A wafer including a glass substrate is provided. The glass substrate includes a first surface defining a plane and including a surface roughness R.sub.a of approximately 0.3 nm in an outer via region and a second surface. The glass substrate defines a plurality of vias extending from the first surface. The plurality of vias each include an entrance defined by the first surface.

A wafer including a glass substrate is provided. The glass substrate includes a first surface defining a plane and including a surface roughness R.sub.a of approximately 0.3 nm in an outer via region and a second surface. The glass substrate defines a plurality of vias extending from the first surface. The plurality of vias each include an entrance defined by the first surface.

The present application provides a method for recovering and reusing quartz powder waste in an out-of-tube deposition process. The quartz powder recovered by this method meets the optical performance requirements for the preparation of an optical fiber preform rod having a functional cladding, reduces the production cost, and solves the problem of environmental pollution. Also, the present invention further provides a method for preparing an optical fiber preform rod by using the recovered quartz powder. The method reduces and simplifies the difficulty in the manufacturing of a core rod of a preform rod, and simplifies the difficulty in the manufacturing of some preform rods of special structures.

A method for manufacturing an SiO.sub.2—TiO.sub.2 based glass upon a target by a direct method, includes a first process of preheating the target and a second process of growing an SiO.sub.2—TiO.sub.2 based glass ingot to a predetermined length upon the target which has been preheated, wherein the target is heated in the first process such that, in the second process, the temperature of growing surface of the glass ingot is maintained at or above a predetermined lower limit temperature.

A method for manufacturing an SiO.sub.2—TiO.sub.2 based glass upon a target by a direct method, includes a first process of preheating the target and a second process of growing an SiO.sub.2—TiO.sub.2 based glass ingot to a predetermined length upon the target which has been preheated, wherein the target is heated in the first process such that, in the second process, the temperature of growing surface of the glass ingot is maintained at or above a predetermined lower limit temperature.

A co-doped optical fiber is provided having an attenuation of less than about 0.17 dB/km at a wavelength of 1550 nm. The fiber includes a core region in the fiber having a graded refractive index profile with an alpha of greater than 5. The fiber also includes a first cladding region in the fiber that surrounds the core region. Further, the core region has an relative refractive index of about −0.10% to about +0.05% compared to pure silica. In addition, the core region includes silica that is co-doped with chlorine at about 1.2% or greater by weight and fluorine between about 0.1% and about 1% by weight.

A co-doped optical fiber is provided having an attenuation of less than about 0.17 dB/km at a wavelength of 1550 nm. The fiber includes a core region in the fiber having a graded refractive index profile with an alpha of greater than 5. The fiber also includes a first cladding region in the fiber that surrounds the core region. Further, the core region has an relative refractive index of about −0.10% to about +0.05% compared to pure silica. In addition, the core region includes silica that is co-doped with chlorine at about 1.2% or greater by weight and fluorine between about 0.1% and about 1% by weight.

One of embodiments relates to an optical fiber in which an alkali metal element is efficiently doped to its core to suppress transmission loss from increasing. A mean concentration or a concentration distribution of the alkali metal element is adjusted such that 0.48 or less is obtained as an weighted value obtained by weighting a distribution of field intensity of guided light at a wavelength of 1550 nm, with respect to a radial direction distribution of a ratio I.sub.D2/I.sub.ω3 of an intensity I.sub.D2 of Raman scattering light by a silica three-membered ring structure and an intensity I.sub.ω3 of Raman scattering light by a Si—O stretching vibration, in a cross-sectional region having a diameter of 20 μm.

One of embodiments relates to an optical fiber in which an alkali metal element is efficiently doped to its core to suppress transmission loss from increasing. A mean concentration or a concentration distribution of the alkali metal element is adjusted such that 0.48 or less is obtained as an weighted value obtained by weighting a distribution of field intensity of guided light at a wavelength of 1550 nm, with respect to a radial direction distribution of a ratio I.sub.D2/I.sub.ω3 of an intensity I.sub.D2 of Raman scattering light by a silica three-membered ring structure and an intensity I.sub.ω3 of Raman scattering light by a Si—O stretching vibration, in a cross-sectional region having a diameter of 20 μm.

A method for producing titanium-doped synthetic quartz glass includes: (A) providing a liquid SiO.sub.2 feedstock material that comprises more than 60% by weight of the polyalkylsiloxane D4; (B) evaporating the liquid SiO.sub.2 feedstock material to produce a gaseous SiO.sub.2 feedstock vapor; (C) evaporating a liquid TiO2 feedstock material to produce a gaseous TiO2 feedstock vapor; (D) converting the SiO.sub.2 feedstock vapor and the TiO2 feedstock vapor into SiO2 particles and TiO2 particles, respectively; (E) depositing the SiO2 particles and the TiO2 particles on a deposition surface while forming a titanium-doped SiO.sub.2 soot body; (F) vitrifying the titanium-doped SiO.sub.2 soot body while forming the synthetic quartz glass, whereby the TiO2 concentration of the synthetic quartz glass is between 5% by weight and 11% by weight. The liquid SiO.sub.2 feedstock material comprises at least one additional component made of the polyalkylsiloxane D3 having a weight fraction of mD3 and one additional component made of the polyalkylsiloxane D5 having a weight fraction of mD5 at a weight ratio of mD3/mD5 in a range of 0.01 to 1, and the liquid SiO.sub.2 feedstock material provided is evaporated while maintaining the weight ratio of mD3/mD5 and at least 99% by weight thereof are evaporated to form the gaseous SiO.sub.2 feedstock vapor.