In a surface-coated cutting tool, a hard coating includes one or more layers. At least one layer thereof is a hard coating layer composed of a complex nitride or carbonitride layer of Al, Cr, and Si and satisfying (Al.sub.1-x-yCr.sub.xSi.sub.y)(C.sub.zN.sub.1-z) where x, y and z are atomic ratios and satisfy 0.1x0.4, 0.01y0.2, and 0z0.3, respectively. The hard coating layer contains particles including: less than 10 atomic % of non-metal components selected from C and N; and metal components selected from Cr, Al and Si. In the cross-section perpendicular to the tool body surface, the number ratio of oblate particles with an Al content of 50 atomic % or less, a long diameter of less than 0.5 m, and an aspect ratio of 2.0 or more is 90% or more with respect to the total number of the particles.

A superalloy target wherein the superalloy target has a polycrystalline structure of random grain orientation, the average grain size in the structure is smaller than 20 m, and the porosity in the structure is smaller than 10%. Furthermore, the invention includes a method of producing a superalloy target by powder metallurgical production, wherein the powder-metallurgical production starts from alloyed powder(s) of a superalloy and includes the step of spark plasma sintering (SPS) of the alloyed powder(s).

An HEMT device of a normally-on type, comprising a heterostructure; a dielectric layer extending over the heterostructure; and a gate electrode extending right through the dielectric layer. The gate electrode is a stack, which includes: a protection layer, which is made of a metal nitride with stuffed grain boundaries and extends over the heterostructure, and a first metal layer, which extends over the protection layer and is completely separated from the heterostructure by said protection layer.

Embodiments of a showerhead are described herein. In some embodiments, a showerhead assembly includes: a first gas delivery portion having a first body, a first inlet, and a plurality of first tubes extending from the first body and defining a first plenum, wherein each tube of the plurality of first tubes includes a plurality of first holes; and a second gas delivery portion having a second body, a second inlet, and a plurality of second tubes extending from the second body and defining a second plenum fluidly independent from the first plenum, wherein each tube of the plurality of second tubes includes a plurality of second holes, and wherein the plurality of first tubes are disposed in an alternating pattern with the plurality of second tubes across a width of the showerhead assembly and a heat sink disposed between the plurality of first tubes and the plurality of second tubes.

The present invention discloses a film formation device and a film formation method for film formation of thin films. The film formation device includes a vacuum chamber, an evacuation mechanism that is connected to the vacuum chamber and evacuates the vacuum chamber, a substrate holding mechanism that holds a substrate in the vacuum chamber, a film formation mechanism that is disposed in the vacuum chamber, and an introduction mechanism that is connected to the vacuum chamber and capable of introducing a hydroxyl group-containing gas into the vacuum chamber during film formation by the film formation mechanism.

A method for manufacturing a metal or metal oxide porous thin film having a three-dimensional open-network structure by controlling its pore size through a dry process is provided. The film can be used in a gas sensor, a biosensor, a battery capacitor, a fuel cell, a solar cell, a chemical catalyst, or an antibacterial filter.

A coated substrate includes a substrate, a zirconium-containing layer disposed over the substrate, and one or more copper alloy layers disposed over the substrate. Variations include coated substrate with a single copper alloy layer, alternating copper layers, or a combined copper alloy/zirconium-containing layer.

The invention refers to negative electrode plate, preparation method thereof and electrochemical device. The negative electrode plate comprises: a negative current collector, a negative active material layer, and an inorganic dielectric layer which are provided in a stacked manner; the negative active material layer comprises opposite first surface and second surface, wherein the first surface is disposed away from the negative current collector; the inorganic dielectric layer is disposed on the first surface of the negative active material layer and consists of an inorganic dielectric material. The negative electrode plate provided by the application is useful in an electrochemical device, and can result in an electrochemical device having simultaneously excellent safety performance and cycle performance.

A decorative article has a substrate of which at least part of the surface is configured with Ti or stainless steel; and a coating made of primarily TiC and disposed on the substrate. The coating has at least a first region, and a second region disposed closer to the substrate than the first region. The elastic modulus of the second region is greater than the elastic modulus of the first region.

A preparation device has a chamber, molten metal containers, a rotatable base in the chamber and having a deposition substrate, laser sets generating a dual-pulse laser, a base controller and a data collection control unit. The containers communicate with the chamber and each has a pulse pressurization apparatus pressing the molten metal into the chamber. The laser sets correspond to the containers such that beams of an emitted dual-pulse laser bombard the pulsed droplets, plasmas are generated and are sputtered and deposited on the substrate forming a multi-element alloy thin film. The unit collects base temperature and displacement information, and controls the pressurization frequency of the pulse pressurization apparatus, and the emission frequency and energy of the dual-pulse laser of the laser sets controlling the frequency and energy of the dual-pulse laser bombarding the corresponding pulsed droplets. The base controller controls the base temperature, rotation and movement.