A method for manufacturing a glass preform includes transporting a liquid-form raw material compound including an organic silicon compound by pressurizing the raw material compound using a pressurization gas, deaerating a dissolved gas from the pressurized raw material compound, controlling a flow rate of the deaerated raw material compound using a mass flow controller, gasifying the raw material compound transported through the mass flow controller, and combusting the gasified raw material compound using a burner to generate SiO.sub.2.

One aspect relates to a process for the provision of a quartz glass body, including providing a silicon dioxide granulate, making a glass melt from the silicon dioxide granulate in an oven and making a quartz glass body from at least part of the glass melt. The oven includes a hanging metal sheet crucible. One aspect also relates to a quartz glass body which is obtainable by this process. One aspect further relates to a light guide, an illuminant and a formed body which are obtainable by processing the quartz glass body further.

In a method of manufacturing porous glass base for optical fiber, a liquid organic siloxane raw material stored in a raw material tank of internal pressure P1 is controlled by a mass flow controller at a predetermined flow rate and pumped through pipe of internal pressure P2 to a vaporizer, the liquid raw material is vaporized in the vaporizer and supplied as a gas raw material to a burner, and the silica fine particles formed by burning the gas raw material in the burner are deposited to form a porous glass base material, where P1?P2 is satisfied.

The present invention provides a process for fabrication of ytterbium (Yb) doped optical fiber through vapor phase doping technique. The method comprises deposition of Al2O3 and Yb2O3 in vapor phase simultaneously in combination with silica during formation of sintered core layer. This is followed by collapsing at a high temperature in stepwise manner to produce the preform and drawing of fibers of appropriate dimension. The process parameters have been optimized in such a way that Al and Yb-chelate compounds can be transported to the reaction zone without decomposition and condensation of precursor materials. Thus variations of dopants concentration along the length of the preform have been minimized to <1% and good repeatability of the process has also been achieved. The resulting fibers also have smooth core-clad boundary devoid of any star-like defect. The process can be reliably adopted for fabrication of large core Yb doped optical fibers. The fibers also show low loss, negligible center dip and good optical properties suitable for their application as fiber lasers.

A method for producing synthetic fused quartz is provided. The method includes evaporating a feedstock material which contains at least one polymerizable polyalkylsiloxane compound, and supplying the feedstock material vapor to a reaction zone, wherein the feedstock material vapor is converted by oxidation and/or by hydrolysis into SiO.sub.2 particles. The feedstock material vapor is passed through a membrane filter as a cleaning device to reduce the formation of gel, which is typically associated with the production of synthetic fused quartz.

Provided is a manufacturing apparatus for manufacturing a soot deposition body, including a main burner that deposits glass microparticles on a target rod while moving parallel to a longitudinal direction of the target rod; and a side burner that is positioned outside of a movement range of the main burner in a movement direction of the main burner, and fires an end portion of the soot deposition body formed on the target rod. The side burner includes a plurality of heating burners arranged distanced from each other in a circumferential direction of the target rod. In the manufacturing apparatus described above, the main burner may include a plurality of deposition burners that are arranged distanced from each other in the circumferential direction of the target rod.

In the method for manufacturing a glass-fine-particle-deposited body according to the present invention, at least a part of a gas supplying pipe 25 from a temperature controlled booth 24 to a burner 18 for cladding is temperature-controlled so that the temperature at the burner side becomes high and temperature gradient becomes 5 C./m or more. The temperature control is performed so that the temperature gradient becomes preferably 15 C./m or more, more preferably 25 C./m or more. Specifically, the part is controlled to the predetermined temperature gradient by winding a tape heater 26 that is a heating element on the outer circumference of the gas supplying pipe 25 from the temperature controlled booth 24 to the burner 18 for cladding and temperature-controlling the tape heater 26.

In the method for manufacturing a glass-fine-particle-deposited body according to the present invention, at least a part of a gas supplying pipe 25 from a temperature controlled booth 24 to a burner 18 for cladding is temperature-controlled so that the temperature at the burner side becomes high and temperature gradient becomes 5 C./m or more. The temperature control is performed so that the temperature gradient becomes preferably 15 C./m or more, more preferably 25 C./m or more. Specifically, the part is controlled to the predetermined temperature gradient by winding a tape heater 26 that is a heating element on the outer circumference of the gas supplying pipe 25 from the temperature controlled booth 24 to the burner 18 for cladding and temperature-controlling the tape heater 26.

Titania-doped quartz glass is manufactured by mixing a silicon-providing reactant gas and a titanium-providing reactant gas, preheating the reactant gas mixture at 200-400 C., and subjecting the mixture to oxidation or flame hydrolysis. A substrate of the glass is free of concave defects having a volume of at least 30,000 nm.sup.3 in an effective region of the EUV light-reflecting surface and is suited for use in the EUV lithography.

A soot glass deposit body is manufactured by placing a starting rod and a burner 22 for producing glass particulates in a reaction container, introducing a source material gas to the burner 22 through a supplying pipe 26, producing glass particulates by a pyrolytic oxidation reaction of the source material gas in a flame formed by the burner 22, and depositing the produced glass particulates on the starting rod. At the time, the source material gas to be supplied to the burner 22 is a siloxane, the burner 22 is heated so that temperature of the burner 22 falls within the range of from 30 C. to +30 C. relative to the boiling point of the siloxane, and also temperature of the supplying pipe is controlled within the range of from the boiling point of the siloxane to the boiling point plus 30 C.