The metal ceramic powder with a particle size of 15-45 .Math.m and suitable for thermal spraying is prepared through a combination of mechanical ball milling, spray granulation, and vacuum sintering. The metal ceramic powder is sprayed on a surface of a steel substrate adopting the high velocity oxygen fuel (HVOF) technology with oxygen-propane as fuel and taking oxygen as a combustion improver, propane as fuel, nitrogen as powder feeding carrier gas, and air as a cooling medium to prepare and form the NiCrBSi—ZrB2 composite coating. The present disclosure solves the problem that ZrB.sub.2 ceramic is difficult to compact during sintering and improves powder bonding strength and fluidity. The preparation method is simple, has advantages of high coating deposition efficiency and convenient equipment operation, and is cost-effective. The preparation method can improve thermal corrosion resistance and high-temperature wear resistance of a surface of boiler, and prolonging lifetime of the boiler.

A spray coating film has a first spray coating film formed on a surface of an aluminum substrate and a second spray coating film formed on a surface of the first spray coating film. In the first spray coating film, an inorganic material with a layered crystalline structure is dispersed in a Ni-based alloy material, and an area ratio of the inorganic material is in a range from 40% to 80% relative to the sectional area of the first spray coating film. The second spray coating film is a porous film composed of ZrO.sub.2—SiO.sub.2 based ceramic containing 30% to 50% by mass of SiO.sub.2, and the second spray coating film has an area ratio of pores of 30% to 80% relative to the sectional area of the second spray coating film.

A spray coating film has a first spray coating film formed on a surface of an aluminum substrate and a second spray coating film formed on a surface of the first spray coating film. In the first spray coating film, an inorganic material with a layered crystalline structure is dispersed in a Ni-based alloy material, and an area ratio of the inorganic material is in a range from 40% to 80% relative to the sectional area of the first spray coating film. The second spray coating film is a porous film composed of ZrO.sub.2—SiO.sub.2 based ceramic containing 30% to 50% by mass of SiO.sub.2, and the second spray coating film has an area ratio of pores of 30% to 80% relative to the sectional area of the second spray coating film.

Provided is a processing component of equipment for manufacturing a semiconductor or a display. A ceramic coated film is formed on a surface of a body of the processing component, in a state in which some or the entirety of valleys and peaks are removed, such that a surface roughness Rz, which is expressed as an absolute value (P1+P2+P3+P4+P5)/5−(V1+V2+V3+V4+V5)/5 corresponding to a difference between an average of distances between the deepest five valleys V1, V2, V3, V4 and V5 in a section in which the surface roughness is measured and an arbitrary datum line that is parallel to a center line at which an area of peaks and an area of valleys are equal to each other in the section in which the surface roughness is measured and an average of distances between the highest five peaks P1, P2, P3, P4 and P5 in the section in which the surface roughness is measured and the arbitrary datum line, is lower than 5.0 μm.

Provided is a processing component of equipment for manufacturing a semiconductor or a display. A ceramic coated film is formed on a surface of a body of the processing component, in a state in which some or the entirety of valleys and peaks are removed, such that a surface roughness Rz, which is expressed as an absolute value (P1+P2+P3+P4+P5)/5−(V1+V2+V3+V4+V5)/5 corresponding to a difference between an average of distances between the deepest five valleys V1, V2, V3, V4 and V5 in a section in which the surface roughness is measured and an arbitrary datum line that is parallel to a center line at which an area of peaks and an area of valleys are equal to each other in the section in which the surface roughness is measured and an average of distances between the highest five peaks P1, P2, P3, P4 and P5 in the section in which the surface roughness is measured and the arbitrary datum line, is lower than 5.0 μm.

In one example, a method for forming a coating system including a bond coat and an environmental barrier coating on a ceramic or CMC substrate, e.g., with an abradable coating on the environmental barrier coating. The method may include depositing a bond coat on a ceramic or ceramic matrix composite (CMC) substrate to form an as-deposited bond coat; heat treating the as-deposited bond coat following the deposition of the as-deposited bond coat on the substrate to form a heat treated bond coat; depositing an environment barrier coating (EBC) layer on the heat treated bond coat to form as deposited EBC layer; and heat treating the as-deposited EBC layer to form a heat treated EBC layer.

In one example, a method for forming a coating system including a bond coat and an environmental barrier coating on a ceramic or CMC substrate, e.g., with an abradable coating on the environmental barrier coating. The method may include depositing a bond coat on a ceramic or ceramic matrix composite (CMC) substrate to form an as-deposited bond coat; heat treating the as-deposited bond coat following the deposition of the as-deposited bond coat on the substrate to form a heat treated bond coat; depositing an environment barrier coating (EBC) layer on the heat treated bond coat to form as deposited EBC layer; and heat treating the as-deposited EBC layer to form a heat treated EBC layer.

A coated substrate comprises: a metallic substrate; a bondcoat atop the substrate; and a ceramic barrier coat atop the bondcoat. The bondcoat has a combined content of one or more of molybdenum, chromium, and vanadium of at least 50 percent by weight.

A coated substrate comprises: a metallic substrate; a bondcoat atop the substrate; and a ceramic barrier coat atop the bondcoat. The bondcoat has a combined content of one or more of molybdenum, chromium, and vanadium of at least 50 percent by weight.

A method includes depositing a first layer of a first material onto a surface of a chamber component of a processing chamber. The first material comprises a polymer, the polymer having a dielectric strength of at least 40 MV/m. The method further includes depositing a second layer of a second material onto the first layer. The second material comprises a first ceramic material impregnated into the first polymer or a second polymer. The method further includes depositing a third layer. The third layer is of a third material. The third material includes the first ceramic material or a second ceramic material. The third material does not adhere to the first polymer or the second polymer. The third material does adhere to the first ceramic material or the second ceramic material of the second layer.