A heating element and method for fabricating the same includes: a heating material piece configured to generate heat when being powered. A first substrate is configured to support the heating material piece and a liquid guiding member is configured to guide an atomizing liquid to be heated. The first substrate is a substrate made of a dense material and the heating material piece is a film with a certain resistance formed by a resistive slurry fixed on a surface of the dense material substrate by at least one selected from printing, coating, soaking and spraying. Two wires are electrically connected to the first substrate to form electrodes that are respectively connected to two ends of the film with a certain resistance. The liquid guiding member is a member made of a microporous material fixed outside the first substrate and the heating material piece.

One embodiment of the disclosure provides a method of fabricating a chamber component with a coating layer disposed on an interface layer with desired film properties. In one embodiment, a method of fabricating a coating material includes providing a base structure comprising an aluminum or silicon containing material, forming an interface layer on the base structure, wherein the interface layer comprises one or more elements from at least one of Ta, Al, Si, Mg, Y, or combinations thereof, and forming a coating layer on the interface layer, wherein the coating layer has a molecular structure of Si.sub.vY.sub.wMg.sub.xAl.sub.yO.sub.z. In another embodiment, a chamber component includes an interface layer disposed on a base structure, wherein the interface layer is selected from at least one of Ta, Al, Si, Mg, Y, or combinations thereof, and a coating layer disposed on the interface layer, wherein the coating layer has a molecular structure of Si.sub.vY.sub.wMg.sub.xAl.sub.yO.sub.z.

One embodiment of the disclosure provides a method of fabricating a chamber component with a coating layer disposed on an interface layer with desired film properties. In one embodiment, a method of fabricating a coating material includes providing a base structure comprising an aluminum or silicon containing material, forming an interface layer on the base structure, wherein the interface layer comprises one or more elements from at least one of Ta, Al, Si, Mg, Y, or combinations thereof, and forming a coating layer on the interface layer, wherein the coating layer has a molecular structure of Si.sub.vY.sub.wMg.sub.xAl.sub.yO.sub.z. In another embodiment, a chamber component includes an interface layer disposed on a base structure, wherein the interface layer is selected from at least one of Ta, Al, Si, Mg, Y, or combinations thereof, and a coating layer disposed on the interface layer, wherein the coating layer has a molecular structure of Si.sub.vY.sub.wMg.sub.xAl.sub.yO.sub.z.

A method for producing an electrically-conductive pellet includes reducing a size of a first material. The method also includes wetting the first material to produce a first slurry. The method also includes introducing the first slurry into a fluidizer to produce a first pellet. The method also includes reducing a size of a second material. The second material is an electrically-conductive material. The method also includes wetting the second material to produce a second slurry. The method also includes applying the second slurry to the first pellet.

A coating is formed on a surface of a base material of a furnace, and includes a base layer and a sliding material layer that is formed on a surface of the base layer and contains an oxide ceramic and a compound having a layered crystal structure. The sliding material layer causes the collided ashes to be slipped and facilitates the drop off of the adhered ashes. The base material forms a heat transfer tube or a wall surface of the furnace. The coating is also applied to a coal gasification furnace, a pulverized coal fired boiler, a combustion apparatus, or a reaction apparatus containing a furnace.

A coating is formed on a surface of a base material of a furnace, and includes a base layer and a sliding material layer that is formed on a surface of the base layer and contains an oxide ceramic and a compound having a layered crystal structure. The sliding material layer causes the collided ashes to be slipped and facilitates the drop off of the adhered ashes. The base material forms a heat transfer tube or a wall surface of the furnace. The coating is also applied to a coal gasification furnace, a pulverized coal fired boiler, a combustion apparatus, or a reaction apparatus containing a furnace.

A membrane modification method for improving liquid membrane separation of carbon dioxide (CO.sub.2) includes grafting an organic substance containing an amine group on a porous membrane material, and loading water into pore channels of the porous membrane material to prepare a supported liquid membrane for a gas mixture separation experiment of CO.sub.2. In the method, the amine group is introduced through chemical grafting to make the water being alkaline when used as membrane liquid. Compared with an alkaline solution as the membrane liquid, the method can avoid the loss of active alkaline substances and increase the permeation flux of CO.sub.2.

A membrane modification method for improving liquid membrane separation of carbon dioxide (CO.sub.2) includes grafting an organic substance containing an amine group on a porous membrane material, and loading water into pore channels of the porous membrane material to prepare a supported liquid membrane for a gas mixture separation experiment of CO.sub.2. In the method, the amine group is introduced through chemical grafting to make the water being alkaline when used as membrane liquid. Compared with an alkaline solution as the membrane liquid, the method can avoid the loss of active alkaline substances and increase the permeation flux of CO.sub.2.

Paste compositions for additive manufacturing and methods for the same are provided. The paste composition may include an organic vehicle, and one or more powders dispersed in the organic vehicle. The organic vehicle may include a solvent, a polymeric binder, a thixotropic additive, and a dispersant. The organic vehicle may be configured to provide the paste composition with a suitable viscosity. The organic vehicle may also be configured to provide a stable paste composition for a predetermined period of time.

A chamber component comprises a body and a plasma sprayed ceramic coating on the body. The plasma sprayed ceramic coating is applied using a method that includes feeding powder comprising a yttrium oxide containing solid solution into a plasma spraying system, wherein the powder comprises a majority of donut-shaped particles, each of the donut-shaped particles having a spherical body with indentations on opposite sides of the spherical body. The method further includes plasma spray coating the body to apply a ceramic coating onto the body, wherein the ceramic coating comprises the yttrium oxide containing solid solution, wherein the donut-shaped particles cause the ceramic coating to have an improved morphology and a decreased porosity as compared to powder particles of other shapes, wherein the improved surface morphology comprises a reduced amount of surface nodules.