Processing water regeneration equipment includes a waste liquid treatment apparatus that treats waste liquid discharged from a processing apparatus for processing a workpiece by use of processing water, and a fuel cell apparatus that causes a chemical reaction between hydrogen and oxygen to produce electricity and water. The waste liquid treatment apparatus includes a positive electrode and a negative electrode disposed in a tank for reserving the waste liquid, and a hydrogen production unit that supplies electric power to the positive electrode and the negative electrode to produce hydrogen. The fuel cell apparatus causes a chemical reaction between the hydrogen produced by the hydrogen production unit and oxygen in the air to produce electricity and water, and the electricity and water thus produced are utilized in the processing apparatus.

Disclosed are wastewater treatment systems and methods for semiconductor fabrication process. The method comprises performing first concentration on wastewater discharged from a semiconductor process chamber, and performing second concentration on concentrated wastewater or at least a portion of the wastewater concentrated by the first concentration. The step of performing the first concentration includes performing in a first electrodialysis apparatus an ion exchange between the wastewater and first treatment water. The step of performing the second concentration includes allowing the concentrated wastewater to circulate in a second electrodialysis apparatus, allowing second treatment water to circulate in the second electrodialysis apparatus, providing a power to an anode and a cathode of the second electrodialysis apparatus to perform an ion exchange between the second treatment water and the concentrated wastewater, and joining a portion of the concentrated wastewater to the second treatment water.

A method and system is provided for treating waste generated from manufacturing operations including at least one of Printed Circuit Boards Fabrication (PCB FAB), General Metal Finishing (GMF), semiconductors manufacturing, chemical milling, and Physical Vapour Deposition (PVD). The method and system are used to create zero liquid discharge recycling.

A waste liquid treating device includes a holding section that holds an adhesion plate, a vertically moving mechanism that moves the holding section vertically, and a peeling mechanism that peels off water-containing swarf from the adhesion plate held by the holding section. The peeling mechanism includes two air nozzles extending in parallel to each other in a horizontal direction with a spacing therebetween and including jet ports formed to face each other, a valve disposed in a piping providing communication between the two air nozzles and an air source, and a control unit that performs control of opening and closing of the valve and control of the vertically moving mechanism for moving the adhesion plate in the vertical direction in the spacing between the two air nozzles.

Provided are porous polymeric filter membranes comprising a polymer having admixed therein at least one carbonaceous material. The membranes are capable of removing trace amounts of various impurities from a liquid composition, including metal ions, acids, bases, and organic contaminants.

Described are filter materials including a polyol ligand, such as n-methylglucamine, and/or a polyphosphonic acid ligand, which are highly effective for filtering metals or metal ions from fluids. The filter materials can be particularly useful to filter basic and acidic fluid compositions, such as those used for wet etching, removing photoresist, and cleaning steps in microelectronic device manufacturing.

A device for selectively removing a perfluorinated compound may include an adsorption electrooxidation tank including a reaction unit having a plurality of electrodes and granular activated carbon configured to oxidize and decompose a perfluorinated compound in raw water through adsorption and electrooxidation, a power supply device configured to supply power to the adsorption electrooxidation tank, and a head adjustment pipe unit configured to maintain a water level within the reaction unit at a height greater than or equal to a reaction height of the electrode.

A digital twin model based operation and optimization of a reverse osmosis plant uses a data processing system to receive data for a reverse osmosis membrane in a plant that with a plurality of assets. The data processing system can determine a level of performance of the membrane based on the data for the membrane input into a model generated with sa topology indicative of one or more relationships and a flow path between the plurality of assets, predict, based on the model and responsive to the level of performance input into an optimization function for the plant, a time at which the level of performance degrades below a threshold, and provide an indication of the time at which the level of performance degrades below the threshold predicted using the optimization function to cause servicing of the membrane used to process the fluid at the plant.

The present invention relates to a method for recovering a rare metal salt, the method including: an acid treatment step of obtaining a rare metal-containing acidic aqueous solution by bringing a material including a monovalent rare metal and a polyvalent rare metal into contact with an acidic aqueous solution; a separation step of obtaining permeated water including the monovalent rare metal and non-permeated water including the polyvalent rare metal from the rare metal-containing acidic aqueous solution by using a nanofiltration membrane satisfying the condition (1); and a concentration step of obtaining non-permeated water having a higher concentration of the monovalent rare metal and permeated water having a lower concentration of the monovalent rare metal than that of the permeated water in the separation step, by using a reverse osmosis membrane.

The present invention provides a catalyst for hydrogen peroxide decomposition with which hydrogen peroxide present in acid-containing water to be treated can be efficiently decomposed at low cost and which is less apt to dissolve away in the water being treated, can be stably used over a long period, and renders acid recovery and recycling possible. The present invention has solved the problems with a catalyst for hydrogen peroxide decomposition which is for use in decomposing hydrogen peroxide present in acid-containing water to be treated, the catalyst including a base and, a catalyst layer that is amorphous, includes a platinum-group metal having catalytic function and a Group-6 element metal having catalytic function and is formed over the base.