C23C14/04

MASK ASSEMBLY, DEPOSITION APPARATUS INCLUDING THE SAME, AND FABRICATING METHOD OF THE MASK ASSEMBLY

A mask assembly includes: a mask frame; a mask supported by the mask frame, the mask including a plurality of pattern holes; and a magnetic part disposed on one surface of the mask. The magnetic part provides a magnetic force between the mask and a target substrate and improves an adhesion between the mask and the target substrate to prevent deposition defects.

DISPLAY APPARATUS AND, APPARATUS AND METHOD OF MANUFACTURING THE SAME
20230225156 · 2023-07-13 ·

One or more embodiments include a display apparatus including an opening, an apparatus for manufacturing the display apparatus, and a method of manufacturing the display apparatus capable of reducing generation of gas or foreign matter.

MASK AND METHOD OF MANUFACTURING THE SAME

A mask includes a first mask that includes a first long side that extends in a first direction and a first short side that extends in a second direction that crosses the first direction and that includes a first edge portion, a first center portion, and a first welded portion, that are sequentially arranged in the first direction. The mask further includes a second mask that includes a second long side that extends in the first direction and a second short side that extends in the second direction and that includes a second welded portion, a second center portion, and a second edge portion, that are sequentially arranged in the first direction. The first welded portion is in contact with the second welded portion.

Display device, mask assembly, and apparatus for manufacturing the display device
11557635 · 2023-01-17 · ·

A display device, a mask assembly, and an apparatus for manufacturing the display device are provided. The display device may reduce glare and includes sub-pixels having accurate and precise patterns. The display device including a first sub-pixel having a quadrangular shape, a second sub-pixel facing a first side of the first sub-pixel, the second sub-pixel having a quadrangular shape, and a third sub-pixel facing the first side of the first sub-pixel and spaced apart from the second sub-pixel, the third sub-pixel having a quadrangular shape, where a distance from the first side of the first sub-pixel to the second sub-pixel and a distance from the first side of the first sub-pixel to the third sub-pixel are different from each other.

MASK-INTEGRATED FRAME AND METHOD OF MANUFACTURING THE SAME
20230220534 · 2023-07-13 ·

Proposed are a mask-integrated frame and a method of manufacturing the same. The mask-integrated frame used to deposit organic light-emitting diode (OLED) pixels on a semiconductor wafer includes a frame including an opening, a grid sheet connected onto the frame, having a circular edge, and including grids provided on at least the opening of the frame, and a mask connected onto the grid sheet, having a circular shape, and including mask patterns.

Gas Bearing Plate with integrated OVJP vacuum source

Embodiments of the disclosed subject matter provide a system having at least one carrier gas source, at least one heated container that includes organic material, and a jet array print head that includes a plurality of apertures to print lines on a substrate, and that is connected to a vacuum source. The system includes a pair of gas bearing plates, with a top gas bearing plate and a bottom gas bearing plate, each having a plurality of pressure apertures and vacuum apertures. The top gas bearing plate applies a uniform force to a top surface of the substrate, and the bottom gas bearing plate applies a uniform force to a bottom surface of the substrate. The top gas bearing plate includes a slot configured for the print head to fit within. The vacuum apertures are arranged perpendicular to a direction of travel of the substrate.

Gas Bearing Plate with integrated OVJP vacuum source

Embodiments of the disclosed subject matter provide a system having at least one carrier gas source, at least one heated container that includes organic material, and a jet array print head that includes a plurality of apertures to print lines on a substrate, and that is connected to a vacuum source. The system includes a pair of gas bearing plates, with a top gas bearing plate and a bottom gas bearing plate, each having a plurality of pressure apertures and vacuum apertures. The top gas bearing plate applies a uniform force to a top surface of the substrate, and the bottom gas bearing plate applies a uniform force to a bottom surface of the substrate. The top gas bearing plate includes a slot configured for the print head to fit within. The vacuum apertures are arranged perpendicular to a direction of travel of the substrate.

DEPOSITION APPARATUS HAVING MASK ASSEMBLY AND METHOD OF REPAIRING THE MASK ASSEMBLY

A deposition apparatus includes a chamber, a mask assembly disposed in the chamber and including an open sheet including a first area in which a first deposition hole is defined and a second area in which a second deposition hole spaced apart from the first deposition hole is defined, a first mask including multiple deposition openings that overlap the first area, and a second mask including multiple deposition openings that overlap the second area, a deposition substrate disposed on the mask assembly, and a deposition source spraying a deposition material to the mask assembly.

MASK AND METHOD OF MANUFACTURING THE SAME
20230212772 · 2023-07-06 ·

A mask and a method of manufacturing the same are disclosed. The method of manufacturing a mask includes forming a conductive layer on a pattern region and an auxiliary region around the pattern region of a substrate, placing the substrate including the conductive layer in a plating bath, forming a plating layer on the conductive layer, and separating the substrate and the conductive layer from the plating layer.

POROUS DIELECTRIC MATERIAL

The current invention describes a method of manufacturing a porous dielectric material, the method comprising (a) providing a porous template, (b) coating the porous template with an inorganic dielectric material or a precursor of an inorganic dielectric material to form a coated porous template, (c) treating the coated porous template to remove the porous template and to form a porous structure of dielectric material from the coating of inorganic dielectric material or precursor of an inorganic dielectric material, and (d) combining the formed porous structure of dielectric material with a coating polymer to form the porous dielectric material. The invention also relates to RF components on a substrate material, with a conductive material deposited on a porous dielectric material.