Provided is a plasma enhanced atomic layer deposition (PEALD) process for depositing etch-resistant SiOCN films. These films provide improved growth rate, improved step coverage and excellent etch resistance to wet etchants and post-deposition plasma treatments containing O.sub.2 and NH.sub.3 co-reactants. This PEALD process relies on one or more precursors reacting in tandem with the plasma exposure to deposit the etch-resistant thin-films of SiOCN. The films display excellent resistance to wet etching with dilute aqueous HF solutions, both after deposition and after post-deposition plasma treatment(s). Accordingly, these films are expected to display excellent stability towards post-deposition fabrication steps utilized during device manufacturing and build.

A lithium ion conductor includes a compound of Formula 1:

Li.sub.7−a*α−(b−4)*β−xM.sup.αLa.sub.3Zr.sub.2−βM.sup.b.sub.βO.sub.12−x−δX.sub.xN.sub.δ  Formula 1 wherein in Formula 1, M.sup.a is a cationic element having a valence of a, M.sup.b is a cationic element having a valence of b, and X is an anion having a valence of −1, wherein, when M.sup.a comprises H, 0≤α≤5, otherwise 0≤a≤0.75, and wherein 0≤β≤1.5, 0≤x≤1.5, (a*α+(b-4)β+x)>0, and 0<δ≤6.

Provided is a method for producing a phosphor, using a nitride raw material, that gives a high-reliability (Sr,Ca)AlSiN.sub.3-based nitride phosphor at a productivity higher than before. The method comprises a mixing step of mixing raw materials and a calcining step of calcining the mixture obtained in the mixing step and, in producing the phosphor having a crystalline structure substantially identical with that of (Sr,Ca)AlSiN.sub.3 crystal as the host crystal, a strontium nitride containing SrN, Sr.sub.2N, or the mixture thereof as the main crystalline phase, as determined by crystalline phase analysis by powder X-ray diffractometry, and having a nitrogen content of 5 to 12 mass % is used as part of the raw materials.

Provided is a method for producing a phosphor, using a nitride raw material, that gives a high-reliability (Sr,Ca)AlSiN.sub.3-based nitride phosphor at a productivity higher than before. The method comprises a mixing step of mixing raw materials and a calcining step of calcining the mixture obtained in the mixing step and, in producing the phosphor having a crystalline structure substantially identical with that of (Sr,Ca)AlSiN.sub.3 crystal as the host crystal, a strontium nitride containing SrN, Sr.sub.2N, or the mixture thereof as the main crystalline phase, as determined by crystalline phase analysis by powder X-ray diffractometry, and having a nitrogen content of 5 to 12 mass % is used as part of the raw materials.

The present invention is directed to methods of transferring urea from an aqueous solution comprising urea to a MXene composition, the method comprising contacting the aqueous solution comprising urea with the MXene composition for a time sufficient to form an intercalated MXene composition comprising urea.

A sintered body includes a first hard particle, a second hard particle, and a binder. The first hard particle is an M sialon particle having a coating layer. The M sialon particle is represented by M.sub.xSi.sub.(6−x−z)Al.sub.zO.sub.zN.sub.(8−z) (in the formula, M is a metal containing at least one selected from the group consisting of calcium, strontium, barium, scandium, yttrium, lanthanoid, manganese, iron, cobalt, nickel, copper, and group IV, group V, and group VI elements of the periodic table, and relationships of 0.01≦x≦2, 0.01≦z≦4.2, and 1.79≦(6−x−z)≦5.98 are satisfied). The second hard particle is a cubic boron nitride particle.

A sintered body includes a first hard particle, a second hard particle, and a binder. The first hard particle is an M sialon particle having a coating layer. The M sialon particle is represented by M.sub.xSi.sub.(6−x−z)Al.sub.zO.sub.zN.sub.(8−z) (in the formula, M is a metal containing at least one selected from the group consisting of calcium, strontium, barium, scandium, yttrium, lanthanoid, manganese, iron, cobalt, nickel, copper, and group IV, group V, and group VI elements of the periodic table, and relationships of 0.01≦x≦2, 0.01≦z≦4.2, and 1.79≦(6−x−z)≦5.98 are satisfied). The second hard particle is a cubic boron nitride particle.

Phosphors include a CaAlSiN.sub.3 family crystal phase, wherein the CaAlSiN.sub.3 family crystal phase comprises at least one element selected from the group consisting of Mn, Ce, Pr, Nd, Sm, Eu, Tb, Dy, Ho, Er, Tm, and Yb.

An α-sialon phosphor particle containing Eu. At least one minute recess is formed on a surface of the α-sialon phosphor particle. The α-sialon phosphor particle is preferably produced by undergoing a raw material mixing step, a heating step, a pulverizing step, and an acid treatment step.

A composite for a lithium air battery, wherein the composite is represented by Formula 1:
MC.sub.xN.sub.(1−x)  Formula 1 wherein M in Formula 1 is at least one selected from a metal element and a metalloid element, and 0<x<1.