Disclosed is a production device and production method of an electronic grade hydrogen peroxide aqueous solution. An industrial grade hydrogen peroxide is subjected to rectification, reverse osmosis, ion exchange, and finally filtered through an ultrafiltration membrane, and an electronic grade hydrogen peroxide aqueous solution is obtained. Through the above-mentioned integrated design, the disclosure overcomes the problems of small yield and low purity in the prior art, and the method for producing electronic grade hydrogen peroxide has low energy consumption, low cost and high profit, and is suitable for continuous mass production.

Disclosed is a production device and production method of an electronic grade hydrogen peroxide aqueous solution. An industrial grade hydrogen peroxide is subjected to rectification, reverse osmosis, ion exchange, and finally filtered through an ultrafiltration membrane, and an electronic grade hydrogen peroxide aqueous solution is obtained. Through the above-mentioned integrated design, the disclosure overcomes the problems of small yield and low purity in the prior art, and the method for producing electronic grade hydrogen peroxide has low energy consumption, low cost and high profit, and is suitable for continuous mass production.

A method of removing hydrogen peroxide from sulfuric acid includes pouring sulfuric acid (H.sub.2SO.sub.4) having 0.1% to 10% of hydrogen peroxide (H.sub.2O.sub.2) into a vessel; adding a catalyst containing metal or metal compound to the vessel to undergo a reaction with the sulfuric acid (H.sub.2SO.sub.4) to remove hydrogen peroxide (H.sub.2O.sub.2) from the sulfuric acid (H.sub.2SO.sub.4), to generate heat, and to generate metal ions in the sulfuric acid (H.sub.2SO.sub.4); activating a cooling device to cool the vessel to a predetermined temperature range; adding sulfur (S.sup.2) to the vessel to undergo a reaction with the metal ions to generate metallic sulfide; and purifying the metal free sulfuric acid (H.sub.2SO.sub.4) to obtain the metallic sulfide and highly purified, diluted sulfuric acid (H.sub.2SO.sub.4) as products.

A method of removing hydrogen peroxide from sulfuric acid includes pouring sulfuric acid (H.sub.2SO.sub.4) having 0.1% to 10% of hydrogen peroxide (H.sub.2O.sub.2) into a vessel; adding a catalyst containing metal or metal compound to the vessel to undergo a reaction with the sulfuric acid (H.sub.2SO.sub.4) to remove hydrogen peroxide (H.sub.2O.sub.2) from the sulfuric acid (H.sub.2SO.sub.4), to generate heat, and to generate metal ions in the sulfuric acid (H.sub.2SO.sub.4); activating a cooling device to cool the vessel to a predetermined temperature range; adding sulfur (S.sup.2) to the vessel to undergo a reaction with the metal ions to generate metallic sulfide; and purifying the metal free sulfuric acid (H.sub.2SO.sub.4) to obtain the metallic sulfide and highly purified, diluted sulfuric acid (H.sub.2SO.sub.4) as products.

A hydrogen peroxide purification process, including supplying a starting stream containing hydrogen peroxide at a content above 50 wt %, as well as at least one stabilizer; a single step of purification of the starting stream, the single step having purification by reverse osmosis; collecting a purified stream at the end of said single purification step, in which purification by reverse osmosis includes: passing the starting stream over a first membrane; collecting a permeate and a retentate from the first membrane; passing the permeate from the first membrane over a second membrane; collecting a permeate and a retentate from the second membrane, the purified stream having the permeate from the second membrane.

A hydrogen peroxide purification process, including supplying a starting stream containing hydrogen peroxide at a content above 50 wt %, as well as at least one stabilizer; a single step of purification of the starting stream, the single step having purification by reverse osmosis; collecting a purified stream at the end of said single purification step, in which purification by reverse osmosis includes: passing the starting stream over a first membrane; collecting a permeate and a retentate from the first membrane; passing the permeate from the first membrane over a second membrane; collecting a permeate and a retentate from the second membrane, the purified stream having the permeate from the second membrane.

Provided herein are methods, systems, and apparatus for inhibiting decomposition of hydrogen peroxide gas through use of surface modification of production and delivery components.

Provided herein are methods, systems, and apparatus for inhibiting decomposition of hydrogen peroxide gas through use of surface modification of production and delivery components.

A purification method for an aqueous hydrogen peroxide solution includes subjecting the aqueous hydrogen peroxide solution to a reverse osmosis membrane separation treatment with a high-pressure reverse osmosis membrane separation device. The high-pressure reverse osmosis membrane has a denser skin layer on the membrane surface and is therefore lower in an amount of membrane permeate water per unit operating pressure but higher in the rejection rate of TOC and boron, as compared with a low-pressure or ultralow-pressure reverse osmosis membrane. The high-pressure reverse osmosis membrane permeate water is preferably further subjected to an ion exchange treatment with an ion exchange device including two or more columns packed with gel-type strong ion exchange resins.

A purification method for an aqueous hydrogen peroxide solution includes subjecting the aqueous hydrogen peroxide solution to a reverse osmosis membrane separation treatment with a high-pressure reverse osmosis membrane separation device. The high-pressure reverse osmosis membrane has a denser skin layer on the membrane surface and is therefore lower in an amount of membrane permeate water per unit operating pressure but higher in the rejection rate of TOC and boron, as compared with a low-pressure or ultralow-pressure reverse osmosis membrane. The high-pressure reverse osmosis membrane permeate water is preferably further subjected to an ion exchange treatment with an ion exchange device including two or more columns packed with gel-type strong ion exchange resins.