Provided is an apparatus for treating waste gas of the electronics industry, and the apparatus includes: a reaction chamber in which an inlet and an outlet are formed and an inner space for purifying waste gas is formed; a first partition plate extending from an inner wall of the reaction chamber facing the inlet in a direction toward the inlet, dividing the inner space into a pre-treatment zone for collecting dust in the waste gas and a remaining purification zone; a second partition plate extending vertically downward from a ceiling of the reaction chamber, dividing the purification zone into a thermal decomposition zone for heating and thermally decomposing waste gas and a post-treatment zone; and a heater installed at the ceiling of the reaction chamber so as to be located in the thermal decomposition zone to thermally decompose a perfluorinated compound by heating waste gas introduced into the thermal decomposition zone; and a dry scrubber unit including one or more catalysts to collect at least one of the dust, a fluorine compound, and nitrous oxide (N2O) in waste gas introduced into the post-treatment zone.

Provided is an apparatus for treating waste gas of the electronics industry, and the apparatus includes: a reaction chamber in which an inlet and an outlet are formed and an inner space for purifying waste gas is formed; a first partition plate extending from an inner wall of the reaction chamber facing the inlet in a direction toward the inlet, dividing the inner space into a pre-treatment zone for collecting dust in the waste gas and a remaining purification zone; a second partition plate extending vertically downward from a ceiling of the reaction chamber, dividing the purification zone into a thermal decomposition zone for heating and thermally decomposing waste gas and a post-treatment zone; and a heater installed at the ceiling of the reaction chamber so as to be located in the thermal decomposition zone to thermally decompose a perfluorinated compound by heating waste gas introduced into the thermal decomposition zone; and a dry scrubber unit including one or more catalysts to collect at least one of the dust, a fluorine compound, and nitrous oxide (N2O) in waste gas introduced into the post-treatment zone.

An object of the present invention is to provide a new frameless catalytic thermal oxidation device capable of treating concentrations of harmful materials including NOx at a low temperature. Further, another object of the present invention is to provide a frameless catalytic thermal oxidation device capable of minimizing the occurrence of THC and minimizing a risk of accidents and environmental pollution which may occur in maintenance operations. According to the objects, the present invention provides a cartridge-type thermal oxidation device capable of being separated for maintenance, wherein a cartridge internal structure is configured so that the time while the material to be treated stays in a zone with the catalyst is increased, and a member capable of dropping and collecting powder generated by thermal oxidation reaction is configured.

A reducing agent supply device for supplying a reducing agent to a portion of a passage for a flue gas upstream of a SCR catalyst includes at least one header pipe extending in the passage and configured to allow the reducing agent to pass through; a plurality of injection nozzles disposed on the header pipe at intervals along an extension direction of the header pipe and configured to inject the reducing agent into the passage; a heat shield plate disposed on an upstream side of the header pipe with respect to a flow direction of the flue gas and having a longitudinal direction along the extension direction of the header pipe; and at least one fixing part contacting each of the heat shield plate and the header pipe and fixing the heat shield plate to the header pipe.

A reactor that may contact a gas stream with a catalyst composition includes a catalyst bed module having a first grouping including a first plurality of foam catalyst blocks each bounded by a first front face having a first surface area with an opposing first back face, a first top side with an opposing first bottom side, and a first side face with an opposing first alternate side face and a second grouping adjacent to the first grouping and having a second plurality of foam catalyst blocks each bounded by a second front face having a second surface area with an opposing second back face, a second top side with an opposing second bottom side, and a second side face with an opposing second alternate side face. The first back face of the first plurality of foam catalyst blocks and the second back face of the second plurality of foam catalyst face each face the other in a spaced relationship. The reactor also includes a sealing frame disposed between the first and second groupings and that may maintain the spaced relationship and form a sealed volume between the first plurality of foam catalyst blocks and the second plurality of foam catalyst blocks and a support frame having a support surface and an opening and that may support the first grouping and the second grouping. The first grouping and the second grouping are secured to the support surface such that the opening is positioned between the first grouping and the second grouping and adjacent to the sealed volume, and the sealed volume and the opening provide a passage for gas flow.

Provided herein is a catalytic article including a catalytic coating disposed on a substrate, wherein the catalytic coating comprises a bottom coating on the substrate and a top coating layer on the bottom coating layer, one such coating layer containing a platinum group metal on a refractory metal oxide support and the other such coating layer containing a ceria-containing molecular sieve. Such catalytic articles are effective toward treating exhaust gas streams of internal combustion engines and exhibit outstanding resistance to sulfur.

A device and method of simultaneously removing flammable gases and nitrous oxide are provided. The device includes a thermal oxidation chamber, a high-temperature resistant dust filter, and a catalyst chamber. The thermal oxidation chamber is configured to receive an exhaust gas from a process tool. The exhaust gas includes flammable gases and nitrous oxide. The thermal oxidation chamber has a first exhaust pipe to emit nitrous oxide and dust generated after the exhaust gas is thermally oxidized. The high-temperature resistant dust filter receives dust and nitrous oxide from the first exhaust pipe, wherein the high-temperature resistant dust filter has a filter fiber net and a second exhaust pipe, and the second exhaust pipe is configured to emit nitrous oxide. The catalyst chamber receives nitrous oxide from the second exhaust pipe, wherein the catalyst chamber has a nitrous oxide decomposition catalyst to decompose nitrous oxide into nitrogen and oxygen.

The present disclosure relates to reductant injection system and method for a selective catalytic reduction reaction whereby urea is injected directly to an exhaust line where a denitrification reaction occurs without using an additional urea decomposition reactor and, thus, conversion from urea to ammonia can occur very fast.

A catalyst arrangement deciding method for a flue gas denitrizer including a catalyst layer disposed in an exhaust gas passage includes: a step of investigating a location dependence of a degradation state of a catalyst in the catalyst layer after a lapse of a period of operation; and a step of deciding a first region of the catalyst layer in which a first catalyst is used and a second region of the catalyst layer in which a second catalyst different from the first catalyst is used, on the basis of the location dependence.

A method includes collecting exhaust gas comprising carbon dioxide (CO.sub.2) at a wellsite to provide a collected exhaust gas, separating CO.sub.2 from the collected exhaust gas to provide a separated CO.sub.2, and forming urea utilizing at least a portion of the separated CO.sub.2. A system for carrying out the method is also provided.