Patent classifications
C08G83/001
ZN-BASED ORGANICALLY-COORDINATED NANOPARTICLES, PHOTORESIST COMPOSITION, PREPARATION METHOD THEREFOR, AND USE THEREOF
The present invention relates to Zn-based organically-coordinated nanoparticles, a photoresist composition, a preparation method therefor, and the use thereof. The nanoparticles have a metal-organic one-dimensional repeatedly-arranged chain structure, the structural general formula being [ZnX.sub.2(CH.sub.3COO)Y].sub.n, X being selected from benzoate or m-methylbenzoate, Y being selected from organic amine ligands, n being the degree of polymerization, and n being greater than or equal to 1. The Zn-based organically-coordinated nanoparticles can be used for forming a photoresist composition, which can be used for middle-ultraviolet, electron beam, and extreme-ultraviolet lithography so as to obtain high-quality exposure patterns. Therefore, the Zn-based organically-coordinated nanoparticles of the present invention have remarkable potential and value in use.
Metal-backboned polymer and preparation method and use thereof
Provided is a metal-backboned polymer, as well as the preparation method and use thereof. The polymer includes a main chain and ligands. The main chain is composed of metal atoms connected by chemical bonds, with the following general formula: M.sub.n, where n represents the number of repeating units and n is greater than 10, M represents metal atoms and is one or more of the transition metal elements. The metal atoms in the main chain are connected to ligands through coordination bonds. The preparation method of the metal-backboned polymer includes the synthesis of the ligand and the synthesis of the metal-backboned polymer. The metal-backboned polymer of the present disclosure opens up a new avenue to design new functional polymers in the future.
CMP COMPOSITION INCLUDING CERIA POLYMER COMPOSITE PARTICLES
A chemical mechanical polishing composition comprises, consists of, or consists essentially of a liquid carrier and ceria polymer composite particles dispersed in the liquid carrier. The ceria polymer composite particles comprise, consist of, or consist essentially of ceria particles covalently bonded to and at least partially embedded in a polymer matrix.
FLUXIONAL CARBON CAGE POLYMER NETWORKS
Polymer networks including one or more polymers and a fluxional carbon cage are described. The fluxional carbon cage covalently crosslinks the one or more polymers to form the polymer network. Methods to synthesize the polymer network include preparing a fluxional carbon cage crosslinker, combining the fluxional carbon cage crosslinker with monomers and/or one or more polymers and a free radical initiator to form a mixture, and exposing the mixture to thermal energy and/or electromagnetic energy to form the polymer network.