A bonded ceramic component which is resistant to reactive halogen-containing plasmas, said component comprising ceramic portions which are bonded together by a bonding material which includes an oxyfluoride glass-ceramic-comprising transition area between interfaces of the ceramic portions, where the transition area includes from at least 0.1 volume % amorphous phase up to about 50 volume % amorphous phase.

A technical object of the present invention is to devise a method by which bonding strength between an element base and a sealing material layer can be increased without thermal degradation of a member to be housed inside, to thereby improve long-term reliability of a hermetic package. A method of producing a hermetic package of the present invention includes the steps of: preparing a ceramic base and forming a sealing material layer on the ceramic base; preparing a glass substrate and arranging the ceramic base and the glass substrate so that the glass substrate is brought into contact with the sealing material layer on the ceramic base; and irradiating the sealing material layer with laser light from a glass substrate side to seal the ceramic base and the glass substrate with each other through intermediation of the sealing material layer, to thereby provide a hermetic packages.

A measuring arrangement with a ceramic measuring cell and a metal process connection for connecting the measuring cell to a measuring environment, with the measuring cell being fastened in the process connection without gaskets and in a diffusion-resistant fashion, with the measuring cell being fastened at a ceramic ring, which is arranged at a metal ring for fastening in the process connection.

A pressure sensor, including a platform of ceramic, a measuring membrane arranged on the platform, a pressure measuring chamber enclosed in the platform under the measuring membrane, and at least one metal body connected with the platform via a pressure-tight, preferably elastomer free, mechanical connection. Thermomechanical stresses arising from the connection are reduced by features including that the pressure-tight, mechanical connection occurs via an adapting body arranged between the platform and the metal body. The adapting body has a thermal expansion coefficient, which rises in direction (z) extending from the platform to the metal body from a coefficient of expansion corresponding to a thermal coefficient of expansion of the ceramic of the platform to a coefficient of expansion corresponding to the thermal coefficient of expansion of the metal body, and the adapting body is connected by a first joint with the platform and by a second joint with the metal body.

This invention relates to an assemblage of a semiconductor processing apparatus comprising a first aluminum nitride (AlN) component and a second aluminum nitride component, wherein the first and second aluminum nitride components are connected by a joint, said joint comprising a composite glass-ceramic comprising Y.sub.2O.sub.3Al.sub.2O.sub.3SiO.sub.2 (YAS) glass; and at least one of crystalline aluminosilicate and aluminum nitride.

A sealing agent for ion transport membranes (ITMs) includes a composition having a glass powder and a ceramic powder. The ceramic powder can include Ba.sub.0.5Sr.sub.0.5Co.sub.0.8Fe.sub.0.2O.sub.3 (BSCF) or La.sub.2NiO.sub.4+ (LNO). The ceramic powder can be identical to the ceramic powder from which the ITM is made. The glass powder can include PYREX glass. The sealing agent can be in the form of a paste. The sealing agent can be used to attach an ion transport membrane to one or more support tubes. The sealing agent includes from about 10 wt. % to about 40 wt. % glass powder and from about 60 wt. % to about 90% wt. % (BSCF) ceramic powder.

Solid oxide electrolysis cell (SOEC) stack obtainable by a process comprising the use of a glass sealant with composition 50 to 70 wt % SiO2, 0 to 20 wt % Al2O3, 10 to 50 wt % CaO, 0 to 10 wt % MgO, 0 to 2 wt % (Na2o 1K2O), 0 to 10 wt % b2O3, and 0 to 5 wt % of functional elements selected from TiO2, ZrO2, ZrO2, F, P2O5, Mo03, FeO3, MnO 2, LaSrMnO perovskite (LSM) and combinations thereof. Preferably, the sealant is a sheet of E-glass fibers with a composition in wt % of 52-56 SiO2, 12-16AL2O3, 16-25 CaO, 0-6MgO, 0-2 Na2+K2O, 0-10 B2O3, 0-1.5 TiO2, O-1F.

A thermal protection system that reduces a mismatch of thermal expansion coefficients CTE between a first material layer (CTE1) and a second material layer (CTE2) at a first layer-second layer interface. A portion of aluminum borosilicate (abs) or another suitable additive (add), whose CTE value, CTE(add), satisfies (CTE(add)CTE1)(CTE(add)CTE2)<0, is distributed with variable additive density, (z;add), in the first material layer and/or in the second material layer, with (z;add) near the materials interface being relatively high (alternatively, relatively low) and (z;add) in a region spaced apart from the interface being relatively low (alternatively, relatively high).

A superabrasive compact and a method of making the superabrasive compact are disclosed. A superabrasive compact may comprise a superabrasive volume and a substrate. The substrate may be attached to the superabrasive volume via an interface. The superabrasive volume may be formed by a plurality of polycrystalline superabrasive particles. The superabrasive particles may have nano or sub-micron scale surface texture.

A sealing agent for ion transport membranes (ITMs) includes a composition having a glass powder and a ceramic powder. The ceramic powder can include Ba.sub.0.5Sr.sub.0.5Co.sub.0.8Fe.sub.0.2O.sub.3- (BSCF) or La.sub.2NiO.sub.4+ (LNO). The ceramic powder can be identical to the ceramic powder from which the ITM is made. The glass powder can include PYREX glass. The sealing agent can be in the form of a paste. The sealing agent can be used to attach an ion transport membrane to one or more support tubes. The sealing agent includes from about 10 wt. % to about 40 wt. % glass powder and from about 60 wt. % to about 90% wt. % (BSCF) ceramic powder.