A manufacturing method of the ESD protection device includes the following steps. A surface treatment is performed on the substrate. A link layer is formed on the substrate after the surface treatment, wherein a material of the link layer includes a metal material. A progressive layer is formed on the link layer, wherein a material of the progressive layer includes a non-stoichiometric metal oxide material, and an oxygen concentration in the non-stoichiometric metal oxide material is increased gradually away from the substrate in a thickness direction of the progressive layer. A composite layer is formed on the progressive layer, wherein the composite layer includes a stoichiometric metal oxide material and a non-stoichiometric metal oxide material, and a ratio of the non-stoichiometric metal oxide material and the stoichiometric metal oxide material in the composite layer may make a sheet resistance value of the composite layer 1×10.sup.7 to 1×10.sup.8 Ω/sq.

An HEMT device of a normally-on type, comprising a heterostructure; a dielectric layer extending over the heterostructure; and a gate electrode extending right through the dielectric layer. The gate electrode is a stack, which includes: a protection layer, which is made of a metal nitride with stuffed grain boundaries and extends over the heterostructure, and a first metal layer, which extends over the protection layer and is completely separated from the heterostructure by said protection layer.

A gas barrier laminate including a resin substrate, a first coating layer containing a carboxylic acid polymer; and a second coating layer containing a polyvalent metal compound and a resin, laminated in this order; a ratio of a thickness of the second coating layer to the first coating layer in the range of 1.0 or more and 4.0 or less; and the second coating layer satisfies at least one of the following: (condition 1) a haze of the second coating layer is 8% or less; (condition 2) a surface roughness Ra of the second coating layer is ½ or less of the thickness of the second coating layer; and (condition 3) the number of concave portions having a diameter of 1.5 μm or more per unit area on a surface of the second coating layer opposite to the first coating layer is 2/0.01 mm.sup.2 or less.

A coated substrate includes a substrate, a zirconium-containing layer disposed over the substrate, and one or more copper alloy layers disposed over the substrate. Variations include coated substrate with a single copper alloy layer, alternating copper layers, or a combined copper alloy/zirconium-containing layer.

The present invention relates to a coated substrate comprising a substrate surface coated with a coating comprising at least one layer, wherein the at least one layer comprises titanium, aluminum and nitrogen, wherein—the content of aluminum in relation to the content of titanium in the at least one layer comprising titanium, aluminum and nitrogen satisfy Al/Ti>1 by considering only the respective concentrations in atomic percentage of aluminum and titanium in the at least one layer comprising titanium, aluminum and nitrogen, and—the at least one layer comprising titanium, aluminum and nitrogen exhibits wurtzite phase of aluminum nitride and rutile phase of titanium oxide.

The present invention relates to a coating apparatus for coating a substrate of a substrate material with at least one material layer of a layer material. The present invention also relates to a process chamber for a coating apparatus for coating a substrate of a substrate material with at least one material layer of a layer material. The present invention further relates to a method of coating a substrate of a substrate material with at least one material layer of a layer material in a coating apparatus. A further aspect of the invention relates to a substrate coated with at least one material layer, comprising the substrate of a substrate material that is coated with at least one material layer of a layer material.

To improve the adhesion resistance and wear resistance of a surface-coated cutting tool. The surface-coated cutting tool includes a tool substrate, and a single-component coating layer composed of a composite nitride of Cr (chromium), Al (aluminum), and V (vanadium) and disposed on the surface of the tool substrate. The composite nitride is characterized by being represented by a compositional formula: Cr.sub.aAl.sub.bV.sub.cN satisfying the following relations:
0.11≤a≤0.26;
0.73≤b≤0.85;
0<c≤0.04; and
a+b+c≤1
(wherein a, b, and c each represent an atomic proportion). The single-component coating layer has both a hexagonal phase and a cubic phase.

A coated cutting tool comprising a substrate comprising a cubic boron nitride sintered body and a coating layer formed on the substrate, wherein the coating layer comprises a Ti carbonitride layer comprising Ti(C.sub.xN.sub.1-x); an average thickness of the Ti carbonitride layer is 0.5 μm or more and 5.0 μm or less; in the Ti carbonitride layer, R75 is higher than R25; in the Ti carbonitride layer, a texture coefficient TC (111) of a (111) plane is 1.0 or more and 2.0 or less; and in X-ray diffraction measurement of the Ti carbonitride layer, an absolute value of a difference between a maximum value and a minimum value of 2θ is 0.1° or less on the (111) plane when the measurement is performed at each of ψ angles of 0°, 30°, 50° and 70°.

An improved coating used in plastic processing applications including a first layer system that includes at least one corrosion resistant material layer; a second layer system that includes at least one abrasion resistant material layers; and a transition layer provided between the first layer and the second layer. The coating is resistant to both abrasion and corrosion, while maintaining ductility and impact resistance.

A component including a substrate surface coated with a coating including at least one MoN layer having a thickness not less than 40 nm. Between the substrate surface and the at least one MoN layer the component includes: i) a substrate surface hardened layer, which is a hardened, nitrogen-containing substrate surface layer that is the result of a nitriding treatment carried out at the substrate surface and has a thickness not less than 10 nm, preferably not less than 20 nm and not greater than 150 nm, and/or ii) a layer system composed of more than 2 MoN layers and more than 2 CrN layers, wherein the MoN and CrN layers forming the layer system are individual layers deposited alternatingly one on each other forming a multilayer MoN/CrN coating film.