Patent classifications
C04B35/10
Chemistry compatible coating material for advanced device on-wafer particle performance
A chamber component comprises a body and a plasma sprayed ceramic coating on the body. The plasma sprayed ceramic coating is applied using a method that includes feeding powder comprising a yttrium oxide containing solid solution into a plasma spraying system, wherein the powder comprises a majority of donut-shaped particles, each of the donut-shaped particles having a spherical body with indentations on opposite sides of the spherical body. The method further includes plasma spray coating the body to apply a ceramic coating onto the body, wherein the ceramic coating comprises the yttrium oxide containing solid solution, wherein the donut-shaped particles cause the ceramic coating to have an improved morphology and a decreased porosity as compared to powder particles of other shapes, wherein the improved surface morphology comprises a reduced amount of surface nodules.
Chemistry compatible coating material for advanced device on-wafer particle performance
A chamber component comprises a body and a plasma sprayed ceramic coating on the body. The plasma sprayed ceramic coating is applied using a method that includes feeding powder comprising a yttrium oxide containing solid solution into a plasma spraying system, wherein the powder comprises a majority of donut-shaped particles, each of the donut-shaped particles having a spherical body with indentations on opposite sides of the spherical body. The method further includes plasma spray coating the body to apply a ceramic coating onto the body, wherein the ceramic coating comprises the yttrium oxide containing solid solution, wherein the donut-shaped particles cause the ceramic coating to have an improved morphology and a decreased porosity as compared to powder particles of other shapes, wherein the improved surface morphology comprises a reduced amount of surface nodules.
Method for producing ceramic composite
A method for producing a ceramic composite includes: preparing a sintered body in a plate form containing a fluorescent material having a composition of a rare earth aluminate, and aluminum oxide; and eluting the aluminum oxide from the sintered body by contacting the sintered body with a basic substance, for example, contained in an alkali aqueous solution, and the dissolution amount of the fluorescent material eluted from the sintered body in the step of eluting the aluminum oxide is 0.5% by mass or less based on an amount of the fluorescent material contained in the sintered body as 100% by mass.
Method for producing ceramic composite
A method for producing a ceramic composite includes: preparing a sintered body in a plate form containing a fluorescent material having a composition of a rare earth aluminate, and aluminum oxide; and eluting the aluminum oxide from the sintered body by contacting the sintered body with a basic substance, for example, contained in an alkali aqueous solution, and the dissolution amount of the fluorescent material eluted from the sintered body in the step of eluting the aluminum oxide is 0.5% by mass or less based on an amount of the fluorescent material contained in the sintered body as 100% by mass.
Method for producing ceramic composite
A method for producing a ceramic composite includes: preparing a sintered body in a plate form containing a fluorescent material having a composition of a rare earth aluminate, and aluminum oxide; and eluting the aluminum oxide from the sintered body by contacting the sintered body with a basic substance, for example, contained in an alkali aqueous solution, and the dissolution amount of the fluorescent material eluted from the sintered body in the step of eluting the aluminum oxide is 0.5% by mass or less based on an amount of the fluorescent material contained in the sintered body as 100% by mass.
HOLLOW PARTICLES, METHOD OF MANUFACTURING THE SAME, THE HEAT-DISSIPATING FLUID COMPOSITION INCLUDING THE SAME
Hollow spherical particles which include: an inorganic particle layer including ceramic particles and conductive carbon-based particles; and a polymer coating layer surrounding the inorganic particle layer, and in which the inorganic particle layer surrounds an empty inner space to form the hollow spherical particles. A method of manufacturing the hollow spherical particles and a heat-dissipating fluid composition including the hollow spherical particles.
Grinding method and grinding medium
A method for manufacturing microfibrillated cellulose, a particulate grinding medium suitable for use in said method, a material which wears rough, and a method for making said particulate grinding medium.
Grinding method and grinding medium
A method for manufacturing microfibrillated cellulose, a particulate grinding medium suitable for use in said method, a material which wears rough, and a method for making said particulate grinding medium.
CATALYST MEDIUM COMPRISING HOLLOW MICROSPHERES
The present invention relates to a calcined medium, in particular a catalyst or a catalyst medium or an adsorbent/absorbent mass, in particular in the form of extrudates, pellets, granules or beads, the medium comprising a porous matrix comprising carbonates, clays, zeolites, oxides, or metal and/or silicon hydroxides, and the matrix incorporating hollow mineral microspheres having a different composition in a content of between 0.3 and 50% by weight, in particular between 0.5 and 15% by weight, of the matrix.
CATALYST MEDIUM COMPRISING HOLLOW MICROSPHERES
The present invention relates to a calcined medium, in particular a catalyst or a catalyst medium or an adsorbent/absorbent mass, in particular in the form of extrudates, pellets, granules or beads, the medium comprising a porous matrix comprising carbonates, clays, zeolites, oxides, or metal and/or silicon hydroxides, and the matrix incorporating hollow mineral microspheres having a different composition in a content of between 0.3 and 50% by weight, in particular between 0.5 and 15% by weight, of the matrix.