C23C8/06

Process and apparatus for continuous production of porous structures
11486030 · 2022-11-01 · ·

An apparatus and process are presented for continuous production of metal-based micro-porous structures of pore sizes from 0.3 nm to 5.0 μm from a green part of characteristic diffusion mass transfer dimension less than 1 mm through chemical reactions in a continuous flow of gas substantially free of oxygen. The produced micro-porous structures include i) thin porous metal sheets of thickness less than 200 μm and pore sizes in the range of 0.1 to 5.0 μm, ii) porous ceramic coating of thickness less than 40 μm and ceramic particle sizes of 200 nm or less on a porous metal-based support structures of pore sizes in the range of 0.1 to 5 μm.

Metal contamination prevention method and apparatus, and substrate processing method using the same and apparatus therefor

There is provided a metal contamination prevention method performed by passing a metal chloride gas through a metal component having a surface covered with an inactive film formed of a chromium oxide, the method including: generating a chromium chloride (III) hexahydrate by supplying a hydrochloric acid to the inactive film covering the surface of the metal component and allowing the chromium oxide to react with the hydrochloric acid; removing a chromium from the inactive film by evaporating the chromium chloride (III) hexahydrate; and covering a surface of the inactive film with a compound containing a metal contained in the metal chloride gas.

Metal contamination prevention method and apparatus, and substrate processing method using the same and apparatus therefor

There is provided a metal contamination prevention method performed by passing a metal chloride gas through a metal component having a surface covered with an inactive film formed of a chromium oxide, the method including: generating a chromium chloride (III) hexahydrate by supplying a hydrochloric acid to the inactive film covering the surface of the metal component and allowing the chromium oxide to react with the hydrochloric acid; removing a chromium from the inactive film by evaporating the chromium chloride (III) hexahydrate; and covering a surface of the inactive film with a compound containing a metal contained in the metal chloride gas.

Metal-Containing Structures, and Methods of Treating Metal-Containing Material to Increase Grain Size and/or Reduce Contaminant Concentration

Some embodiments include a method of forming a conductive structure. A metal-containing conductive material is formed over a supporting substrate. A surface of the metal-containing conductive material is exposed to at least one radical form of hydrogen and to at least one oxidant. The exposure alters at least a portion of the metal-containing conductive material to thereby form at least a portion of the conductive structure. Some embodiments include a conductive structure which has a metal-containing conductive material with a first region adjacent to a second region. The first region has a greater concentration of one or both of fluorine and boron relative to the second region.

Metal-Containing Structures, and Methods of Treating Metal-Containing Material to Increase Grain Size and/or Reduce Contaminant Concentration

Some embodiments include a method of forming a conductive structure. A metal-containing conductive material is formed over a supporting substrate. A surface of the metal-containing conductive material is exposed to at least one radical form of hydrogen and to at least one oxidant. The exposure alters at least a portion of the metal-containing conductive material to thereby form at least a portion of the conductive structure. Some embodiments include a conductive structure which has a metal-containing conductive material with a first region adjacent to a second region. The first region has a greater concentration of one or both of fluorine and boron relative to the second region.

SURFACE TREATMENT METHOD AND SURFACE TREATMENT DEVICE

There is provided a surface treatment method in which a processing gas is brought in contact with a heated processing object made of steel, an element in the processing gas is solid-solutionized, and thus a surface treatment is performed on the processing object. The processing object is heated to a heating temperature in a vicinity of a processing temperature at which the surface treatment is performed by heating an atmosphere in which the processing object is disposed. The surface treatment is performed by bringing the processing gas in contact with a surface of the processing object while the processing object which is heated is directly heated to the processing temperature.

Temperature stabilizing cargo compartment, including a freeze and heat barrier, for transport container constructed with thermal resistant materials

Novel method of preserving the internal environmental air temperature and thereby stabilizing the temperature within the cargo compartment of a transport container, and thereby protecting the cargo itself from degradation due to temperature fluxuations, including a freeze and heat barrier attained through the characteristics of the article of manufacture, composition of matter, and method of preservation of the internal environmental air temperature and proximate cargo within said cargo compartment; along with a machine or devise that is used as either a stand-alone container, or as an insert to retrofit existing containers so as to make said retrofitted devices capable of providing cooling over an extended period of time are disclosed. The inserted cargo compartments described herein are particularly useful for temperature-stabilizing cargo compartment shipping containers that are required to maintain a temperature below ambient for a time sufficient to complete delivery of the container and its contents. The shipping containers can be utilized to cost-effectively transport temperature-sensitive products.

Temperature stabilizing cargo compartment, including a freeze and heat barrier, for transport container constructed with thermal resistant materials

Novel method of preserving the internal environmental air temperature and thereby stabilizing the temperature within the cargo compartment of a transport container, and thereby protecting the cargo itself from degradation due to temperature fluxuations, including a freeze and heat barrier attained through the characteristics of the article of manufacture, composition of matter, and method of preservation of the internal environmental air temperature and proximate cargo within said cargo compartment; along with a machine or devise that is used as either a stand-alone container, or as an insert to retrofit existing containers so as to make said retrofitted devices capable of providing cooling over an extended period of time are disclosed. The inserted cargo compartments described herein are particularly useful for temperature-stabilizing cargo compartment shipping containers that are required to maintain a temperature below ambient for a time sufficient to complete delivery of the container and its contents. The shipping containers can be utilized to cost-effectively transport temperature-sensitive products.

Electroless atomic layer deposition

A method of electroless atomic layer deposition is described. The method electrolessly generates a layer of sacrificial material on a surface of a first material. The method adds doses of a solution of a second material to the substrate. The method performs a galvanic exchange reaction to oxidize away the layer of the sacrificial material and deposit a layer of the second material on the surface of the first material. The method can be repeated for a plurality of iterations in order to deposit a desired thickness of the second material on the surface of the first material.

Electroless atomic layer deposition

A method of electroless atomic layer deposition is described. The method electrolessly generates a layer of sacrificial material on a surface of a first material. The method adds doses of a solution of a second material to the substrate. The method performs a galvanic exchange reaction to oxidize away the layer of the sacrificial material and deposit a layer of the second material on the surface of the first material. The method can be repeated for a plurality of iterations in order to deposit a desired thickness of the second material on the surface of the first material.