A liquid discharge head includes a discharge port to discharge a liquid, and a liquid chamber to communicate with the discharge port, and further includes a vibrating plate, and a piezoelectric element. The vibrating plate is disposed on a surface of the liquid chamber on a side facing a surface communicating with the discharge port, and includes a plurality of layers stacked in a layered structure. The piezoelectric element is disposed on a second surface of the vibrating plate being a back surface of a first surface of the vibrating plate in contact with the liquid chamber. The vibrating plate has a recessed portion surrounded by a bottom surface and four lateral surfaces intersecting with the bottom surface on the first surface. The recessed portion penetrates through a first layer having the first surface among the plurality of layers of the vibrating plates.

A liquid ejecting head (recording head) includes a structure (flow path member) having a plurality of stacked plates (a nozzle plate, a flow path plate, and a diaphragm) in which end surfaces at both sides in one direction are aligned. At least two plates of the plates (the nozzle plate, the flow path plate, and the diaphragm) have different coefficients of linear expansion in the one direction, and holding members are fixed to the end surfaces of the structure (flow path member) at both sides in the one direction, the holding members having stiffness higher than stiffness of a plate having the highest coefficient of linear expansion in the one direction among the plates (the nozzle plate, the flow path plate, and the diaphragm).

A liquid jetting apparatus includes: a nozzle plate having a nozzle; and a channel unit joined with the nozzle plate. The channel unit is formed with a first pressure chamber, a second pressure chamber, and a link channel linking the first pressure chamber and the second pressure chamber. In the channel unit, a dent portion is formed on an inner wall, which defines the link channel, at a part overlapping with an axis line of the nozzle. The dent portion is dented in a direction away from the nozzle.

A liquid discharge head including: a flow path formation part in which pressure generation chambers are arranged; and a pressure generation unit configured to apply pressure to the pressure generation chambers, wherein the pressure generation unit is formed by joining a vibration unit to the flow path formation part with a resin layer, and wherein the resin layer includes a curable resin composition including (A) an epoxy resin, (B) a polythiol compound, (C) at least one adhesiveness-imparting agent selected from the group consisting of a compound represented by General Formula (1), a titanium compound represented by General Formula (2-1), and a titanium compound represented by General Formula (2-2), and (D) a curing accelerator.

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A head chip prevented from deteriorating in printing quality is provided. The head chip is provided with an intermediate plate which has a plurality of columns of communication hole groups for each channel column, the communication hole group having communication holes individually communicated with ejection channels of an actuator plate and arranged in a line in an X direction. The communication holes adjacent to each other in the X direction are arranged so as to be shifted in a Y direction from each other. The intermediate plate is provided with a non-penetrating groove closed by a nozzle plate, and a penetrating hole communicated with the non-penetrating groove, and communicated with an outside of the head chip through a non-ejection channel. A part of the non-penetrating groove is located in an inter-communication hole region. A minimum gap in the X direction between an opening edge of the communication hole and the non-penetrating groove in the inter-communication hole region is larger than a minimum gap in the X direction between the opening edge of the communication hole and the non-ejection channel.

A method for manufacturing a liquid jetting apparatus includes: a wire formation step of forming a wire so that a part of the wire covers a piezoelectric film; and an electrode formation step of forming a second electrode, after the wire formation step, on a surface of the piezoelectric film on a side far from a vibration film so as to be in electrical conduction with the wire. The liquid jetting apparatus includes: a flow passage formation portion; and a piezoelectric actuator having the vibration film provided on the flow passage formation portion, the piezoelectric film arranged on the vibration film, a first electrode arranged on a surface of the piezoelectric film on a side near to the vibration film, the second electrode arranged on the surface of the piezoelectric film on the side far from the vibration film, and the wire connected to the second electrode.

A manufacturing method of a fluid control device is provided. Firstly, a housing, a piezoelectric actuator and a deformable substrate are provided. The piezoelectric actuator includes a piezoelectric element and a vibration plate having a bulge. The deformable substrate includes a communication plate and a flexible plate having a movable part. Then, the flexible plate and the communication plate are stacked and coupled. A preformed synchronous deformation process is implemented by applying at least one external force to outer portion of the deformable substrate to form a preformed synchronously-deformed structure. A force-exerting mark is formed on a surface of the preformed synchronously-deformed structure. Then, the housing, the piezoelectric actuator and the deformable substrate are sequentially stacked and coupled. The preformed synchronously-deformed structure is aligned with the bulge of the vibration plate. A specified depth is defined between the movable part and the bulge of the vibration plate.

A method of producing a film including repeating a cycle comprised of an application step, a coat removal step and a sintering step N times (N?2), wherein relative to a liquid supply position in the (n)th (1?n?N-1) cycle coat removal step, a liquid supply position in the (n+1)th cycle coat removal step is the same or shifted in a direction approaching the center of a substrate for all n(s) and at the same time, shifted in a direction approaching the center of the substrate for at least one of the (n)s; or is the same or shifted in a direction away from the center of the substrate for all n(s) and at the same time, shifted in a direction away from the center of the substrate for at least one of the (n)s.

An inkjet print head comprises a fluid channel, the fluid channel including a pressure chamber; a piezo actuator including an active piezo stack and a membrane, the active piezo stack being provided at a surface of the membrane and the membrane forming a flexible wall of the pressure chamber, and a cavity having a cavity dimension determining a wall dimension of the membrane. The method of manufacturing such a print head includes selecting a desired actuator compliance; manufacturing a first print head layer including the piezo actuator; determining at least one actual actuator property of the piezo-actuator; determining a desired wall dimension based on the actual actuator property such that the combination of the piezo actuator and the membrane having the desired wall dimension provides for the desired actuator compliance; and manufacturing a second print head layer including the cavity.

The diaphragm includes a first layer containing silicon as a constituent element, a third layer disposed between the first layer and the piezoelectric actuator and containing zirconium as a constituent element, and a second layer disposed between the first layer and the third layer and containing at least one selected from the group consisting of a metal other than iron, silicon, and zirconium, a metalloid, and a semiconductor, as a constituent element, in the second layer and the third layer, a position with a highest concentration of impurities other than the constituent elements of the second layer and the third layer is in the second layer, a position with a highest concentration of zirconium is in the third layer, and a position with a highest concentration of silicon is in the first layer.