Described herein is method of making a halogenated partially fluorinated compound, comprising: (a) providing a compound having the following structure of formula (I): R.sub.fCFCXY wherein X and Y are independently selected from F and Cl; wherein R.sub.f is a fluorinated monovalent group comprising 1 to 10 carbon atoms; (b) contacting the compound with at least one of (i) an iodine or bromine containing salt in the presence of an acid; and (ii) aqueous solution of HZ wherein Z is selected from I and Br to form the halogenated partially fluorinated compound of the formula (II): R.sub.fCFHCXYZ wherein X and Y are independently selected from F and Cl; Z is selected from I and Br; and R.sub.f is a fluorinated monovalent group comprising 1 to 10 carbon atoms.

The present invention is a method for producing a fluorinated hydrocarbon represented by a structural formula (3), wherein an ether compound represented by a structural formula (1) and an acid fluoride represented by a structural formula (2) are brought into contact with each other in a hydrocarbon-based solvent, in the presence of a catalyst in which boron trifluoride is supported on a metal oxide: wherein R.sup.1 and R.sup.2 represent an alkyl group having 1 to 3 carbon atoms, R.sup.3 represents a hydrogen atom, a methyl group or an ethyl group, and R.sup.4 and R.sup.5 represent a methyl group or an ethyl group; and R.sup.1 and R.sup.2 may be bonded to each other to form a cyclic structure. Through the present invention, a method for industrially advantageously producing 2-fluorobutane is provided. ##STR00001##

The present invention is a method for producing a fluorinated hydrocarbon represented by a structural formula (3), wherein an ether compound represented by a structural formula (1) and an acid fluoride represented by a structural formula (2) are brought into contact with each other in a hydrocarbon-based solvent, in the presence of a catalyst in which boron trifluoride is supported on a metal oxide: wherein R.sup.1 and R.sup.2 represent an alkyl group having 1 to 3 carbon atoms, R.sup.3 represents a hydrogen atom, a methyl group or an ethyl group, and R.sup.4 and R.sup.5 represent a methyl group or an ethyl group; and R.sup.1 and R.sup.2 may be bonded to each other to form a cyclic structure. Through the present invention, a method for industrially advantageously producing 2-fluorobutane is provided. ##STR00001##

The present invention is a method for producing a fluorinated hydrocarbon represented by a structural formula (3), wherein an ether compound represented by a structural formula (1) and an acid fluoride represented by a structural formula (2) are brought into contact with each other in a hydrocarbon-based solvent, in the presence of a catalyst in which boron trifluoride is supported on a metal oxide: wherein R.sup.1 and R.sup.2 represent an alkyl group having 1 to 3 carbon atoms, R.sup.3 represents a hydrogen atom, a methyl group or an ethyl group, and R.sup.4 and R.sup.5 represent a methyl group or an ethyl group; and R.sup.1 and R.sup.2 may be bonded to each other to form a cyclic structure. Through the present invention, a method for industrially advantageously producing 2-fluorobutane is provided. ##STR00001##

A dry etching method according to one embodiment of the present disclosure includes plasmatizing a dry etching agent and etching a silicon oxide or a silicon nitride with the plasmatized dry etching agent, wherein the dry etching agent comprises CF.sub.3I and a C2-C3 fluorine-containing linear nitrile compound, and wherein the concentration of the C2-C3 fluorine-containing linear nitrile compound relative to the CF.sub.3I is higher than or equal to 1 vol. ppm and lower than or equal to 1 vol %.

A metal cyclopentadienyl complex has the formula: ##STR00001##
wherein m?0; M is a Group I, II or III main group metal, alkali or transition metal; C.sub.5H.sub.4 represents a Cp ring where two hydrogens are substituted by M and R(F).sub.m; R(F).sub.m is connected to any one of the carbon atoms of the Cp and selected from a hydrocarbyl, fluorohydrocarbyl, silyl group [SiR.sub.3], or amino group [NR.sup.1R.sup.2]. The metal cyclopentadienyl complexes include Li(C.sub.5H.sub.4-2-C.sub.5H.sub.11) (CAS No: 2413046-23-6), K(C.sub.5H.sub.4-2-C.sub.5H.sub.11), Na(C.sub.5H.sub.4-2-C.sub.5H.sub.11), K(C.sub.5H.sub.4-1-FC.sub.4H.sub.10), K(C.sub.5H.sub.4-1,1,1-3FC.sub.4H.sub.6), Li(C.sub.5H.sub.4-2-C.sub.4H.sub.9), or In(C.sub.5H.sub.4-2-C.sub.5H.sub.11) (CAS No.: 2364634-67-1). A mono-substituted cyclopentadiene has the formula: ##STR00002##
wherein m?0; C.sub.5H.sub.5 represents the Cp ring where one hydrogen is substituted R(F).sub.m; R(F).sub.m is connected to any one of the carbon atoms of the Cp and selected from a hydrocarbyl, fluorohydrocarbyl, silyl group [SiR.sub.3], or amino group [NR.sup.1R.sup.2]. The mono-substituted cyclopentadienes include C.sub.5H.sub.5-1-FC.sub.4H.sub.10, C.sub.5H.sub.5-2-C.sub.5H.sub.11, C.sub.5H.sub.5-2-C.sub.4H.sub.9, or C.sub.5H.sub.5-1,1,1-3FC.sub.4H.sub.6.

A metal cyclopentadienyl complex has the formula: ##STR00001##
wherein m?0; M is a Group I, II or III main group metal, alkali or transition metal; C.sub.5H.sub.4 represents a Cp ring where two hydrogens are substituted by M and R(F).sub.m; R(F).sub.m is connected to any one of the carbon atoms of the Cp and selected from a hydrocarbyl, fluorohydrocarbyl, silyl group [SiR.sub.3], or amino group [NR.sup.1R.sup.2]. The metal cyclopentadienyl complexes include Li(C.sub.5H.sub.4-2-C.sub.5H.sub.11) (CAS No: 2413046-23-6), K(C.sub.5H.sub.4-2-C.sub.5H.sub.11), Na(C.sub.5H.sub.4-2-C.sub.5H.sub.11), K(C.sub.5H.sub.4-1-FC.sub.4H.sub.10), K(C.sub.5H.sub.4-1,1,1-3FC.sub.4H.sub.6), Li(C.sub.5H.sub.4-2-C.sub.4H.sub.9), or In(C.sub.5H.sub.4-2-C.sub.5H.sub.11) (CAS No.: 2364634-67-1). A mono-substituted cyclopentadiene has the formula: ##STR00002##
wherein m?0; C.sub.5H.sub.5 represents the Cp ring where one hydrogen is substituted R(F).sub.m; R(F).sub.m is connected to any one of the carbon atoms of the Cp and selected from a hydrocarbyl, fluorohydrocarbyl, silyl group [SiR.sub.3], or amino group [NR.sup.1R.sup.2]. The mono-substituted cyclopentadienes include C.sub.5H.sub.5-1-FC.sub.4H.sub.10, C.sub.5H.sub.5-2-C.sub.5H.sub.11, C.sub.5H.sub.5-2-C.sub.4H.sub.9, or C.sub.5H.sub.5-1,1,1-3FC.sub.4H.sub.6.

The present invention is a method for producing a fluorinated hydrocarbon represented by a structural formula (3), wherein an ether compound represented by a structural formula (1) and an acid fluoride represented by a structural formula (2) are brought into contact with each other in a hydrocarbon-based solvent, in the presence of a catalyst in which boron trifluoride is supported on a metal oxide: wherein R.sup.1 and R.sup.2 represent an alkyl group having 1 to 3 carbon atoms, R.sup.3 represents a hydrogen atom, a methyl group or an ethyl group, and R.sup.4 and R.sup.5 represent a methyl group or an ethyl group; and R.sup.4 and R.sup.2 may be bonded to each other to form a cyclic structure. Through the present invention, a method for industrially advantageously producing 2-fluorobutane is provided.

##STR00001##

The present invention is a method for producing a fluorinated hydrocarbon represented by a structural formula (3), wherein an ether compound represented by a structural formula (1) and an acid fluoride represented by a structural formula (2) are brought into contact with each other in a hydrocarbon-based solvent, in the presence of a catalyst in which boron trifluoride is supported on a metal oxide: wherein R.sup.1 and R.sup.2 represent an alkyl group having 1 to 3 carbon atoms, R.sup.3 represents a hydrogen atom, a methyl group or an ethyl group, and R.sup.4 and R.sup.5 represent a methyl group or an ethyl group; and R.sup.4 and R.sup.2 may be bonded to each other to form a cyclic structure. Through the present invention, a method for industrially advantageously producing 2-fluorobutane is provided.

##STR00001##

The present invention is a method for producing a fluorinated hydrocarbon represented by a structural formula (3), wherein an ether compound represented by a structural formula (1) and an acid fluoride represented by a structural formula (2) are brought into contact with each other in a hydrocarbon-based solvent, in the presence of a catalyst in which boron trifluoride is supported on a metal oxide: wherein R.sup.1 and R.sup.2 represent an alkyl group having 1 to 3 carbon atoms, R.sup.3 represents a hydrogen atom, a methyl group or an ethyl group, and R.sup.4 and R.sup.5 represent a methyl group or an ethyl group; and R.sup.4 and R.sup.2 may be bonded to each other to form a cyclic structure. Through the present invention, a method for industrially advantageously producing 2-fluorobutane is provided.

##STR00001##