A flow sensing ozone converter includes an inlet housing, an outlet housing, and a central housing. The inlet housing defines a first pressure port. The outlet housing defines a second pressure port. The central housing extends between a second end of the inlet housing and a first end of the outlet housing.

A variable 3D CD nozzle includes: a flexible body defining a flow path having an inlet extending through a narrowed throat to an expanded outlet, wherein the flexible body comprises a plurality of flexible members movably interconnected together; and at least one means for changing a shape of the flexible body to change a dimension or location of the throat plane relative to at least one of the inlet plane or outlet plane. A method of changing airflow in a nozzle includes operating at least one means for changing the shape of the flexible nozzle body to change the dimension or the location of the throat plane. A method of testing an object includes placing a test object in the test region of the test cell and passing a test gas from the outlet opening of the nozzle onto the test object.

A treatment apparatus and a treatment method using reactive oxygen, wherein, the treatment apparatus comprising: the reactive oxygen supply device comprises a plasma actuator and an ozone decomposing device inside a housing having at least one opening portion, the plasma actuator comprises a first electrode and a second electrode across a dielectric material and generates an induced flow containing ozone when a voltage is applied between the both electrodes, the plasma actuator and the ozone decomposing device are arranged such that the induced flow flows out from the opening portion and the induced flow is supplied to a surface of the object which is conveyed by the conveying means, and an outflow direction vector of the induced flow has a vector component x which is parallel to and oriented in the same direction as specific direction B.

A treatment apparatus and a treatment method using reactive oxygen, wherein, the treatment apparatus comprising: the reactive oxygen supply device comprises a plasma actuator and an ozone decomposing device inside a housing having at least one opening portion, the plasma actuator comprises a first electrode and a second electrode across a dielectric material and generates an induced flow containing ozone when a voltage is applied between the both electrodes, the plasma actuator and the ozone decomposing device are arranged such that the induced flow flows out from the opening portion and the induced flow is supplied to a surface of the object which is conveyed by the conveying means, and an outflow direction vector of the induced flow has a vector component x which is parallel to and oriented in the same direction as specific direction A.

Provided is a gas treatment apparatus comprising an active oxygen supply device and a gas flow path, wherein the gas treatment apparatus is characterized in that the active oxygen supply device includes a housing having at least one opening, and a predetermined plasma actuator and a predetermined ozone decomposition device inside the housing, the plasma actuator and the ozone decomposition device are disposed so that an induced flow containing active oxygen flows out of the housing through the opening, and the active oxygen supply device is disposed so as to allow the induced flow containing the active oxygen flowing out through the opening to be introduced into the gas flow path.

An active oxygen supply device comprising: a housing; a plasma actuator disposed inside the housing; and an ozone decomposing device, wherein the plasma actuator comprises a first electrode, a dielectric material, and a second electrode, the first electrode is an exposed electrode provided on a first surface, which is one surface of the dielectric material, the plasma actuator generates an induced flow containing ozone to be blown out from the first electrode in a first direction, which is one direction along the surface of the dielectric material, the ozone decomposing device decomposes the ozone contained in the induced flow to generate active oxygen, an edge portion of the second electrode leading in a second direction reverse to the first direction is provided with a protruded portion, and overlap the first electrode only in the protruded portion, and the protruded portion has a width constant in the second direction.

An active oxygen supply device equipped with a cylindrical housing having a first opening and a second opening opposite to the first opening, a plasma actuator arranged in the housing, and an ozone decomposition device, in which the plasma actuator causes dielectric barrier discharge to blow out an induction flow, the plasma actuator is arranged such that the blow direction of the induction flow faces the second opening, an air flow that flows from the first opening to the second opening is generated in the housing by the action of the induction flow, the ozone decomposition device decomposes the ozone contained in the air flow to generate active oxygen in the air flow, and the plasma actuator and the ozone decomposition device are arranged such that the air flow containing the active oxygen can flow out to the exterior of the active oxygen supply device through the second opening.

This reactive oxygen supply apparatus is characterized by comprising a humidification device, a housing having at least one opening, and a predetermined plasma actuator in the opening, and is characterized in that the humidification device humidifies the inside of the housing and generates reactive oxygen in the induced flow, so that the induced flow contains the reactive oxygen, and the plasma actuator and the humidification device are disposed such that the induced flow containing the reactive oxygen flows out of the housing through the opening.

A device for generating oxygen comprising at least one reaction chamber for housing a composition for generating oxygen, the composition comprising a combination of constituents consisting of at least one oxygen source, at least one ionic liquid, and at least one metal oxide compound, means for maintaining at least one of the oxygen source, the ionic liquid and the metal oxide compound physically separated from the remaining constituents, means for establishing physical contact of the oxygen source, the ionic liquid and the metal oxide compound, and means for allowing oxygen to exit the reaction chamber, wherein the metal oxide compound is an oxide of a single metal or of two or more different metals, said metal(s) being selected from the metals of groups 2 to 14 of the periodic table of the elements, and wherein the oxygen source comprises a peroxide compound.

The present invention relates to a composition for generating oxygen, comprising at least one oxygen source selected from chlorates and perchlorates, to an oxygen generator comprising such a composition, and a method for generating oxygen by decomposing such a composition. The present invention further relates to the use of transition metal ortho-phosphate compounds ortho-vanadate compounds and mixed ortho-phosphate-vanadate compounds as multifunctional components in the oxygen generating compositions.