A droplet ejector for a printhead comprises: a substrate having a mounting surface and an opposite nozzle surface; at least one electronic component integrated with the substrate; a nozzle-forming layer formed on at least a portion of the nozzle surface of the substrate; a fluid chamber defined at least in part by the substrate and at least in part by the nozzle-forming layer, the fluid chamber having a fluid chamber outlet defined at least in part by a nozzle portion of the said nozzle-forming layer; a piezoelectric actuator formed on at least a portion of the nozzle portion of the nozzle-forming layer; and a protective layer covering the piezoelectric actuator and the in nozzle forming layer. The piezoelectric actuator comprises a piezoelectric body provided between first and second electrodes. At least one of the said first and second electrodes is electrically connected to the at least one electronic component. The piezoelectric body comprises one or more piezoelectric materials processable at a temperature below 450 C.

A droplet ejector for a printhead comprises: a substrate having a mounting surface and an opposite nozzle surface; a nozzle-forming layer formed on at least a portion of the nozzle surface of the substrate; a fluid chamber defined at least in part by the substrate and at least in part by the nozzle-forming layer, the fluid chamber having a fluid chamber outlet defined at least in part by a nozzle portion of the said nozzle-forming layer, the said nozzle portion comprising an inner portion located closer to the fluid chamber outlet and an outer portion located closer to a periphery of the nozzle portion; and either or both of an inner actuator arrangement formed on the inner portion of the nozzle portion of the nozzle-forming layer and an outer actuator arrangement formed on the outer portion of the nozzle portion of the nozzle-forming layer.

A microfluidic device, having a containment body accommodating a plurality of ejecting elements arranged adjacent to each other. Each ejecting element has a liquid inlet, a containment chamber, a piezoelectric actuator and an ejection nozzle. The piezoelectric actuators of each ejecting element are connected to a control unit configured to generate actuation signals and to be integrated in the containment body.

A piezoelectric transducer includes a semiconductor body with a bottom electrode of conductive material. A piezoelectric element is on the bottom electrode. A first protective layer, on the bottom electrode and the piezoelectric element, has a first opening through which a portion of the piezoelectric element is exposed, and a second opening through which a portion of the bottom electrode is exposed. A conductive layer on the first protective layer and within the first and second openings is patterned to form a top electrode in electrical contact with the piezoelectric element at the first opening, a first biasing stripe in electrical contact with the top electrode, and a second biasing stripe in electrical contact with the bottom electrode at the second opening.

Various embodiments provide an ejection device for a fluid. The ejection device includes a first semiconductor wafer, housing, on a first side thereof, a piezoelectric actuator and an outlet channel for the fluid alongside the piezoelectric actuator; a second semiconductor wafer having, on a first side thereof, a recess and, on a second side thereof opposite to the first side, at least one inlet channel for said fluid fluidically coupled to the recess; and a dry-film coupled to a second side, opposite to the first side, of the first wafer. The first and the second wafers are coupled together so that the piezoelectric actuator and the outlet channel are set directly facing, and completely contained in, the recess that forms a reservoir for the fluid. The dry-film has an ejection nozzle.

A liquid discharge apparatus includes an actuator and a drive circuit. The actuator is configured to cause liquid to be discharged from a nozzle. The drive circuit is configured to apply a waveform to the actuator during a discharge cycle in accordance with a discharge trigger and to cause a voltage of the actuator to be maintained at a value from an end of the discharge cycle until reception of a subsequent discharge trigger.

An actuator drive circuit of a liquid discharge apparatus includes a discharge waveform generating circuit, a sleep waveform generating circuit, and a wake waveform generating circuit. The discharge waveform generating circuit is configured to generate a plurality of drive waveforms to be applied to actuators of the liquid discharge apparatus for liquid discharge. The drive waveforms correspond to gradation values of gradation scale data. The sleep waveform generating circuit is configured to generate a sleep waveform to be applied to the actuators. The sleep waveform causes a voltage of the actuators to transition to a first voltage without liquid discharge. The wake waveform generating circuit is configured to generate a wake waveform to be applied to the actuators. The wake waveform causes the voltage of the actuators to transition to a second voltage higher than the first voltage without liquid discharge.

An actuator drive circuit for a liquid discharge apparatus includes an output switch and a waveform selector circuit. The output switch includes a first transistor configured to supply a first voltage to an actuator when on and a second transistor configured to supply a second voltage higher than the first voltage to the actuator when on. The waveform selector circuit is configured to select, from a plurality of waveforms stored in a waveform memory, a first waveform that causes the output switch to transition to a first state in which the first transistor is on and the second transistor is off, and a second waveform that causes the output switch to transition to a second state in which the first transistor is off and the second transistor is on.

The microfluidic device has a plurality of ejector elements. Each ejector element includes a first region, accommodating a first fluid flow channel and an actuator chamber; a second region, accommodating a fluid containment chamber; and a third region, accommodating a second fluid flow channel. The fluid containment chamber is fluidically coupled to the first and to the second fluid flow channels. The second region is formed from a membrane layer, from a membrane definition layer, mechanically coupled to the membrane layer and having a membrane definition opening, and a fluid chamber defining body, mechanically coupled to the membrane definition layer and having a chamber defining opening, with a width greater than the width of the membrane definition opening. The width of the membrane is thus defined by the width of the chamber defining opening.

A drive circuit of a liquid ejecting device includes a first switch, a second switch, and a signal processing circuit. The first switch is connected between a first potential and an output terminal through which a drive signal is transmitted to an actuator of a liquid ejecting device. The second switch is connected between the output terminal and a second potential lower than the first potential. The signal processing circuit is configured to detect a difference between a waveform of a target drive signal and the drive signal waveform output at the output terminal, and to cause the first switch and the second switch to be off when an absolute value of the difference is less than a threshold value.