C23C14/06

METHODS FOR PREPARING VOID-FREE COATINGS FOR PLASMA TREATMENT COMPONENTS

Methods for preparing a void-free protective coating are disclosed herein. The void-free protective coating is used on a dielectric window having a central hole, which is used in a plasma treatment tool. A first protective coating layer is applied to the window, leaving an uncoated annular retreat area around the central hole. The first protective coating layer is polished to produce a flat surface and fill in any voids on the window. A second protective coating layer is then applied upon the flat surface of the first protective coating layer to obtain the void-free coating. This increases process uptime and service lifetime of the dielectric window and the plasma treatment tool.

MULTI-LAYERED DIAMOND-LIKE CARBON COATING FOR ELECTRONIC COMPONENTS

A multi-layer coating on an outer surface of a substrate includes a first layer applied directly to the outer surface of the substrate. The first layer includes diamond-like carbon (DLC) configured to mitigate metal whisker formation. A second layer is applied on a top surface of the first layer. The second layer is a conformal coating that includes a second material configured to bind to the top surface of the first layer and fill any microfractures that may form in the first layer. Optionally, a third layer is applied on a top surface of the second layer and includes DLC configured to protect the second layer from oxidation and degradation.

OPTICAL DEVICE AND MANUFACTURING METHOD THEREFOR
20230228914 · 2023-07-20 ·

An optical device includes, in sequence, a surface formed of a metal oxide, a samarium oxide-containing layer in contact with the surface formed of a metal oxide, and a magnesium fluoride-containing layer in contact with the samarium oxide-containing layer so as to suppress optical absorption resulting from high-rate sputter deposition of a magnesium fluoride-containing layer on a surface formed of a metal oxide.

Fabrication of electrochromic devices

Electrochromic devices and methods may employ the addition of a defect-mitigating insulating layer which prevents electronically conducting layers and/or electrochromically active layers from contacting layers of the opposite polarity and creating a short circuit in regions where defects form. In some embodiments, an encapsulating layer is provided to encapsulate particles and prevent them from ejecting from the device stack and risking a short circuit when subsequent layers are deposited. The insulating layer may have an electronic resistivity of between about 1 and 10.sup.8 Ohm-cm. In some embodiments, the insulating layer contains one or more of the following metal oxides: aluminum oxide, zinc oxide, tin oxide, silicon aluminum oxide, cerium oxide, tungsten oxide, nickel tungsten oxide, and oxidized indium tin oxide. Carbides, nitrides, oxynitrides, and oxycarbides may also be used.

Fabrication of electrochromic devices

Electrochromic devices and methods may employ the addition of a defect-mitigating insulating layer which prevents electronically conducting layers and/or electrochromically active layers from contacting layers of the opposite polarity and creating a short circuit in regions where defects form. In some embodiments, an encapsulating layer is provided to encapsulate particles and prevent them from ejecting from the device stack and risking a short circuit when subsequent layers are deposited. The insulating layer may have an electronic resistivity of between about 1 and 10.sup.8 Ohm-cm. In some embodiments, the insulating layer contains one or more of the following metal oxides: aluminum oxide, zinc oxide, tin oxide, silicon aluminum oxide, cerium oxide, tungsten oxide, nickel tungsten oxide, and oxidized indium tin oxide. Carbides, nitrides, oxynitrides, and oxycarbides may also be used.

PREPARATION METHOD OF NIOBIUM DISELENIDE FILM WITH ULTRA-LOW FRICTION AND LOW ELECTRICAL NOISE UNDER SLIDING ELECTRICAL CONTACT IN VACUUM
20230227963 · 2023-07-20 ·

The present disclosure relates to a preparation method of a niobium diselenide (NbSe.sub.2) film with ultra-low friction and low electrical noise under sliding electrical contact in vacuum. The method uses a direct current (DC) closed field magnetron sputtering method for preparation. Through process design of low deposition pressure and low sputtering energy, on one hand, a purity of an NbSe.sub.2 sputtered product is kept, generation of interference phases such as NbSe.sub.3 is avoided, and electrical conductivity of the sputtered NbSe.sub.2 film is greatly improved, and on the other hand, a nanocrystalline/amorphous superlattice composite structure is formed, and excellent mechanical and lubricating properties are achieved. Under sliding electrical contact in vacuum, compared with those of a common electroplated gold coating, a friction coefficient of the film is reduced to 0.02 from 0.25, a wear life is prolonged by at least 7 times, and the electrical noise is reduced by about 50%.

Al—Cr-based ceramic coatings with increased thermal stability

The present invention relates to a method for producing a multilayer film comprising aluminum, chromium, oxygen and nitrogen, in a vacuum coating chamber, the multilayer film comprising layers of type A and layers of type B deposited alternate one of each other, wherein during deposition of the multilayer film at least one target comprising aluminum and chromium is operated as cathode by means of a PVD technique and used in this manner as material source for supplying aluminum and chromium, and an oxygen gas flow and a nitrogen gas flow are introduced as reactive gases in the vacuum chamber for reacting with aluminum and chromium, thereby supplying oxygen and nitrogen for forming the multilayer film, characterized in that: —The A layers are deposited as oxynitride layers of Al—Cr—O—N by using nitrogen and oxygen as reactive gas at the same time, —The B layers are deposited as nitride layers of Al—Cr—N by reducing the oxygen gas flow and by increasing the nitrogen gas flow in order to use only nitrogen as reactive gas for the formation of the Al—Cr—N layer, and wherein the relation between oxygen content and nitrogen content in the multilayer film correspond to a ratio in atomic percentage having a value between and including 1.8 and 4.

Razor blade and manufacturing method thereof
11559913 · 2023-01-24 · ·

The present disclosure provides an improvement to razor blade coating by a physical vapor deposition method, by forming a hard coating layer as a thin coating layer in which chromium boride, which is a nanocrystalline structure having high hardness, is dispersed in an amorphous mixture of chromium and boron, thereby improving the strength and hardness of the thin coating layer and securing the bonding force by chromium in the amorphous mixture between the hard coating layer and a blade substrate on which an edge of the razor blade is formed.

METHOD FOR MANUFACTURING REAL ALUMINUM USING ALUMINUM ALLOY CAPABLE OF BEING APPLIED TO COIL-TO-UNCOIL PROCESS, AND VEHICLE INTERIOR PART
20230226988 · 2023-07-20 ·

A method for manufacturing an aluminum alloy sheet may include melting aluminum alloy composition containing silicon (Si), iron (Fe), copper (Cu) and manganese (Mn) in weight% on the basis of remainder of aluminum (Al) to make cast alloy having a constant initial thickness; rolling the cast alloy to allow the initial thickness to be reduced, whereby the cast alloy is elongated to aluminum alloy sheet; and performing heat treatment on the aluminum alloy sheet.

Sliding member

Disclosed herein is a sliding member having an alloy overlay layer that comes into sliding contact with a counterpart member thereof and has improved fatigue resistance. The sliding member comprises a base material layer and an alloy overlay layer formed on the base material layer, in which the alloy overlay layer has a soft metal phase made of tin and precipitated in a metallic matrix phase made of aluminum, and when an average aspect ratio of the soft metal phase is defined as A, and its standard deviation is defined as Aσ, A+Aσ is 3.0 or less. In this case, the soft metal phase has a shape close to a sphere without elongating in a certain direction.