge waveform generating circuit is configured to generate a plurality of drive waveforms to be applied to actuators of the liquid discharge apparatus for liquid discharge. The drive waveforms correspond to gradation values of gradation scale data. The sleep waveform generating circuit is configured to generate a sleep waveform to be applied to the actuators. The sleep waveform causes a voltage of the actuators to transition to a first voltage without liquid discharge. The wake waveform generating circuit is configured to generate a wake waveform to be applied to the actuators. The wake waveform causes the voltage of the actuators to transition to a second voltage higher than the first voltage without liquid discharge.

A liquid jetting device is arranged to eject a droplet of a liquid. The device includes a nozzle, a liquid duct connected to the nozzle, an electro-mechanical transducer arranged to create an acoustic pressure wave in the liquid in the duct, and an electronic control system arranged to apply to the transducer a voltage signal having a waveform configured for ejecting a droplet from the nozzle. The waveform is further configured to quench a residual acoustic pressure wave in the liquid duct and includes a jet pulse, a subsequent first quench pulse having a polarity opposite to that of the jet pulse, and a subsequent second quench pulse having the same polarity as the jet pulse.

According to one embodiment, a liquid ejection head includes a pressure chamber that contains a liquid, an actuator to change the pressure in the pressure chamber according to an applied drive signal, and a drive circuit to apply a first drive signal to the actuator when a single droplet is to be ejected from the pressure chamber and a second drive signal to the actuator when two or more droplets are to be ejected in series from the pressure chamber. The first drive signal has a first auxiliary pulse before a first ejection pulse. The second drive signal has a second auxiliary pulse before the first ejection pulse. A pulse width of the first auxiliary pulse is greater than a pulse width of the second auxiliary pulse.

The microfluidic device has a plurality of ejector elements. Each ejector element includes a first region, accommodating a first fluid flow channel and an actuator chamber; a second region, accommodating a fluid containment chamber; and a third region, accommodating a second fluid flow channel. The fluid containment chamber is fluidically coupled to the first and to the second fluid flow channels. The second region is formed from a membrane layer, from a membrane definition layer, mechanically coupled to the membrane layer and having a membrane definition opening, and a fluid chamber defining body, mechanically coupled to the membrane definition layer and having a chamber defining opening, with a width greater than the width of the membrane definition opening. The width of the membrane is thus defined by the width of the chamber defining opening.

An actuator includes: a diaphragm on a substrate having a pressure chamber, the diaphragm having a first surface defining a part of a wall of the pressure chamber; a piezoelectric element on a second surface of the diaphragm opposite to the first surface; a lead wire led out from the piezoelectric element to supply electric power to the piezoelectric element; and a moisture-proof film covering: the lead wire; and a part of the piezoelectric element overlapped with the lead wire.

A liquid discharge apparatus includes a nozzle plate with nozzles and actuators and a drive controller. First and second nozzles are directly adjacent to each other in a first direction. First and third nozzles are directly adjacent to each other in a second direction. The drive controller is configured to apply a drive signal to first, second, and third actuators corresponding to the first, second, and third nozzles, respectively, during a drive cycle. A difference between a first timing at which the drive signal is applied to the first actuator and a second timing at which the drive signal is applied to the second actuator and a difference between the first timing and a third timing at which the drive signal is applied to the third actuator is an odd number multiple of a half of an inherent vibration cycle of the liquid discharge apparatus.

A method of manufacturing a MEMS device, the MEMS device comprising a movable Micro-Electro-Mechanical piezoelectric component and a CMOS circuit configured to be in conductive communication with the Micro-Electro-Mechanical component. A plurality of CMOS circuit layers are formed on a substrate to form the CMOS circuit, the plurality of CMOS circuit layers comprising a plurality of CMOS passivation and metallisation layers. A portion of at least one of the plurality of CMOS passivation and metallisation layers is removed in a component region of the device. One or more component region layers are formed in place of the removed portion in the component region to form the movable Micro-Electro-Mechanical piezoelectric component. The one or more component region layers are different from the portion of the at least one of the plurality of CMOS passivation and metallisation layers.

A liquid discharge head includes a nozzle layer including a piezoelectric layer and having a nozzle penetrating through the nozzle layer, a liquid chamber communicating with the nozzle, and a drive circuit to apply a drive waveform to the piezoelectric layer to drive the piezoelectric layer. The drive waveform has a first waveform and a second waveform. The first waveform has a first voltage to discharge a liquid in the liquid chamber from the nozzle. The first voltage has a first rising edge from which the first voltage rises. The second waveform has a second voltage having a second rising edge from which the second voltage rises. The second rising edge is delayed from the first rising edge by (m−0.5)×Tc, where m represents a positive integer, and Tc represents a natural period of vibration of the piezoelectric layer.