A method for preparing a photomask blank comprising a transparent substrate and a chromium-containing film contiguous thereto involves the step of depositing the chromium-containing film by sputtering a metallic chromium target having an Ag content of up to 1 ppm. When a photomask prepared from the photomask blank is repeatedly used in patternwise exposure to ArF excimer laser radiation, the number of defects formed on the photomask is minimized.

The present disclosure provides an anatase-type niobium oxynitride having an anatase-type crystal structure and represented by the chemical formula NbON. The present disclosure also provides a semiconductor structure (100) including: a substrate (110) having at least one principal surface composed of a perovskite-type compound having a perovskite-type crystal structure; and a niobium oxynitride (for example, an anatase-type niobium oxynitride film (120)) grown on the one principal surface of the substrate (110), the niobium oxynitride having an anatase-type crystal structure and being represented by the chemical formula NbON.

The present disclosure provides a rutile-type niobium oxynitride having a rutile-type crystal structure and represented by the chemical formula NbON. The present disclosure also provides a semiconductor structure (100) including: a substrate (110) having at least one principal surface composed of a rutile-type compound having a rutile-type crystal structure; and a niobium oxynitride (for example, a rutile-type niobium oxynitride film (120)) grown on the one principal surface of the substrate (110), the niobium oxynitride having a rutile-type crystal structure and being represented by the chemical formula NbON.

To provide a sintered material having excellent oxidation resistance, as well as excellent abrasion resistance and chipping resistance. A sintered material containing a first compound formed of Ti, Al, Si, O, and N is provided.

Provided are a fluorescent material including a high light emission intensity and a light emitting device using the same. The present fluorescent material includes at least an A element, a M element, a D element, a E element, and an X element, wherein the A element is at least one element selected from the group consisting of Sr, Mg, Ca, and Ba; the M element is at least one element selected from the group consisting of Eu, Mn, Ce, Pr, Nd, Sm, Tb, Dy, and Yb; the D element is at least one element selected from the group consisting of Si, Ge, Sn, Ti, Zr, and Hf, the E element is at least one element selected from the group consisting of Al, B, Ga, In, Sc, Y, and La; the X element is at least one element selected from the group consisting of O, N, and F; and a molar ratio of the M element to the sum of the A element and the M element [M/(A+M)] is 0.06 or less.

Provided is a novel polyoxometalate and a method for producing the polyoxometalate. The polyoxometalate is represented by the compositional formula: M.sub.xO.sub.y in which M is tungsten, molybdenum or vanadium; 4x1000; and 2.5y/x7.

Provided are a macroporous titanium compound monolith and a production method thereof, the macroporous titanium compound monolith having a framework that is composed of a titanium compound other than titanium dioxide, having controlled macropores, and having electron conductivity, the titanium compound being oxygen-deficient titanium oxide, titanium oxynitride, or titanium nitride. Provided is a method including: placing a macroporous titanium dioxide monolith and a metal having titanium-reducing ability in a container, the macroporous titanium dioxide monolith having a co-continuous structure of a macropore and a framework that is composed of titanium dioxide; creating a vacuum atmosphere or an inert gas atmosphere within the container; and heating the monolith and the metal to cause gas-phase reduction that removes oxygen atom from the titanium dioxide composing the monolith by the metal acting as an oxygen getter, thereby obtaining a macroporous oxygen-deficient titanium oxide monolith having a co-continuous structure of the macropore and a framework that is composed of oxygen-deficient titanium oxide, the macroporous oxygen-deficient titanium oxide monolith having electron conductivity derived from the oxygen-deficient titanium oxide.

There are provided a phosphor which is a divalent europium-activated oxynitride phosphor substantially represented by General formula (A): Eu.sub.aSi.sub.bAl.sub.cO.sub.dN.sub.e, a divalent europium-activated oxynitride phosphor substantially represented by General formula (B): MI.sub.fEu.sub.gSi.sub.hAl.sub.kO.sub.mN.sub.n or a divalent europium-activated nitride phosphor substantially represented by General formula (C): (MII.sub.1pEu.sub.p)MIIISiN.sub.3, having a reflectance of light emission in a longer wavelength region of visible light than a peak wavelength of 95% or larger, and a method of producing such phosphor; a nitride phosphor and an oxynitride phosphor which emit light efficiently and stably by the light having a wavelength ranging from 430 to 480 nm from a semiconductor light emitting device by means of a light emitting apparatus using such phosphor, and a producing method of such phosphor; and a light emitting apparatus having stable characteristics and realizing high efficiency.

There are provided a phosphor which is a divalent europium-activated oxynitride phosphor substantially represented by General formula (A): Eu.sub.aSi.sub.bAl.sub.cO.sub.dN.sub.e, a divalent europium-activated oxynitride phosphor substantially represented by General formula (B): MI.sub.fEu.sub.gSi.sub.hAl.sub.kO.sub.mN.sub.n or a divalent europium-activated nitride phosphor substantially represented by General formula (C): (MII.sub.1-pEu.sub.p)MIIISiN.sub.3, having a reflectance of light emission in a longer wavelength region of visible light than a peak wavelength of 95% or larger, and a method of producing such phosphor; a nitride phosphor and an oxynitride phosphor which emit light efficiently and stably by the light having a wavelength ranging from 430 to 480 nm from a semiconductor light emitting device by means of a light emitting apparatus using such phosphor, and a producing method of such phosphor; and a light emitting apparatus having stable characteristics and realizing high efficiency.

A lithium ion conductor includes a compound of Formula 1:
Li.sub.7a*(b4)*xM.sup.a.sub.La.sub.3Zr.sub.2M.sup.b.sub.O.sub.12xX.sub.xN.sub.Formula 1 wherein in Formula 1, M.sup.a is a cationic element having a valence of a, M.sup.b is a cationic element having a valence of b, and X is an anion having a valence of 1, wherein, when M.sup.a comprises H, 05, otherwise 00.75, and wherein 01.5, 0x1.5, (a*+(b4)+x)>0, and 0<6.