Patent classifications
C23C4/02
Substrate placing table and substrate processing apparatus
A substrate placing table according to an exemplary embodiment includes a base and an electrostatic chuck provided on the base. The electrostatic chuck includes a lamination layer portion, an intermediate layer, and a covering layer. The lamination layer portion is provided on the base. The intermediate layer is provided on the lamination layer portion. The covering layer is provided on the intermediate layer. The lamination layer portion includes a first layer, an electrode layer, and a second layer. The first layer is provided on the base. The electrode layer is provided on the first layer. The second layer is provided on the electrode layer. The intermediate layer is provided between the second layer and the covering layer and is in close contact with the second layer and the covering layer. The second layer is a resin layer. The covering layer is ceramics.
Substrate placing table and substrate processing apparatus
A substrate placing table according to an exemplary embodiment includes a base and an electrostatic chuck provided on the base. The electrostatic chuck includes a lamination layer portion, an intermediate layer, and a covering layer. The lamination layer portion is provided on the base. The intermediate layer is provided on the lamination layer portion. The covering layer is provided on the intermediate layer. The lamination layer portion includes a first layer, an electrode layer, and a second layer. The first layer is provided on the base. The electrode layer is provided on the first layer. The second layer is provided on the electrode layer. The intermediate layer is provided between the second layer and the covering layer and is in close contact with the second layer and the covering layer. The second layer is a resin layer. The covering layer is ceramics.
CHEMICAL CONVERSION-TREATED STEEL PIPE
A chemical conversion-treated steel pipe has a chemical conversion treatment film on a plated layer on a steel sheet. The plated layer is configured from a zinc alloy comprising 0.05-60 mass % aluminum and 0.1-10.0 mass % magnesium. The chemical conversion treatment film contains a fluorine resin, a base resin, metal flakes and a chemical conversion treatment component. The base resin is one or more selected from a group consisting of polyurethane, polyester, acrylic resins, epoxy resins and polyolefin. The content of fluorine resin with respect to the total amount of fluorine resin and base resin is at least 3.0 mass % calculated as fluorine atoms. The content of the base resin with respect to 100 parts by mass of the fluorine resin is at least 10 parts by mass. The content of metal flakes in the chemical conversion treatment film is greater than 20 mass % up to and including 60 mass %.
MASKING PLUG FOR COLD SPRAY REPAIR AT COUNTERBORE HOLE
A method of improving a structure of a component adjacent a feature is provided including removing a portion of the structure including at least one area where damage of corrosion has occurred or is likely to occur to expose a surface of the structure. A masking plug is installed into the feature such that a base of the masking plug is coupled to a first portion of the feature and a head of the masking plug is arranged adjacent a second portion of the feature. A structural deposit is formed on the surface and is integral with the structure. Excess material of the structural deposit and a portion of the head of the masking plug is removed. The second portion of the feature is reformed and the masking plug is removed from the feature.
THIN COATINGS FOR HYDRAULIC COMPONENTS
An example hydraulic system component of a machine includes a protective coating deposited by high velocity air fuel (HVAF) thermal spray, exhibiting high adhesion strengths and surface morphologies that promote lubricant adhesion and reduce the leakage of oil and/or hydraulic fluid from the hydraulic system. The coating may have surface roughness with Rz values less than 2 μm and hardness of 1000 Vickers or greater. The HVAF coating may be thinner than conventional coatings with thicknesses less than 100 μm. The HVAF coating may be deposited on a variety of steel components with adhesion strengths greater than those achieved by high velocity oxygen fuel (HVOF). The HVAF coating may be formed without time consuming roughening and/or post-grind operations, resulting in cost savings compared to conventional coatings. The coatings may have operational lifetimes of 1000 hours or more.
THIN COATINGS FOR HYDRAULIC COMPONENTS
An example hydraulic system component of a machine includes a protective coating deposited by high velocity air fuel (HVAF) thermal spray, exhibiting high adhesion strengths and surface morphologies that promote lubricant adhesion and reduce the leakage of oil and/or hydraulic fluid from the hydraulic system. The coating may have surface roughness with Rz values less than 2 μm and hardness of 1000 Vickers or greater. The HVAF coating may be thinner than conventional coatings with thicknesses less than 100 μm. The HVAF coating may be deposited on a variety of steel components with adhesion strengths greater than those achieved by high velocity oxygen fuel (HVOF). The HVAF coating may be formed without time consuming roughening and/or post-grind operations, resulting in cost savings compared to conventional coatings. The coatings may have operational lifetimes of 1000 hours or more.
PHOSPHOR THERMOMETRY DEVICE FOR SYNCHRONIZED ACQUISITION OF LUMINESCENCE LIFETIME DECAY AND INTENSITY ON THERMAL BARRIER COATINGS
A phosphor thermometry device includes a laser that generates a laser pulse onto a thermal barrier coating (TBC) applied onto a substrate. A metallic bond coat layer is on the substrate. A ceramic top coat layer is on the bond coat layer and includes an undoped layer and a doped sensing layer having co-doped first and second rare-earth luminescent dopants that emit respective first and second different emission wavelengths upon excitation by the laser pulse. A detector receives reflected, convoluted luminescence signals from the TBC. First and second photomultiplier devices detect respective first and second different emission wavelengths of the convoluted luminescence signals. A controller receives and processes signals generated from respective first and second photomultiplier devices and determines luminescence lifetime decay and intensity variations for each of the respective first and second rare-earth luminescent dopants for temperature monitoring of the TBC.
PHOSPHOR THERMOMETRY DEVICE FOR SYNCHRONIZED ACQUISITION OF LUMINESCENCE LIFETIME DECAY AND INTENSITY ON THERMAL BARRIER COATINGS
A phosphor thermometry device includes a laser that generates a laser pulse onto a thermal barrier coating (TBC) applied onto a substrate. A metallic bond coat layer is on the substrate. A ceramic top coat layer is on the bond coat layer and includes an undoped layer and a doped sensing layer having co-doped first and second rare-earth luminescent dopants that emit respective first and second different emission wavelengths upon excitation by the laser pulse. A detector receives reflected, convoluted luminescence signals from the TBC. First and second photomultiplier devices detect respective first and second different emission wavelengths of the convoluted luminescence signals. A controller receives and processes signals generated from respective first and second photomultiplier devices and determines luminescence lifetime decay and intensity variations for each of the respective first and second rare-earth luminescent dopants for temperature monitoring of the TBC.
Process for producing thermal barrier coating
A process for producing a thermal barrier coating having an excellent thermal barrier effect and superior durability to thermal cycling. Also, a turbine member having a thermal barrier coating that has been formed using the production process, and a gas turbine. The process for producing a thermal barrier coating includes: forming a metal bonding layer (12) on a heat-resistant alloy substrate (11), and forming a ceramic layer (13) on the metal bonding layer (12) by thermal spraying of thermal spray particles having a particle size distribution in which the 10% cumulative particle size is not less than 30 μm and not more than 100 μm.
Process for producing thermal barrier coating
A process for producing a thermal barrier coating having an excellent thermal barrier effect and superior durability to thermal cycling. Also, a turbine member having a thermal barrier coating that has been formed using the production process, and a gas turbine. The process for producing a thermal barrier coating includes: forming a metal bonding layer (12) on a heat-resistant alloy substrate (11), and forming a ceramic layer (13) on the metal bonding layer (12) by thermal spraying of thermal spray particles having a particle size distribution in which the 10% cumulative particle size is not less than 30 μm and not more than 100 μm.