A method for producing a liquid transport apparatus is disclosed. The liquid transport apparatus includes a pressure chamber plate, a ceramics layer formed on a surface of the pressure chamber plate, a piezoelectric layer formed on the ceramics layer, and an electrode formed on the piezoelectric layer. The ceramics layer is formed by heating an insulating ceramic material at a temperature lower than an annealing temperature of the piezoelectric layer. Accordingly, the atoms of the pressure chamber plate are suppressed from being diffused into the piezoelectric layer.

A fluid ejection apparatus includes a plurality of fluid ejectors. Each fluid ejector includes a pumping chamber, and an actuator configured to cause fluid to be ejected from the pumping chamber. The fluid ejection apparatus includes a feed channel fluidically connected to each pumping chamber; and at least one compliant structure formed in a surface of the feed channel. The at least one compliant structure has a lower compliance than the surface of the feed channel.

A liquid discharge head includes: a flow passage substrate which is formed with individual flow passages, the individual flow passages including nozzles and pressure chambers communicated with the nozzles respectively; actuators which are fixed to a surface of the flow passage substrate and which overlap with the pressure chambers respectively in an orthogonal direction; and a protective substrate which is fixed to the surface and which covers the actuators. The protective substrate has at least one wall portion for defining actuator accommodating chambers which accommodate the actuators respectively. The wall portion overlaps in the orthogonal direction with a partition wall for partitioning two pressure chambers in the flow passage substrate. The wall portion is adhered to the surface via an adhesive portion. A protective film is formed at portions of the protective substrate and the adhesive portion which define the actuator accommodating chambers.

A bonded substrate includes: a first substrate; and a second substrate having a bonding surface bonded to the first substrate, wherein the second substrate includes a recess having a bottom surface recessed from a surface opposite to the bonding surface, and a difference between the maximum height and the minimum height of the bottom surface from the surface opposite to the bonding surface of the recess is less than 10 .Math.m.

A piezoelectric device includes a piezoelectric body, a vibration plate that vibrates when the piezoelectric body is driven, a first electrode positioned between the piezoelectric body and the vibration plate, and a second electrode positioned to be separated from the first electrode by the piezoelectric body. The piezoelectric body has an active portion that is a part sandwiched between the first electrode and the second electrode in a first direction along a thickness direction of the piezoelectric body, and a change width of a dC/dV value, which represents a change in capacitance with respect to a change in a voltage applied along a second direction orthogonal to the first direction, from one end of the active portion on a side of the first electrode to the other end of the active portion on a side of the second electrode in the first direction is 10% or less.

An inkjet print head includes a plurality of droplet jetting devices. The plurality of droplet jetting devices is formed of a nozzle layer defining, for each of the plurality of droplet jetting devices, a nozzle, a membrane layer carrying, on a membrane, a restrictor layer and an actuator for generating pressure waves in a liquid in a pressure chamber that is connected to the nozzle. The actuator is positioned in an actuator chamber in the restrictor layer, and a distribution layer defining a supply line for supplying the liquid to the pressure chamber. The restrictor layer includes an inlet restrictor having a cross-section and an outlet restrictor positioned on opposites sides of the actuator and having a cross-section that is different from the cross-section of the inlet restrictor.

A liquid discharge head includes: a nozzle plate having: a nozzle from which a liquid is to be discharged in a liquid discharge direction; and a nozzle face having the nozzle, the nozzle face directed in the liquid discharge direction; a nozzle protector configured to cover a portion of the nozzle face other than the nozzle; and a channel substrate including: a bonding part bonded to the nozzle protector with an adhesive; and a recess in a transverse portion of the bonding part extending in a transverse direction of the liquid discharge head, the recess filled with the adhesive.

A liquid discharge head configured to discharge a liquid, the liquid discharge head includes a thin film member including a first layer, a second layer bonded with the first layer, and a through hole penetrating through the first layer and the second layer. The through hole includes the first opening in the first layer and the second opening in the second layer.

A substrate having a recessed portion, a diaphragm, and a piezoelectric actuator are provided, the diaphragm includes a first layer containing silicon as a constituent element, and a third layer disposed between the first layer and the piezoelectric actuator and containing zirconium as a constituent element, and a laminated side surface of the first layer and the third layer is covered with a moisture-resistant protective film containing at least one selected from the group made of oxide, nitride, metal, and diamond-like carbon.

A liquid ejecting head includes a pressure chamber substrate in which wall surface portions of a pressure chamber are formed, an diaphragm that forms a top surface portion of the pressure chamber, a piezoelectric element that is provided on the diaphragm, and a communication plate, in which an upper surface of the communication plate is bonded to a lower surface of the pressure chamber substrate by an adhesive, the upper surface of the communication plate is provided with a supply opening and a discharge opening, the pressure chamber is longitudinal in an X direction, acute angle portions are formed by the wall surface portions that mutually form an acute angle at each end in the X direction of a bottom surface portion of the pressure chamber, and the acute angle portions do not overlap with the supply opening and the discharge opening in a laminating direction.