A SiH-free vinyldisilane compound, which is free of (lacks) a silicon-bonded hydrogen atom. The use of the SiH-free vinyldisilane compound, or a collection of such compounds, as a starting material or precursor for synthesizing or making silicon-heteroatom compounds. The silicon-heteroatom compounds synthesized therefrom; films of and devices containing the silicon-heteroatom compounds; methods of making the SiH-free vinyldisilane compound, silicon-heteroatom compounds, films, and devices; and uses of the SiH-free vinyldisilanes, silicon-heteroatom compounds, films, and devices.

This disclosure is to make it possible to easily stabilize a chlorosilane polymer while preventing a solid chlorosilane polymer from being generated. Disclosed is a method for stabilizing a chlorosilane polymer generated secondarily in a step of a chemical vapor deposition method using chlorosilane-based gas, the method including: a step of bringing alcohol into contact with the chlorosilane polymer, degrading the chlorosilane polymer to alkoxide, hydrogen chloride and hydrogen, and diluting the degraded alkoxide with the alcohol; and a step of performing hydrolysis for the alkoxide.

This disclosure is to make it possible to easily stabilize a chlorosilane polymer while preventing a solid chlorosilane polymer from being generated. Disclosed is a method for stabilizing a chlorosilane polymer generated secondarily in a step of a chemical vapor deposition method using chlorosilane-based gas, the method including: a step of bringing alcohol into contact with the chlorosilane polymer, degrading the chlorosilane polymer to alkoxide, hydrogen chloride and hydrogen, and diluting the degraded alkoxide with the alcohol; and a step of performing hydrolysis for the alkoxide.

A column includes a column head, a column sump and a tube-shaped column shell disposed therebetween, two or more reaction zones lying above each other which each accommodate a catalyst bed, in which catalyst beds chlorosilanes disproportionate into low-boiling silanes, which form an ascending stream of gas, and also into high-boiling silanes which form a downwardly directed stream of liquid, within the column shell and along the column axis, two or more rectificative separation zones, the reaction zones and the separation zones alternate along the column axis, the separation zones are configured such that the stream of gas and the stream of liquid meet in the separation zones, and the reaction zones are configured such that the downwardly directed stream of liquid is led through the catalyst beds, whereas the upwardly directed stream of gas passes the catalyst beds in spatial separation from the stream of liquid.

Methods of synthesizing SiH containing iodosilanes, such as diiodosilane or pentaiododisilane, using a halide exchange reaction are disclosed.

Methods of synthesizing SiH containing iodosilanes, such as diiodosilane or pentaiododisilane, using a halide exchange reaction are disclosed.

A process for removing metallic impurities from halogenated silicon compounds, such as chlorosilane monomers and/or chlorinated polysilanes is disclosed. The process involves treating a halogenated silicon compound with a tertiary amine and thereafter a suitable grade of activated carbon.

Realized is a solid substance concentration managing method which allows quick detection of an abnormality in a chemical reactor. The present invention is an invention of a solid substance concentration managing method of managing a concentration of a solid substance which is contained in a residue that is discharged in a reaction product gas processing step included in a trichlorosilane producing method, the solid substance concentration managing method including a concentration measuring step of measuring the concentration of the solid substance which is contained in an after-crystallization residue that is obtained by crystallizing part of aluminum chloride.

Realized is a solid substance concentration managing method which allows quick detection of an abnormality in a chemical reactor. The present invention is an invention of a solid substance concentration managing method of managing a concentration of a solid substance which is contained in a residue that is discharged in a reaction product gas processing step included in a trichlorosilane producing method, the solid substance concentration managing method including a concentration measuring step of measuring the concentration of the solid substance which is contained in an after-crystallization residue that is obtained by crystallizing part of aluminum chloride.

Realized is a residue disposal method which makes it possible to efficiently dispose of a residue without causing blockage in a pipe and possible to recover a chlorosilane compound at a higher recovery rate. The present invention is an invention of a residue disposal method of disposing of a residue which is discharged in a reaction product gas processing step included in a trichlorosilane producing method, the residue disposal method including (i) drying the residue so that the residue contains a chlorosilane compound in an amount of not more than 10% by mass and (ii) obtaining a powdered residue.