C03B25/02

GLASS SUBSTRATE, LAMINATED SUBSTRATE, AND PRODUCTION METHOD FOR GLASS SUBSTRATE
20170327408 · 2017-11-16 · ·

The present invention provides a glass substrate in which in a heat treatment step of sticking a silicon substrate and a glass substrate to each other, an alkali ion is hardly diffused into the silicon substrate, and a residual strain generated in the silicon substrate is small. A glass substrate of the present invention has: an average thermal expansion coefficient α.sub.50/100 at 50° C. to 100° C. of 2.70 ppm/° C. to 3.20 ppm/° C.; an average thermal expansion coefficient α.sub.200/300 at 200° C. to 300° C. of 3.45 ppm/° C. to 3.95 ppm/° C.; a value α.sub.200/300/α.sub.50/100 obtained by dividing the average thermal expansion coefficient α.sub.200/300 at 200° C. to 300° C. by the average thermal expansion coefficient α.sub.50/100 at 50° C. to 100° C. of 1.20 to 1.30; and a content of an alkali metal oxide being 0% to 0.1% as expressed in terms of a molar percentage based on oxides.

Workpiece conveyance apparatus, semiconductor manufacturing apparatus, and workpiece conveyance method

A workpiece conveyance apparatus having: a conveyance path on which the workpiece moves; a gas flotation section that gas-floats the workpiece over the conveyance path; a movable holding section that holds the workpiece to move on the conveyance path along with the workpiece; and a treatment region conveyance path that is located on the conveyance path, and has a treatment region where predetermined treatment for the workpiece is performed, wherein the movable holding section has at least two or more holding sections along a movement direction of the conveyance path, each of the holding sections is capable of switching between release of holding and holding for the workpiece during movement of the workpiece, operation for releasing holding of the workpiece by the holding section on the treatment region conveyance path, and holding the workpiece on the conveyance path other than the treatment region conveyance path.

Workpiece conveyance apparatus, semiconductor manufacturing apparatus, and workpiece conveyance method

A workpiece conveyance apparatus having: a conveyance path on which the workpiece moves; a gas flotation section that gas-floats the workpiece over the conveyance path; a movable holding section that holds the workpiece to move on the conveyance path along with the workpiece; and a treatment region conveyance path that is located on the conveyance path, and has a treatment region where predetermined treatment for the workpiece is performed, wherein the movable holding section has at least two or more holding sections along a movement direction of the conveyance path, each of the holding sections is capable of switching between release of holding and holding for the workpiece during movement of the workpiece, operation for releasing holding of the workpiece by the holding section on the treatment region conveyance path, and holding the workpiece on the conveyance path other than the treatment region conveyance path.

CONTINUOUS FLOW SYNTHESIS OF VO2 NANOPARTICLES OR NANORODS BY USING A MICROREACTOR

The invention provides a method for producing composite nanoparticles, the method using a first compound capable of transitioning from a monoclinic to a tetragonal rutile crystal state upon heating, and having the steps of subjecting the first compound to a hydrothermal synthesis to create anisotropic crystals of the compound; encapsulating the first compound with a second compound to create a core-shell construct; and annealing the construct as needed. Also provided is a device for continuously synthesizing composite nanoparticles, the device having a first precursor supply and a second precursor supply; a mixer to homogeneously combine the first precursor and second precursor to create a liquor; a first microreactor to subject the liquor to hydrothermic conditions to create an\isotropic particles in a continuous operation mode; and a second microreactor for coating the particles with a third precursor to create a core-shell construct.

CONTINUOUS FLOW SYNTHESIS OF VO2 NANOPARTICLES OR NANORODS BY USING A MICROREACTOR

The invention provides a method for producing composite nanoparticles, the method using a first compound capable of transitioning from a monoclinic to a tetragonal rutile crystal state upon heating, and having the steps of subjecting the first compound to a hydrothermal synthesis to create anisotropic crystals of the compound; encapsulating the first compound with a second compound to create a core-shell construct; and annealing the construct as needed. Also provided is a device for continuously synthesizing composite nanoparticles, the device having a first precursor supply and a second precursor supply; a mixer to homogeneously combine the first precursor and second precursor to create a liquor; a first microreactor to subject the liquor to hydrothermic conditions to create an\isotropic particles in a continuous operation mode; and a second microreactor for coating the particles with a third precursor to create a core-shell construct.

Ultralow expansion titania-silica glass

Annealing treatments for modified titania-silica glasses and the glasses produced by the annealing treatments. The annealing treatments include an isothermal hold that facilitates equalization of non-uniformities in fictive temperature caused by non-uniformities in modifier concentration in the glasses. The annealing treatments may also include heating the glass to a higher temperature following the isothermal hold and holding the glass at that temperature for several hours. Glasses produced by the annealing treatments exhibit high spatial uniformity of CTE, CTE slope, and fictive temperature, including in the presence of a spatially non-uniform concentration of modifier.

Ultralow expansion titania-silica glass

Annealing treatments for modified titania-silica glasses and the glasses produced by the annealing treatments. The annealing treatments include an isothermal hold that facilitates equalization of non-uniformities in fictive temperature caused by non-uniformities in modifier concentration in the glasses. The annealing treatments may also include heating the glass to a higher temperature following the isothermal hold and holding the glass at that temperature for several hours. Glasses produced by the annealing treatments exhibit high spatial uniformity of CTE, CTE slope, and fictive temperature, including in the presence of a spatially non-uniform concentration of modifier.

Non-woven textile cores and molds for making complex sculptural glass bottle interiors and exteriors
09783446 · 2017-10-10 ·

Provided herein are novel tools and methods for the formation of vessels having sculpted interior and exterior forms. Novel high-temperature non-woven textile forms may be used to create a glass vessel having a three-dimensional sculpted interior of almost any shape. The non-woven textile forms may also be used as molds to artfully sculpt bottle exteriors. The invention allows for unprecedented control over the form of glass objects in an industrially scalable process.

Non-woven textile cores and molds for making complex sculptural glass bottle interiors and exteriors
09783446 · 2017-10-10 ·

Provided herein are novel tools and methods for the formation of vessels having sculpted interior and exterior forms. Novel high-temperature non-woven textile forms may be used to create a glass vessel having a three-dimensional sculpted interior of almost any shape. The non-woven textile forms may also be used as molds to artfully sculpt bottle exteriors. The invention allows for unprecedented control over the form of glass objects in an industrially scalable process.

METHOD OF PRODUCING MELT, METHOD OF PRODUCING GLASS ARTICLE, MELTING APPARATUS, AND EQUIPMENT FOR PRODUCING GLASS ARTICLE

A method of producing a melt includes contacting a first heating element directly with an inside of a solid-liquid mixture layer including a batch raw material of glass and a mixture of solid and liquid phases denatured from the batch raw material to apply thermal energy to the solid-liquid mixture layer by heat transfer from the first heating element, supplying the batch raw material from the above of the solid-liquid mixture layer, and continuously producing a liquid phase melt with a bulk density greater than that of the solid-liquid mixture layer in a lower layer in contact with the solid-liquid mixture layer.