A method for manufacturing a ceramic substrate that includes preparing a plurality of ceramic green sheets, at least one of the plurality of ceramic green sheets having a disappearance material that disappears by firing in a recessed portion formation planned region of the at least one of the plurality of ceramic green sheets; forming a mother multilayer body by laminating the plurality of ceramic green sheets such that the at least the one ceramic green sheet having the disappearance material is positioned on an uppermost layer of the mother multilayer body; and forming a recessed portion in the mother multilayer body before firing by pressing the recessed portion formation planned region of the mother multilayer body.

A ceramic electronic component includes a multilayer chip having a substantially rectangular parallelepiped shape and including a first multilayer structure and a second multilayer structure disposed on each of top and bottom faces of the first multilayer structure, the first multilayer structure including first ceramic dielectric layers having a first width in a first direction in which side faces of the multilayer chip are opposite to each other, the second multilayer structure including second internal electrode layers having a second width less than the first width in the first direction, and a pair of external electrodes formed from the respective two edge faces to at least one of side faces of the multilayer chip, wherein main components of the first and second internal electrode layers differ from a main component of the external electrodes.

A heater includes a base body, a resistance heating element, and a terminal part. The base body is made of ceramic and is a plate shape. The resistance heating element is located inside the base body. The terminal part is electrically connected to the internal conductor, is located inside the base body in at least a part, and is exposed from a lower surface of the base body to an exterior of the base body. The base body includes a hole opened at the lower surface of the base body. The terminal part includes a connection conductor. The connection conductor is inserted in the hole and is connected to the internal conductor. A lower surface of the connection conductor is located on a side closer to the upper surface of the base body other than the lower surface of the base body. The hole includes a reduced-diameter portion which has a diameter smaller than a diameter of the connection conductor between the lower surface of the connection conductor and the lower surface of the base body.

A manufacturing method of ceramic powder includes: synthesizing barium titanate powder from barium carbonate, titanium dioxide, manganese carbonate, and one of ammonium molybdate and tungsten oxide, wherein: a solid solution amount of the donor element is 0.05 mol or more and 0.3 mol or less; a solid solution amount of the accepter element with respect to the barium titanate is 0.02 mol or more and 0.2 mol or less on a presumption that the amount of the barium titanate is 100 mol and the acceptor element is converted into an oxide; and relationships y≥−0.0003x+1.0106, y≤−0.0002x+1.0114, 4≤x≤25 and y≤1.0099 are satisfied when a specific surface area of the ceramic powder is “x” and an axial ratio c/a of the ceramic powder is “y”.

An electrostatic chuck with a top surface adapted for Johnsen-Rahbek clamping in the temperature range of 500 C to 750 C. The top surface may be sapphire. The top surface is attached to the lower portion of the electrostatic chuck using a braze layer able to withstand corrosive processing chemistries. A method of manufacturing an electrostatic chuck with a top surface adapted for Johnsen-Rahbek clamping in the temperature range of 500 C to 750 C.

The present disclosure includes a system and method for monitoring degradation of a high temperature composite component (HTC). The HTC is defined by a volume that includes a matrix material and a fiber formed from at least one of ceramic and carbon material. One or more electrical conductors are disposed within the volume and connected directly or indirectly to a monitoring system.

A method for the joining of ceramic pieces includes applying a layer of titanium on a first ceramic piece and applying a layer of titanium on a second ceramic piece; applying a layer of nickel on each of the layers of titanium on the first ceramic piece and the second ceramic piece; applying a layer of nickel phosphorous to each of the layers of nickel on the first ceramic piece and the second ceramic piece; assembling the first ceramic piece and the second ceramic piece with the layers of titanium, nickel, and nickel phosphorous therebetween; pressing the layer of nickel phosphorous of the first ceramic piece against the layer of nickel phosphorous of the second ceramic piece; heating the first ceramic piece and the second ceramic piece to a joining temperature in a vacuum; and cooling the first ceramic piece and the second ceramic piece. A hermetic seal is formed between the first ceramic piece and the second ceramic piece.

A manufacturing method of ceramic powder includes mixing a barium carbonate having a specific surface are of 15 m.sup.2/g or more, a titanium dioxide having a specific surface area of 20 m.sup.2/g or more, a first compound of a donor element having a larger valence than Ti, and a second compound of an acceptor element having a smaller valence than Ti and having a larger ion radium than Ti and the donor element, and synthesizing barium titanate powder by calcining the barium carbonate, the titanium dioxide, the first compound and the second compound until a specific surface area of the barium titanate powder becomes 4 m.sup.2/g or more and 25 m.sup.2/g or less.

An electrostatic chuck includes a ceramic top plate layer made of a beryllium oxide material, a ceramic bottom plate layer made of a beryllium oxide material, a ceramic middle plate layer disposed between the ceramic top plate layer and the ceramic bottom plate layer, an electrode layer disposed between the ceramic top plate layer and the ceramic middle plate layer, and a heater layer disposed between the ceramic middle plate layer and the ceramic bottom plate layer. The electrode layer joins and hermetically seals the ceramic top plate layer to the ceramic middle plate layer, and the heater layer joins and hermetically seals the ceramic middle plate layer to the ceramic bottom plate layer.

The present disclosure includes a system and method for monitoring degradation of a high temperature composite component (HTC). The HTC is defined by a volume that includes a matrix material and a fiber formed from at least one of ceramic and carbon material. One or more electrical conductors are disposed within the volume and connected directly or indirectly to a monitoring system.