Patent classifications
C30B15/36
Apparatus and method for growth of gallium oxide crystal with an offcut
Apparatuses and methods as described herein can be used to grow a Ga.sub.2O.sub.3 based single crystal using an Edge-defined film fed growth (EFG) method. The single gallium oxide crystal sheet can have a principal plane is offcut from a (100) crystallographic orientation. In one embodiment, the offcut is between 2 and 20 degrees. The single crystal can have a full width half mass of less than 50 arcsec.
Apparatus and method for growth of gallium oxide crystal with an offcut
Apparatuses and methods as described herein can be used to grow a Ga.sub.2O.sub.3 based single crystal using an Edge-defined film fed growth (EFG) method. The single gallium oxide crystal sheet can have a principal plane is offcut from a (100) crystallographic orientation. In one embodiment, the offcut is between 2 and 20 degrees. The single crystal can have a full width half mass of less than 50 arcsec.