Provided is a method of manufacturing a glass film, including: a forming step of forming a band-shaped glass film (1); a conveyance direction changing step of changing a conveyance direction of the band-shaped glass film (1) from a vertically downward direction to a horizontal direction by conveying the band-shaped glass film (1) along a curved conveyance path (R1); and a horizontal conveyance step of conveying the band-shaped glass film (1) in the horizontal direction along a horizontal conveyance path (R2), wherein, when some sections of the band-shaped glass film (1) are to be discarded, the method involves: a separating step of separating a discard glass part (1x) from the band-shaped glass film (1) on the horizontal conveyance path (R2); and a discarding step of discarding the separated discard glass part (1x) by causing the discard glass part (1x) to leave the horizontal conveyance path (R2) downward.

A laser irradiation apparatus (1) according to one embodiment includes a laser generating device (14) that generates a laser beam, a flotation unit (10) that causes a workpiece (16) that is to be irradiated with the laser beam to float, and a conveying unit (11) that conveys the floating workpiece (16). The conveying unit (11) conveys the workpiece (16) with the conveying unit (11) holding the workpiece (16) at a position where the conveying unit (11) does not overlap an irradiation position (15) of the laser beam. The laser irradiation apparatus (1) according to one embodiment makes it possible to suppress uneven irradiation with a laser beam.

In a laser irradiation apparatus 1 according to one embodiment, each of first and second flotation units 30a, 30b includes a base 31, and a porous plate 32 bonded to an upper surface of the base 31 by an adhesive layer 34, the base 31 includes a rising portion 312 protruding upward at an outer periphery facing at least the gap, and the porous plate 32 includes a cutout portion 321 configured to fit to the rising portion 312, and the adhesive layer 34 is formed along an inner wall of the rising portion 312 having fitted to the cutout portion 321.

A device for conveying and holding a sheet of glass, includes a conveyor and a holder configured to hold a sheet of glass in position, in particular in a horizontal position, wherein the conveyor comprises at least two spaced-apart and parallel lateral conveying systems extending longitudinally in the conveying direction and intended to be positioned in such a way as to support the lateral sides of the sheet of glass, and the holder comprises at least one holding system placed above the lateral conveying systems and above the sheet of glass and intended to limit the amplitude of the movements of the sheet of glass.

A substrate inspection system includes a floating unit that floats a substrate, an inspection unit disposed above the floating unit, a grip unit disposed below the inspection unit and including a first grip member that holds the substrate on the floating unit, a grip transfer unit that moves the grip unit in a first direction, and an illumination unit that generates light. The inspection unit inspects the substrate that floats on the floating unit, the illumination unit is disposed on a moving path of the grip unit, and the light generated by the illumination unit is irradiated onto the inspection unit. The first grip member includes a first adsorption pad that adsorbs the substrate, and a first support member that supports the first adsorption pad and that includes a first opening into which the illumination unit is inserted.

An apparatus for conveying a substrate includes a base along which the substrate is conveyed, a first upward gas ejecting section, a second upward gas ejecting section and a third upward gas ejecting section disposed over the base, the third upward gas ejecting section being disposed between the first and second upward gas ejecting sections, and a first downward gas ejecting section and a second downward gas ejecting section disposed above and facing respective portions of the third upward gas ejecting section. Gas ejected upward from the first, second and third upward gas ejecting sections floats the substrate. The substrate is subjected to pressure by gas ejected downward from the first and second downward gas ejecting sections. The first and second downward gas ejecting sections are spaced to provide a working area therebetween and through which the substrate is irradiated with a laser beam.

A system may include a support surface for supporting a substrate, a plurality of first passages arranged to distribute flows of a first gas to establish a gas bearing to float the substrate above the support surface, and a plurality of second passages arranged to distribute flows of a second gas to convey the substrate along the support surface. A method may include floating a substrate above a support surface of a substrate support apparatus via a gas bearing; and while floating the substrate, conveying the substrate along the support surface by flowing gas toward a surface of the substrate and in a nonperpendicular direction relative to the surface of the substrate.

The present invention provides a non-contact vibration suppression device comprising a first ultrasonic vibration unit and a second ultrasonic vibration unit, the device being characterized in that the first ultrasonic vibration unit and the second ultrasonic vibration unit are installed to face each other while being spaced from each other such that an object can be interposed therebetween, the first ultrasonic vibration unit and the second ultrasonic vibration unit generate ultrasonic vibrations, respectively, and apply repulsive forces, which result from the ultrasonic vibrations, to the object such that the object is constrained with no contact between the first ultrasonic vibration unit and the second ultrasonic vibration unit, thereby suppressing vibration of the object. In addition, the present invention provides an object processing method characterized by comprising the steps of: suppressing vibration of the object using the non-contact vibration suppression device; and processing the object, vibration of which has been suppressed.

Method and apparatus are provided for the controlled transport of glass sheets (13) or glass ribbons (15) undergoing heating and/or cooling (e.g., thermal tempering) by conduction more than convection. The controlled transport is achieved by applying a gas-based force (17,19,21) to the glass sheet (13) or glass ribbon (15). The gas-based force (17,19,21) can move the glass sheet (13) or glass ribbon (15) in a desired direction and/or cause it to acquire a desired orientation. The gas-based force (17,19,21) can also cause the glass sheet (13) or glass ribbon (15) to retain a desired position and/or a desired orientation. The gas-based force (17,19,21) can be applied to the glass sheet (13) or glass ribbon (15) continuously or intermittently. Systems for transitioning a glass sheet (13) or a glass ribbon (15) between a heating zone (27) and a quench zone (31) are also discussed.

A method of separating a glass web includes the steps of placing the glass web in tension by applying an in-plane tension to the glass web in a tensile direction and producing a region of increased tension on a first major surface of the glass web by imparting a curvature in the glass web. The method further includes separating the glass web along a separation path parallel to an axis of the curvature and transverse to the tensile direction by applying a defect to a portion of the first major surface in the region of increased tension.