C04B2237/62

ADDITIVELY MANUFACTURED CASTING CORE-SHELL MOLD AND CERAMIC SHELL WITH VARIABLE THERMAL PROPERTIES

The present disclosure relates to a method of forming a cast component and a method of forming a casting mold. The method is performed by connecting at least one wax gate component to a ceramic core-shell mold. The ceramic core-shell mold includes at least a filter, first core portion, a first shell portion, and at least one first cavity between the core portion and the first shell portion. The core-shell mold may manufactured using an additive manufacturing process and may include an integrated ceramic filter. At least a portion of the ceramic core-shell mold and the wax gate component is coated with a second ceramic material. The wax gate component is then removed to form a second cavity in fluid communication with the first cavity.

CERAMIC STRUCTURE AND SUPPORTING MECHANISM WHICH IS PROVIDED WITH SAID CERAMIC STRUCTURE
20220234957 · 2022-07-28 ·

A ceramic structure of the present disclosure is provided with: a first member made of a single crystal of sapphire or an yttrium aluminum composite oxide; and a second member in contact with the first member, the second member being made of ceramic containing an aluminum oxide or an yttrium aluminum composite oxide as a principal component, wherein, of crystal grains constituting the second member, contact grains of the second member, which are grains in contact with the first member, include a first curved surface part that is convex toward the first member.

NEEDLED CERAMIC MATRIX COMPOSITE COOLING PASSAGES

A method for forming a passage in a ceramic matrix composite component incudes forming a core for a ceramic matrix composite component; embedding a hollow member into the core at a desired location for a passage in the ceramic matrix composite component; wrapping the core with a ceramic material; and inserting a rod through the hollow member and into the core.

Multilayer substrate

A multilayer substrate that includes a first ceramic layer that is a dense body, a second ceramic layer that has open pores, and a resin layer adjacent the second ceramic layer, wherein a material of the resin layer is present in the open pores of the second ceramic layer.

REFRACTIVE INDEX MATCHING BASE RESIN FOR EXTREMELY FINE THREE-DIMENSIONAL CERAMIC STRUCTURES
20220193992 · 2022-06-23 ·

An optically clear resin for additive manufacturing includes an optically clear ceramic precursor having a pre-defined refractive index. Each molecule of the ceramic precursor has at least two photopolymerizable functional groups, at least one of the photopolymerizable functional groups being functionalized with a refractive index-tuning group thereby causing the ceramic precursor to have the pre-defined refractive index.

ELECTROSTATIC CHUCK MANUFACTURING METHOD, ELECTROSTATIC CHUCK, AND SUBSTRATE PROCESSING APPARATUS
20230268217 · 2023-08-24 ·

A method of manufacturing an electrostatic chuck includes: preparing a first ceramic plate having a first hole formed therein; preparing a second ceramic plate having a second hole formed at a position different from a position of the first hole in a horizontal direction; forming a first slurry layer on the first ceramic plate or the second ceramic plate with a first slurry, the first slurry layer having a flow path formed therein to connect the first hole and the second hole; stacking the first ceramic plate and the second ceramic plate one above the other via the first slurry layer; and bonding the first ceramic plate and the second ceramic plate stacked one above the other via the first slurry layer.

SEMICONDUCTOR SUBSTRATE SUPPORT WITH MULTIPLE ELECTRODES AND METHOD FOR MAKING SAME
20220143726 · 2022-05-12 · ·

A method for manufacturing an electrostatic chuck with multiple chucking electrodes made of ceramic pieces using metallic aluminum as the joining. The aluminum may be placed between two pieces and the assembly may be heated in the range of 770 C to 1200 C. The joining atmosphere may be non-oxygenated. After joining the exclusions in the electrode pattern may be machined by also machining through one of the plate layers. The machined exclusion slots may then be filled with epoxy or other material. An electrostatic chuck or other structure manufactured according to such methods.

Aluminum nitride sintered body, method of making the same, and semiconductor manufacturing equipment component using aluminum nitride sintered body
11325866 · 2022-05-10 · ·

An aluminum nitride sintered body for use in a semiconductor manufacturing apparatus is provided. The aluminum nitride sintered body exhibits, in a photoluminescence spectrum thereof in a wavelength range of 350 nm to 700 nm obtained with 250 nm excitation light, a highest emission intensity peak within a wavelength range of 580 nm to 620 nm.

Method of producing a multi-layer ceramic electronic component and multi-layer ceramic electronic component
11721487 · 2023-08-08 · ·

A method of producing a multi-layer ceramic electronic component includes: preparing a multi-layer unit including ceramic layers laminated in a direction of a first axis, internal electrodes disposed between the ceramic layers, and first and second side surfaces facing each other in a direction of a second axis orthogonal to the first axis, the internal electrodes being exposed from the first and second side surfaces; thermocompression-bonding a first side margin sheet to the first side surface; forming a first side margin by punching the thermocompression-bonded first side margin sheet with the first side surface; thermocompression-bonding a second side margin sheet to the second side surface, the second side margin sheet including a bonding surface having a higher flexibility than the first side margin formed on the first side surface; and forming a second side margin by punching the thermocompression-bonded second side margin sheet with the second side surface.

JOINED BODY, HOLDING DEVICE, AND ELECTROSTATIC CHUCK
20230303457 · 2023-09-28 ·

A joined body includes a first member and a second member which are joined together via a joining portion including a metal layer having a plurality of pores communicating with each other. The first member and the metal layer have respective through holes formed in the first member and the metal layer, respectively, and communicating with each other. A tubular member is disposed between an inner side portion of the through hole formed in the metal layer and an interior portion of the metal layer.