A metal oxide film includes indium, M, (M is Al, Ga, Y, or Sn), and zinc and includes a region where a peak having a diffraction intensity derived from a crystal structure is observed by X-ray diffraction in the direction perpendicular to the film surface. Moreover, a plurality of crystal parts is observed in a transmission electron microscope image in the direction perpendicular to the film surface. The proportion of a region other than the crystal parts is higher than or equal to 20% and lower than or equal to 60%.

Set forth herein are processes and materials for sintering dense thin green films comprising lithium-stuffed garnet powder and a binder to obtain sintered lithium-stuffed garnet thin films. Some of the processes, herein, include providing a first setter and a second setter, wherein the first setter and second setter each include at least 5 atomic % lithium (Li) per setter; placing the green film on the first setter; placing the second setter within 2 cm of the green film but not in contact with the green film; and heating the green film to at least 900 C.

Disclosed is to provide a composite structure used as a member for a semiconductor manufacturing apparatus with which low-particle generation can be improved, as well as a semiconductor manufacturing apparatus including the same. A composite structure including a base material and a structure that is provided on the base material and has a surface, in which the structure comprises Y.sub.3Al.sub.5O.sub.12 as a main component, and has an indentation hardness being larger than 8.5 GPa features excellent low-particle generation and is suitably used as a member for a semiconductor apparatus.

Set forth herein are pellets, thin films, and monoliths of lithium-stuffed garnet electrolytes having engineered surfaces. These engineered surfaces have a list of advantageous properties including, but not limited to, low surface area resistance, high Li.sup.+ ion conductivity, low tendency for lithium dendrites to form within or thereupon when the electrolytes are used in an electrochemical cell. Other advantages include voltage stability and long cycle life when used in electrochemical cells as a separator or a membrane between the positive and negative electrodes. Also set forth herein are methods of making these electrolytes including, but not limited to, methods of annealing these electrolytes under controlled atmosphere conditions. Set forth herein, additionally, are methods of using these electrolytes in electrochemical cells and devices. The instant disclosure further includes electrochemical cells which incorporate the lithium-stuffed garnet electrolytes set forth herein.

A sintered composite ceramic, includes: a lithium-garnet major phase; and a lithium dendrite growth inhibitor minor phase, such that the lithium dendrite growth inhibitor minor phase has a Li-metal oxide in a range of >0-10 wt. % based on the total weight of the sintered composite ceramic.

A method for forming a sintered composition includes providing a slurry precursor including a chalcogenide compound; tape casting the slurry precursor to form a green tape; and sintering the green tape at a temperature in a range of 500° C. to 1350° C. for a time in a range of less than 60 min. An energy device includes a first sintered, non-polished electrode having a first surface and a second surface; a first current collector disposed on the first surface of the first electrode; an electrolyte layer disposed on the second surface of the first electrode; and a second electrode disposed on the electrolyte layer.

A novel and environmentally preferable method is provided for preparing solid electrolyte particles capable of making dense, flexible, Li.sup.+ conducting electrolyte thin films. Methods are also provided for using the solid electrolyte particles and/or thin films in manufacturing safer and more efficient lithium-based batteries. In particular, the method uses inorganic precursors instead of using organic precursors in preparing an aerosol and then convert the aerosol to solid powders to provide the solid electrolyte particles. The solid electrolyte particles prepared have a cubic polymorph and have a desired particle size range, and are capable of making a solid electrolyte film with a thickness less than 50 μm.

A process of forming a sintered article includes heating a green portion of a tape of polycrystalline ceramic and/or minerals in organic binder at a binder removal zone to a temperature sufficient to pyrolyze the binder; horizontally conveying the portion of tape with organic binder removed from the binder removal zone to a sintering zone; and sintering polycrystalline ceramic and/or minerals of the portion of tape at the sintering zone, wherein the tape simultaneously extends through the removal and sintering zones.

A metal oxide film includes indium, M, (M is Al, Ga, Y, or Sn), and zinc and includes a region where a peak having a diffraction intensity derived from a crystal structure is observed by X-ray diffraction in the direction perpendicular to the film surface. Moreover, a plurality of crystal parts is observed in a transmission electron microscope image in the direction perpendicular to the film surface. The proportion of a region other than the crystal parts is higher than or equal to 20% and lower than or equal to 60%.

This invention provides resin formulations which may be used for 3D printing and pyrolyzing to produce a ceramic matrix composite. The resin formulations contain a solid-phase filler, to provide high thermal stability and mechanical strength (e.g., fracture toughness) in the final ceramic material. The invention provides direct, free-form 3D printing of a preceramic polymer loaded with a solid-phase filler, followed by converting the preceramic polymer to a 3D-printed ceramic matrix composite with potentially complex 3D shapes or in the form of large parts. Other variations provide active solid-phase functional additives as solid-phase fillers, to perform or enhance at least one chemical, physical, mechanical, or electrical function within the ceramic structure as it is being formed as well as in the final structure. Solid-phase functional additives actively improve the final ceramic structure through one or more changes actively induced by the additives during pyrolysis or other thermal treatment.